JPH0391795A - Worked articles - Google Patents

Abstract

PURPOSE:To eliminate the parallax of a patterned articles and to improve the visibility by reducing the reflection factor difference between a conductive layer and an insulating layer as to the worked articles obtained by patterning a transparent substrate with the electrically conductive layer and insulating layer. CONSTITUTION:The reflectivity difference between the electrically conductive layer and insulating layer of the worked articles formed by patterning at least part of the transparent substrate with the conductive layer and insulating layer is set to 1.5%. When the reflectivity difference exceeds 1.5%, the patterning is recognized clearly and that is not preferable as to the outward appearance. When the conductive layer or insulating layer is large in area, the difference is preferably <= 1.0%. The color of reflected light is equalized as much as possible so as to improve the visibility. The reflectivity difference is set below 1.5% by properly controlling the refractive indexes and film thicknesses of the conductive layer and insulating layer.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a patterned article having conductivity, and is particularly suitable for use in a wide range of fields such as liquid crystal display electrodes and image input devices called input tablets. Ru.

[Prior Art] Currently, as conductive patterned articles, products in which a substrate is made of inorganic glass or various plastics and a conductive layer is patterned thereon are widely used.

However, this article has a problem in that parallax occurs due to the difference in reflectance between the substrate and the conductive layer, resulting in poor visibility, and at present no improvements have been made to this problem.

[Problems to be Solved by the Invention] The present invention aims to solve the problems of the prior art, and aims to eliminate parallax of a patterned article and improve visibility.

Means for Solving the Problem] In order to achieve the above object, the present invention has the following configuration.

"A processed article formed by patterning a conductive layer and an insulating layer on at least a portion of a transparent substrate, characterized in that the difference in reflectance between the conductive layer and the insulating layer is 1.5% or less. Processed article.'' As the transparent substrate in the present invention, any substrate can be used as long as it is transparent, such as inorganic glass, acrylic resin, polycarbonate, diethylene glycol bisallyl carbonate polymer (halogenated) bisphenol, etc. A no Ji (
meth)acrylate polymer and its copolymer, urethane-modified di(meth) of (halogenated) bisphenol A
Substrates made of acrylate polymers and copolymers thereof, polystyrene and copolymers thereof, polyesters, polyethersulfones, poly(4-methyl-1-pentene), etc. can be used, and their forms include, for example, sheet shapes. It can be used in various forms such as , film form, etc.

In the present invention, at least a portion of the transparent substrate includes:
It is formed by patterning a conductive layer and an insulating layer, and the difference in reflectance between the conductive layer and the insulating layer is 1.5%.
It is necessary that the following is true. Here, in the present invention, the reflectance difference is defined by the following formula.

Reflectance difference = 1 Total light reflectance of conductive layer - Total light reflectance of insulating layer Here, the total light reflectance of the conductive layer and the insulating layer are the total light reflection and reflectance in the entire visible light region, respectively. It is expressed as an integral value of the value multiplied by the luminous intensity.

That is, if the reflectance difference exceeds 1.5%, patterning will be clearly recognized and the appearance will be unfavorable. Particularly when the area of the conductive layer and/or insulating layer is large, ■. It is preferable that it is 0% or less. In addition, in the present invention, in order to further improve visibility, it is more preferable that the reflected light color be as same as possible or as close as possible.

In addition, there are no particular limitations on how to reduce the reflectance difference to 1.5% or less, but it can be achieved, for example, by appropriately controlling the refractive index and film thickness of the conductive layer and the insulating layer, respectively. I can do it.

Furthermore, the area ratio between the conductive layer and the insulating layer is not particularly limited. However, since the present invention aims to improve visibility in a patterned article, it is preferable that both the conductive layer and the insulating layer have an area that is visible to the user.

In addition, when forming such a conductive layer and/or an insulating layer, it is preferable that the substrate surface be cleaned, and cleaning methods include removing dirt with a surfactant, degreasing with an organic solvent, and dirt with Freon. Removal etc. can be applied.

Furthermore, in order to improve the adhesion and durability between the transparent substrate and the conductive layer or insulating layer, it is also a suitable means to subject the transparent substrate to various pretreatments in advance when providing each layer. Particularly preferably used methods include activated gas treatment and chemical treatment with acids, alkalis, etc. depending on the concentration.

