JPS61177447U - - Google Patents
Info
- Publication number
- JPS61177447U JPS61177447U JP6152285U JP6152285U JPS61177447U JP S61177447 U JPS61177447 U JP S61177447U JP 6152285 U JP6152285 U JP 6152285U JP 6152285 U JP6152285 U JP 6152285U JP S61177447 U JPS61177447 U JP S61177447U
- Authority
- JP
- Japan
- Prior art keywords
- detected portion
- pattern
- slit light
- irradiates
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003909 pattern recognition Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6152285U JPS61177447U (fr) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6152285U JPS61177447U (fr) | 1985-04-24 | 1985-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61177447U true JPS61177447U (fr) | 1986-11-05 |
Family
ID=30589878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6152285U Pending JPS61177447U (fr) | 1985-04-24 | 1985-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61177447U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0362597A (ja) * | 1989-07-28 | 1991-03-18 | Matsushita Electric Ind Co Ltd | 粘性流体塗布方法と粘性流体塗布装置 |
-
1985
- 1985-04-24 JP JP6152285U patent/JPS61177447U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0362597A (ja) * | 1989-07-28 | 1991-03-18 | Matsushita Electric Ind Co Ltd | 粘性流体塗布方法と粘性流体塗布装置 |