JPH038590B2 - - Google Patents

Info

Publication number
JPH038590B2
JPH038590B2 JP59199157A JP19915784A JPH038590B2 JP H038590 B2 JPH038590 B2 JP H038590B2 JP 59199157 A JP59199157 A JP 59199157A JP 19915784 A JP19915784 A JP 19915784A JP H038590 B2 JPH038590 B2 JP H038590B2
Authority
JP
Japan
Prior art keywords
discharge
electrode
gas
silicon carbide
laser tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59199157A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6177379A (ja
Inventor
Tadashi Sueda
Tetsuro Kobayashi
Tomofumi Matsushima
Masuzo Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
Original Assignee
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd
Priority to JP19915784A priority Critical patent/JPS6177379A/ja
Publication of JPS6177379A publication Critical patent/JPS6177379A/ja
Publication of JPH038590B2 publication Critical patent/JPH038590B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/038Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP19915784A 1984-09-21 1984-09-21 ガスレ−ザ−管 Granted JPS6177379A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19915784A JPS6177379A (ja) 1984-09-21 1984-09-21 ガスレ−ザ−管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19915784A JPS6177379A (ja) 1984-09-21 1984-09-21 ガスレ−ザ−管

Publications (2)

Publication Number Publication Date
JPS6177379A JPS6177379A (ja) 1986-04-19
JPH038590B2 true JPH038590B2 (enrdf_load_stackoverflow) 1991-02-06

Family

ID=16403101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19915784A Granted JPS6177379A (ja) 1984-09-21 1984-09-21 ガスレ−ザ−管

Country Status (1)

Country Link
JP (1) JPS6177379A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6348832A (ja) * 1986-08-19 1988-03-01 Tokyo Electron Ltd Cvd装置

Also Published As

Publication number Publication date
JPS6177379A (ja) 1986-04-19

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