JPH0390685U - - Google Patents

Info

Publication number
JPH0390685U
JPH0390685U JP14928489U JP14928489U JPH0390685U JP H0390685 U JPH0390685 U JP H0390685U JP 14928489 U JP14928489 U JP 14928489U JP 14928489 U JP14928489 U JP 14928489U JP H0390685 U JPH0390685 U JP H0390685U
Authority
JP
Japan
Prior art keywords
dissolved
membrane
oxygen
dissolved oxygen
deaerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14928489U
Other languages
English (en)
Japanese (ja)
Other versions
JP2507597Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989149284U priority Critical patent/JP2507597Y2/ja
Publication of JPH0390685U publication Critical patent/JPH0390685U/ja
Application granted granted Critical
Publication of JP2507597Y2 publication Critical patent/JP2507597Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
  • Physical Water Treatments (AREA)
JP1989149284U 1989-12-27 1989-12-27 溶存酸素除去装置 Expired - Lifetime JP2507597Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989149284U JP2507597Y2 (ja) 1989-12-27 1989-12-27 溶存酸素除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989149284U JP2507597Y2 (ja) 1989-12-27 1989-12-27 溶存酸素除去装置

Publications (2)

Publication Number Publication Date
JPH0390685U true JPH0390685U (enrdf_load_stackoverflow) 1991-09-17
JP2507597Y2 JP2507597Y2 (ja) 1996-08-14

Family

ID=31695693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989149284U Expired - Lifetime JP2507597Y2 (ja) 1989-12-27 1989-12-27 溶存酸素除去装置

Country Status (1)

Country Link
JP (1) JP2507597Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107879517A (zh) * 2017-12-14 2018-04-06 浙江启尔机电技术有限公司 一种用于浸没式光刻的超纯水脱气装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265604A (ja) * 1989-04-06 1990-10-30 Kurita Water Ind Ltd 水中の溶存酸素除去装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265604A (ja) * 1989-04-06 1990-10-30 Kurita Water Ind Ltd 水中の溶存酸素除去装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107879517A (zh) * 2017-12-14 2018-04-06 浙江启尔机电技术有限公司 一种用于浸没式光刻的超纯水脱气装置
CN107879517B (zh) * 2017-12-14 2023-12-12 浙江启尔机电技术有限公司 一种用于浸没式光刻的超纯水脱气装置

Also Published As

Publication number Publication date
JP2507597Y2 (ja) 1996-08-14

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term