JPH0383898A - Organometallic raw material feeder with equipped with counterflow preventing mechanism - Google Patents
Organometallic raw material feeder with equipped with counterflow preventing mechanismInfo
- Publication number
- JPH0383898A JPH0383898A JP22136989A JP22136989A JPH0383898A JP H0383898 A JPH0383898 A JP H0383898A JP 22136989 A JP22136989 A JP 22136989A JP 22136989 A JP22136989 A JP 22136989A JP H0383898 A JPH0383898 A JP H0383898A
- Authority
- JP
- Japan
- Prior art keywords
- piping
- organometallic
- carrier gas
- raw material
- pressure surge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000002524 organometallic group Chemical group 0.000 title claims abstract description 38
- 239000002994 raw material Substances 0.000 title claims abstract description 21
- 239000012159 carrier gas Substances 0.000 claims abstract description 19
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 2
- 239000002184 metal Substances 0.000 abstract description 12
- 229910052751 metal Inorganic materials 0.000 abstract description 12
- 239000012808 vapor phase Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は有機金属を気相成長する方法に用いて有益なる
逆流防止機構付き有機金属原料供給装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an organometallic raw material supply device with a backflow prevention mechanism that is useful in a method for vapor phase growth of organometallic materials.
（従来の技術）
従来、有機金属を気相成長する方法（以下、ＭＯＶＰＥ
法と略称する）に用いられる従来の装置は第２図に示す
ように構成されている。(Prior art) Conventionally, a method of vapor phase growth of organic metals (hereinafter referred to as MOVPE) has been used.
A conventional device used for this method (abbreviated as "method") is constructed as shown in FIG.
有機金属バブラ１９０内には有機金属１８０が入れられ
、ガス入口配管の先端は有機金属液中に浸り、ガス出口
配管の先端は有機金属液面よりも上に位置する。The organometallic bubbler 190 contains an organometallic substance 180, the tip of the gas inlet pipe is immersed in the organometallic liquid, and the tip of the gas outlet pipe is located above the level of the organometallic liquid.
有機金属原料供給時は、バルブ１２０は閑、バルブ１０
０，１１０は開である。この時、インレットより導入さ
れたキャリアガスは、入口配管１６０を通り、有機金ｙ
／ｊ４１８０中でバブリングして飽和蒸気圧に達した後
、出口配管１７０を通り、メインラインから反応室に導
入される。When supplying organic metal raw materials, valve 120 is idle, valve 10 is
0,110 is open. At this time, the carrier gas introduced from the inlet passes through the inlet pipe 160, and the organic gold y
After bubbling in the /j4180 to reach saturated vapor pressure, the vapor passes through the outlet pipe 170 and is introduced into the reaction chamber from the main line.
ここで、バルブ１３０．１４０は、メインラインとベン
トラインの切り替え用である。また、有機金属原料を供
給しないときは、バルブ１２０を開、バルブ１００，１
１０を閉とし、バルブ１２０を介して、ガスをバイパス
させる。Here, valves 130 and 140 are for switching between the main line and the vent line. In addition, when not supplying the organic metal raw material, the valve 120 is opened and the valves 100 and 1 are opened.
10 is closed and the gas is bypassed via valve 120.
従来の構成例では５以トのように１７で、＄１１金属原
料供給の制御を行っていた。In the conventional configuration example, $11 metal raw material supply was controlled by 17 as in 5 and above.
（発明が解決しようとする課ｔｒり
しかしながら、従来の有機金属原料供給装置には以下に
示す有機金属原料の逆流という問題点が存在する。(Issues to be Solved by the Invention)However, the conventional organometallic raw material supply apparatus has the following problem of backflow of the organometallic raw material.
すなわち、仮に、有機金属原料供給時に下流の配管より
突発的な圧力サージが入った場合を考えてみる。この時
、バルブの開閉状態は、前述の通り、バルブ１２０が閉
で、バルブ１００，１１０が開である。また、入口配管
内の有機金属液面は、入口配管の先端にある。That is, let us consider a case where a sudden pressure surge occurs from the downstream piping during the supply of organic metal raw materials. At this time, as described above, the valve 120 is closed and the valves 100 and 110 are open. Furthermore, the organometallic liquid level within the inlet pipe is at the tip of the inlet pipe.
