JPH0390435U - - Google Patents

Info

Publication number
JPH0390435U
JPH0390435U JP15167589U JP15167589U JPH0390435U JP H0390435 U JPH0390435 U JP H0390435U JP 15167589 U JP15167589 U JP 15167589U JP 15167589 U JP15167589 U JP 15167589U JP H0390435 U JPH0390435 U JP H0390435U
Authority
JP
Japan
Prior art keywords
thermocouple
metal case
slide plate
processing chamber
mounting structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15167589U
Other languages
English (en)
Other versions
JP2510965Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15167589U priority Critical patent/JP2510965Y2/ja
Publication of JPH0390435U publication Critical patent/JPH0390435U/ja
Application granted granted Critical
Publication of JP2510965Y2 publication Critical patent/JP2510965Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

Description

【図面の簡単な説明】
第１図は本考案を実施した加熱処理室の断面概
略図、第２図は第１図のＡ矢視図、第３図は従来
例を示す断面概略図、第４図は第３図のＢ矢視図
である。 １……加熱炉、２……ケース、８……熱電対固
定具、９……挿通孔、１１……ヒータケース、１
２……スライドプレートを示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 断熱材及び金属ケース等により構成される処理
    室の壁を挿通して取付けられる半導体製造装置に
    於ける熱電対取付け構造に於いて、処理室の壁の
    外殻を構成する金属ケースに長孔の熱電対挿通孔
    を設け、熱電対が取付けられる熱電対固定金具を
    スライドプレートを介して前記金属ケースに取付
    けると共に該スライドプレートを前記熱電対挿通
    孔の長径方向に調整可能としたことを特徴とする
    半導体製造装置に於ける熱電対取付け構造。
JP15167589U 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造 Expired - Lifetime JP2510965Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15167589U JP2510965Y2 (ja) 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15167589U JP2510965Y2 (ja) 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造

Publications (2)

Publication Number Publication Date
JPH0390435U true JPH0390435U (ja) 1991-09-13
JP2510965Y2 JP2510965Y2 (ja) 1996-09-18

Family

ID=31697963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15167589U Expired - Lifetime JP2510965Y2 (ja) 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造

Country Status (1)

Country Link
JP (1) JP2510965Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261844A (ja) * 1995-03-17 1996-10-11 Kokusai Electric Co Ltd 高温炉用の炉内温度測定器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261844A (ja) * 1995-03-17 1996-10-11 Kokusai Electric Co Ltd 高温炉用の炉内温度測定器

Also Published As

Publication number Publication date
JP2510965Y2 (ja) 1996-09-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term