Such activated gas treatment is treatment using ions, electrons, or excited gas under normal pressure or reduced pressure. Examples of methods for generating these activated gases include methods using corona discharge, direct current under reduced pressure, high voltage discharge using low frequency, high frequency, or microwave. In particular, treatment with low-temperature plasma obtained by high-frequency discharge under reduced pressure is preferably used from the viewpoint of reproducibility and productivity. The gases used here are not particularly limited, but specific examples include oxygen, nitrogen, hydrogen, carbon dioxide, sulfur dioxide, helium, neon, argon, freon, water vapor, ammonia, carbon monoxide, chlorine, Examples include nitrogen monoxide and nitrogen dioxide. These can be used not only alone but also as a mixture of two or more. Furthermore, in the above-mentioned use for the same purpose, it is also possible to raise the temperature of the processed substrate.

It is also preferable to provide a film with hard coat properties between the substrate and the conductive layer and the insulating layer in order to improve the surface hardness, heat resistance, alkali resistance, adhesion, etc. of the conductive layer and the insulating layer. be.

As the hard coat film, any film may be used as long as it has hard coat properties. Among them, particularly preferred examples of coatings that can be used include melamine resin, epoxy resin, polysiloxane resin, and acrylic resin. Curable resins are preferably used. Furthermore, surface hardness is improved and adhesive strength is improved. From this viewpoint, polysiloxane resin is preferably used.

In the present invention, the conductive layer has an electrical resistance value of 1×10
It is preferably in the range of 1×10 9 Ω/mouth or more and 1×10 9 Ω/mouth or less, and more preferably 1×■0° Ω/mouth or more and 1×10 6 Ω/mouth or less. Regarding the components and formation method of the conductive layer, metals such as gold, palladium, and chromium, and metal oxides such as indium oxide and tin oxide can be formed by methods such as vacuum evaporation, sputtering, and coating. Conventionally known components and formation methods can be used in the present invention. Among these means, it is most preferable to form an oxide consisting of In and/or Sn by vacuum evaporation or low-temperature sputtering in terms of imparting high transparency, high durability, and high conductivity. . In addition, from the viewpoint of high transparency, high conductivity, adhesion, heat resistance, alkali resistance, etc., it is more preferable to make the surface temperature of the transparent substrate used as high as possible, specifically 100°C to 350°C. Particularly suitable. In addition, the composition ratio of the oxide consisting of In and/or Sn is determined by the sheet resistance value required for the conductive layer,
Although it should be determined by transparency etc., the content of Sn02 is preferably 20 wt% or less from the viewpoint of providing a low sheet resistance value and high transparency.

The thickness of the conductive layer is not particularly limited, but from the viewpoint of transparency, conductivity, flexibility, prevention of surface cracks, etc., a thickness of 30 to 5000 is preferably used.

Next, the material of the insulating layer in the present invention is not particularly limited, but includes, for example, SiO2, 2rO2, AI20
3. TiO , Ti02, Ti+03, Y203, Yb
, o3, MgO, Ta203, Ce02, lI
An example of a material having a relatively high refractive index such as f02 is preferably used. These substances can be used not only alone but also as a mixture of two or more. Furthermore, these films may be a single layer film or a multilayer film.

In addition, as a method for forming the insulating layer, a vacuum evaporation method or a sputtering method is preferably used from the viewpoint of ease of forming a film, and the film thickness is 1 μm from the viewpoint of heat resistance.
The following is preferable, but it should be determined depending on the type and thickness of the conductive layer, and is not particularly limited.

Furthermore, examples of methods for patterning the conductive layer and the insulating layer include a photoresist method and a masking method, but the present invention is not particularly limited thereto. Furthermore, the insulation between the patterned conductive layer and the insulating layer is as follows:
When the applied voltage is, for example, 50 V, a resistance of 10 9 Ω/hole or more has particularly good insulation properties.

Furthermore, when the electrically conductive processed article of the present invention is used in an image input device called an input tablet, various processing is required. Deflection may occur due to differential shrinkage. From the viewpoint of preventing such deflection, it is also suitable to coat the surface opposite to the surface on which the conductive layer and the insulating layer are provided with a metal oxide layer.

The processed article obtained by the present invention has excellent visibility in addition to high transparency, high conductivity, and high durability, and is therefore particularly preferably used for liquid crystal display electrodes, image input devices, and the like.

