JPH038434U - - Google Patents
Info
- Publication number
- JPH038434U JPH038434U JP6789689U JP6789689U JPH038434U JP H038434 U JPH038434 U JP H038434U JP 6789689 U JP6789689 U JP 6789689U JP 6789689 U JP6789689 U JP 6789689U JP H038434 U JPH038434 U JP H038434U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- sealed chamber
- shielding plate
- tip
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067896U JP2513846Y2 (ja) | 1989-06-10 | 1989-06-10 | 原料ガス供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067896U JP2513846Y2 (ja) | 1989-06-10 | 1989-06-10 | 原料ガス供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH038434U true JPH038434U (OSRAM) | 1991-01-28 |
| JP2513846Y2 JP2513846Y2 (ja) | 1996-10-09 |
Family
ID=31601881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989067896U Expired - Lifetime JP2513846Y2 (ja) | 1989-06-10 | 1989-06-10 | 原料ガス供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2513846Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016125809A1 (ja) * | 2015-02-03 | 2016-08-11 | 株式会社湯山製作所 | 滅菌装置及び滅菌方法 |
-
1989
- 1989-06-10 JP JP1989067896U patent/JP2513846Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016125809A1 (ja) * | 2015-02-03 | 2016-08-11 | 株式会社湯山製作所 | 滅菌装置及び滅菌方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2513846Y2 (ja) | 1996-10-09 |
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