JPH038660Y2 - - Google Patents
Info
- Publication number
- JPH038660Y2 JPH038660Y2 JP9281985U JP9281985U JPH038660Y2 JP H038660 Y2 JPH038660 Y2 JP H038660Y2 JP 9281985 U JP9281985 U JP 9281985U JP 9281985 U JP9281985 U JP 9281985U JP H038660 Y2 JPH038660 Y2 JP H038660Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- suction pad
- piston
- elevating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 119
- 230000003028 elevating effect Effects 0.000 claims description 31
- 238000000926 separation method Methods 0.000 claims description 31
- 238000001514 detection method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010008 shearing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9281985U JPH038660Y2 (enrdf_load_stackoverflow) | 1985-06-19 | 1985-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9281985U JPH038660Y2 (enrdf_load_stackoverflow) | 1985-06-19 | 1985-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622538U JPS622538U (enrdf_load_stackoverflow) | 1987-01-09 |
| JPH038660Y2 true JPH038660Y2 (enrdf_load_stackoverflow) | 1991-03-04 |
Family
ID=30649953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9281985U Expired JPH038660Y2 (enrdf_load_stackoverflow) | 1985-06-19 | 1985-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038660Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-06-19 JP JP9281985U patent/JPH038660Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS622538U (enrdf_load_stackoverflow) | 1987-01-09 |
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