JPH0390007U - - Google Patents

Info

Publication number
JPH0390007U
JPH0390007U JP15006089U JP15006089U JPH0390007U JP H0390007 U JPH0390007 U JP H0390007U JP 15006089 U JP15006089 U JP 15006089U JP 15006089 U JP15006089 U JP 15006089U JP H0390007 U JPH0390007 U JP H0390007U
Authority
JP
Japan
Prior art keywords
light
emitting element
receiving element
output
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15006089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15006089U priority Critical patent/JPH0390007U/ja
Publication of JPH0390007U publication Critical patent/JPH0390007U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP15006089U 1989-12-28 1989-12-28 Pending JPH0390007U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15006089U JPH0390007U (fr) 1989-12-28 1989-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15006089U JPH0390007U (fr) 1989-12-28 1989-12-28

Publications (1)

Publication Number Publication Date
JPH0390007U true JPH0390007U (fr) 1991-09-13

Family

ID=31696428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15006089U Pending JPH0390007U (fr) 1989-12-28 1989-12-28

Country Status (1)

Country Link
JP (1) JPH0390007U (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61233305A (ja) * 1985-04-09 1986-10-17 Matsushita Electric Ind Co Ltd 位置検出装置
JPS61234304A (ja) * 1985-04-10 1986-10-18 Matsushita Electric Ind Co Ltd 位置検出装置
JPS61267018A (ja) * 1985-05-21 1986-11-26 Fujitsu Ltd 走査角検出器
JPS6219704A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd 被検査対象パターンの画像信号感度補正装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61233305A (ja) * 1985-04-09 1986-10-17 Matsushita Electric Ind Co Ltd 位置検出装置
JPS61234304A (ja) * 1985-04-10 1986-10-18 Matsushita Electric Ind Co Ltd 位置検出装置
JPS61267018A (ja) * 1985-05-21 1986-11-26 Fujitsu Ltd 走査角検出器
JPS6219704A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd 被検査対象パターンの画像信号感度補正装置

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