JPH038590B2 - - Google Patents
Info
- Publication number
- JPH038590B2 JPH038590B2 JP59199157A JP19915784A JPH038590B2 JP H038590 B2 JPH038590 B2 JP H038590B2 JP 59199157 A JP59199157 A JP 59199157A JP 19915784 A JP19915784 A JP 19915784A JP H038590 B2 JPH038590 B2 JP H038590B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- electrode
- gas
- silicon carbide
- laser tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19915784A JPS6177379A (ja) | 1984-09-21 | 1984-09-21 | ガスレ−ザ−管 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19915784A JPS6177379A (ja) | 1984-09-21 | 1984-09-21 | ガスレ−ザ−管 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6177379A JPS6177379A (ja) | 1986-04-19 |
JPH038590B2 true JPH038590B2 (enrdf_load_stackoverflow) | 1991-02-06 |
Family
ID=16403101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19915784A Granted JPS6177379A (ja) | 1984-09-21 | 1984-09-21 | ガスレ−ザ−管 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6177379A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6348832A (ja) * | 1986-08-19 | 1988-03-01 | Tokyo Electron Ltd | Cvd装置 |
-
1984
- 1984-09-21 JP JP19915784A patent/JPS6177379A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6177379A (ja) | 1986-04-19 |
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