[Example] In order to explain in more detail, Examples are given below, but the present invention is not limited thereto.

Example 1 (1) Formation of conductive layer Inorganic glass was used as a transparent substrate, and In--Sn oxide was coated to a thickness of 300 nm by sputtering. Next, after forming an arbitrary pattern using a photoresist layer, alkali etching was performed and the photoresist layer was subsequently removed, thereby obtaining a substrate having a patterned conductive layer. Using the digital multi tester MD-200C (manufactured by Sanwa Denki Meiki), 23
Measured at 50% RH. As a result, it had very good electrical conductivity of 130Ω/hole. Also, digital SM
-3 When measured using a color computer (manufactured by Suga Test Instruments Co., Ltd.), the total light reflectance of the conductive layer was 9.37.
%Met.

(2) Shape of Insulating Layer The conductive layer of the patterned article obtained in step (1) was masked and coated with ZrO2 to a thickness of 200A using a vacuum evaporation method. Regarding the obtained insulating layer part, (1)
The total light reflectance was measured in the same manner as in Section 1.

The result was 8.73%.

The reflectance difference between the two conductive layers and the insulating layer of the conductive processed article formed by the above method is 0. 64%, and visual observation showed that there was no parallax. Furthermore, using an insulation resistance meter (manufactured by Kyoritsu Denki Keiki ■), the insulation properties of the conductive layer and the insulating layer were measured at an applied voltage of 50 V. As a result, it had good insulation properties of 10 lOΩ or more.

Example 2 The same procedure as in Example 1 was carried out except that the thickness of the insulating layer in item (2) was changed to 30 OA.

The total light reflectance of the insulating layer was 10.56%. The difference in reflectance between the conductive layer and the insulating layer was 1.19%, with no parallax.

Comparative example ↑ Except for not providing the insulating layer in item (2) in Example 1,
Everything went the same way.

The total light reflectance of the inorganic glass was 4.80%. The reflectance difference between the conductive layer and the inorganic glass substrate was 4.57%, and the parallax was noticeable and visibility was poor.

Comparative Example 2 When the insulating layer in Example 2 was changed to TiQ2 and the total light reflectance of the insulating layer was set to 17.67%, the reflectance difference between the conductive layer and the insulating layer was 8.30%, and the parallax was It was conspicuous and had poor visibility. Example 3 (1) Preparation of transparent substrate with hard coat properties (a) γ
- Preparation of glycidoxypyltrimethoxysilane hydrolyzate 515 parts of γ-glycidoxypyltrimethoxysilane were charged into a reactor equipped with a stirring device, and while stirring,
．． 118 parts of 0IN HCI was added dropwise while maintaining the liquid temperature at 10°C, and after the dropwise addition was completed, stirring was continued for 30 minutes to perform hydrolysis.

(b) Preparation of liquid composition 223 parts of ethanol, 223 parts of n-propanol, and 1.8 parts of silicone surfactant were added and mixed to the hydrolyzate of (a) above, and further 18.2 parts of aluminum acetylacetonate was added. was added and sufficiently stirred and dissolved to obtain a liquid composition.

(c) Coating and drying Using a 1 mm thick "CR-39" (diethylene glycol bisallyl carbonate polymer) sheet as a transparent substrate, the liquid composition prepared in the above (section) was pulled up at a speed of 2.
Dip coating at a rate of 0 C [[l/min, then 82 °C
After precuring for 12 minutes and further heating at 93° C. for 4 hours, a transparent substrate with hard coat properties was obtained.

A conductive layer and an insulating layer were provided on the transparent substrate having such hard coat properties in the same manner as in Example 2.

The conductivity of the obtained conductive layer was 150Ω/hole.

Further, the difference in reflectance between the conductive layer and the insulating layer was 0.94%, and there was no parallax.

[Effects of the Invention] The processed article of the present invention has no parallax, good visibility, and excellent durability and transparency, so it is suitable for various uses such as liquid crystal display electrodes and image human power devices. Can be used.

Claims (1)

[Claims] (1) A processed article formed by patterning a conductive layer and an insulating layer on at least a portion of a transparent substrate, characterized in that the difference in reflectance between the conductive layer and the insulating layer is 1.5% or less. Processed goods.