JPH0390685U - - Google Patents

Info

Publication number
JPH0390685U
JPH0390685U JP14928489U JP14928489U JPH0390685U JP H0390685 U JPH0390685 U JP H0390685U JP 14928489 U JP14928489 U JP 14928489U JP 14928489 U JP14928489 U JP 14928489U JP H0390685 U JPH0390685 U JP H0390685U
Authority
JP
Japan
Prior art keywords
dissolved
membrane
oxygen
dissolved oxygen
deaerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14928489U
Other languages
Japanese (ja)
Other versions
JP2507597Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989149284U priority Critical patent/JP2507597Y2/en
Publication of JPH0390685U publication Critical patent/JPH0390685U/ja
Application granted granted Critical
Publication of JP2507597Y2 publication Critical patent/JP2507597Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
  • Physical Water Treatments (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案装置の実施態様の一例を示すフ
ローの説明図であり、第２図は従来装置の一例を
示すフローの説明図である。 １……膜脱気装置、２……脱気膜、３……脱酸
素装置、４……脱酸素樹脂、５……ポンプ、６…
…エゼクタ、７……吸引管、８……駆動水管、９
……給水管、１０……原水槽、１１……脱気水管
、１２……処理水管、１３，１４……弁。 FIG. 1 is a flow explanatory diagram showing an example of an embodiment of the device of the present invention, and FIG. 2 is a flow explanatory diagram showing an example of a conventional device. 1... Membrane deaerator, 2... Deaerator membrane, 3... Oxygen remover, 4... Oxygen remover resin, 5... Pump, 6...
...Ejector, 7...Suction pipe, 8...Drive water pipe, 9
... Water supply pipe, 10 ... Raw water tank, 11 ... Deaeration water pipe, 12 ... Processing water pipe, 13, 14 ... Valve.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 原水中に溶存している酸素等の溶存気体を除去
するための脱気膜を装着した膜脱気装置と、当該
膜脱気装置の処理水である脱気水中に残留する微
量の溶存酸素を更に除去するための脱酸素樹脂を
充填した脱酸素装置とからなることを特徴とする
溶存酸素除去装置。 A membrane deaerator equipped with a degassing membrane to remove dissolved gases such as oxygen dissolved in raw water, and a trace amount of dissolved oxygen remaining in the degassed water that is treated by the membrane deaerator. A device for removing dissolved oxygen, comprising a deoxidizer filled with a deoxidizing resin for further removal.
JP1989149284U 1989-12-27 1989-12-27 Dissolved oxygen removal device Expired - Lifetime JP2507597Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989149284U JP2507597Y2 (en) 1989-12-27 1989-12-27 Dissolved oxygen removal device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989149284U JP2507597Y2 (en) 1989-12-27 1989-12-27 Dissolved oxygen removal device

Publications (2)

Publication Number Publication Date
JPH0390685U true JPH0390685U (en) 1991-09-17
JP2507597Y2 JP2507597Y2 (en) 1996-08-14

Family

ID=31695693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989149284U Expired - Lifetime JP2507597Y2 (en) 1989-12-27 1989-12-27 Dissolved oxygen removal device

Country Status (1)

Country Link
JP (1) JP2507597Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107879517A (en) * 2017-12-14 2018-04-06 浙江启尔机电技术有限公司 A kind of ultrapure flotation unit for liquid immersion lithography

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265604A (en) * 1989-04-06 1990-10-30 Kurita Water Ind Ltd Removing equipment for dissolved oxygen in water

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265604A (en) * 1989-04-06 1990-10-30 Kurita Water Ind Ltd Removing equipment for dissolved oxygen in water

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107879517A (en) * 2017-12-14 2018-04-06 浙江启尔机电技术有限公司 A kind of ultrapure flotation unit for liquid immersion lithography
CN107879517B (en) * 2017-12-14 2023-12-12 浙江启尔机电技术有限公司 Ultrapure water degasser for immersion lithography

Also Published As

Publication number Publication date
JP2507597Y2 (en) 1996-08-14

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term