JPH0387209U - - Google Patents
Info
- Publication number
- JPH0387209U JPH0387209U JP14779389U JP14779389U JPH0387209U JP H0387209 U JPH0387209 U JP H0387209U JP 14779389 U JP14779389 U JP 14779389U JP 14779389 U JP14779389 U JP 14779389U JP H0387209 U JPH0387209 U JP H0387209U
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- semiconductor wafer
- suction cup
- holding mechanism
- moves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989147793U JPH079611Y2 (ja) | 1989-12-21 | 1989-12-21 | 半導体ウエハの切断保持機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989147793U JPH079611Y2 (ja) | 1989-12-21 | 1989-12-21 | 半導体ウエハの切断保持機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0387209U true JPH0387209U (enExample) | 1991-09-04 |
| JPH079611Y2 JPH079611Y2 (ja) | 1995-03-08 |
Family
ID=31694291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989147793U Expired - Lifetime JPH079611Y2 (ja) | 1989-12-21 | 1989-12-21 | 半導体ウエハの切断保持機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079611Y2 (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5013112A (enExample) * | 1973-01-30 | 1975-02-12 | ||
| JPS639965A (ja) * | 1986-06-30 | 1988-01-16 | Nec Corp | 半導体記憶装置の製造方法 |
| JPS63318128A (ja) * | 1987-06-19 | 1988-12-27 | Sumitomo Electric Ind Ltd | 半導体単結晶インゴツトの角度調整法と装置 |
-
1989
- 1989-12-21 JP JP1989147793U patent/JPH079611Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5013112A (enExample) * | 1973-01-30 | 1975-02-12 | ||
| JPS639965A (ja) * | 1986-06-30 | 1988-01-16 | Nec Corp | 半導体記憶装置の製造方法 |
| JPS63318128A (ja) * | 1987-06-19 | 1988-12-27 | Sumitomo Electric Ind Ltd | 半導体単結晶インゴツトの角度調整法と装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079611Y2 (ja) | 1995-03-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |