JPH0387558U - - Google Patents
Info
- Publication number
- JPH0387558U JPH0387558U JP14499189U JP14499189U JPH0387558U JP H0387558 U JPH0387558 U JP H0387558U JP 14499189 U JP14499189 U JP 14499189U JP 14499189 U JP14499189 U JP 14499189U JP H0387558 U JPH0387558 U JP H0387558U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- large number
- workpiece
- plate
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14499189U JPH0387558U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-12-18 | 1989-12-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14499189U JPH0387558U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-12-18 | 1989-12-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0387558U true JPH0387558U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-05 |
Family
ID=31691655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14499189U Pending JPH0387558U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-12-18 | 1989-12-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0387558U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5250385B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-09-18 | 1977-12-23 | ||
JPS5920938U (ja) * | 1982-07-29 | 1984-02-08 | トヨタ自動車株式会社 | プレス装置におけるワ−クの位置決め案内機構 |
JPS6299072A (ja) * | 1985-10-22 | 1987-05-08 | Sumitomo Electric Ind Ltd | 半導体ウエ−ハの加工方法 |
JPS6487148A (en) * | 1987-09-28 | 1989-03-31 | Toshiba Corp | Polishing method |
-
1989
- 1989-12-18 JP JP14499189U patent/JPH0387558U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5250385B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-09-18 | 1977-12-23 | ||
JPS5920938U (ja) * | 1982-07-29 | 1984-02-08 | トヨタ自動車株式会社 | プレス装置におけるワ−クの位置決め案内機構 |
JPS6299072A (ja) * | 1985-10-22 | 1987-05-08 | Sumitomo Electric Ind Ltd | 半導体ウエ−ハの加工方法 |
JPS6487148A (en) * | 1987-09-28 | 1989-03-31 | Toshiba Corp | Polishing method |