この状態で、出口配管１７０より圧力サージが、有機金
属バブラ１９０内に伝達されると、この圧力サージは、
有機金属液面を押し下げ、入口配管１６０中を有機金属
液面が上昇していく。In this state, when a pressure surge is transmitted from the outlet piping 170 into the organometallic bubbler 190, this pressure surge
The organometallic liquid level is pushed down, and the organometallic liquid level rises in the inlet pipe 160.
その結果、上流部への有機金属原料の逆流が生じ、配管
系の汚染、ひいては、成長させる結晶の品質低下を招く
ことになる。As a result, a backflow of the organometallic raw material to the upstream portion occurs, causing contamination of the piping system and, ultimately, deterioration of the quality of the grown crystal.
〈課題を解決するための手段）
前述の課題を解決するため本発明の有機金属原料供給装
置は、キャリアガス入口配管の先端が有機金属液中に浸
っており、キャリアガス出口配管の先端が有機金属液面
より上に位置する有機金属気相成長用バブラにおいて、
前記キャリアガス出口配管から前記キャリアガス入口配
管方向への通気のみ可能な逆止弁を、前記キャリアガス
入口配管と前記キャリアガス出口配管との間に設けて成
る。<Means for Solving the Problems> In order to solve the above-mentioned problems, the organometallic raw material supply device of the present invention has the tip of the carrier gas inlet piping immersed in the organometallic liquid, and the tip of the carrier gas outlet piping immersed in the organic metal liquid. In the bubbler for organometallic vapor phase epitaxy located above the metal liquid level,
A check valve that allows ventilation only from the carrier gas outlet pipe toward the carrier gas inlet pipe is provided between the carrier gas inlet pipe and the carrier gas outlet pipe.
（作用） 本発明の有機金属原料供給装置を第１図に示す。(effect) The organometallic raw material supplying apparatus of the present invention is shown in FIG.
バルブ１００，１１０．１２０は、第２図と同様に、キ
ャリアガスを有機金属バブラに通気するかどうかの切り
替え用バルブである。また、バルブ１５０は、出口配管
１７０から、入口配管１６０への通気のみ可能な逆止弁
である。The valves 100, 110, and 120 are valves for switching whether or not to vent the carrier gas to the organometallic bubbler, as in FIG. Further, the valve 150 is a check valve that only allows ventilation from the outlet pipe 170 to the inlet pipe 160.
ここで、先はどと同様に有機金属原料供給時に、下流か
ら突発的な圧力サージが入った場合を考える。この時、
バルブの開閉状態としては、バルブ１２０が閉で、バル
ブ１００，１１０が開である。Here, as in the previous case, consider the case where a sudden pressure surge occurs from downstream during the supply of organic metal raw materials. At this time,
Regarding the open and closed states of the valves, the valve 120 is closed and the valves 100 and 110 are open.
この状態で出口配管１７０に圧力サージが入った−とす
ると、圧力は、有機金属バブラ１９０内と逆止弁１５０
の両方にかかる。If a pressure surge enters the outlet piping 170 in this state, the pressure will increase within the organometallic bubbler 190 and the check valve 150.
It takes both.
従って、有機金属液面を押し下げる様な圧力サージが出
口配管１７０に入ると同時に、逆止弁１５０を通して、
圧力サージは入口配管１６０に開放される。その結果、
有機金属の上流への逆流によるトラブルは未然に防ぐこ
とができる。Therefore, at the same time that a pressure surge that pushes down the organometallic liquid level enters the outlet pipe 170, it passes through the check valve 150 and
The pressure surge is vented to inlet piping 160. the result,
Problems caused by backflow of organic metals upstream can be prevented.
（実施例〉
以下、本発明の有機金属原料供給装置を具体的な実施例
を用いて詳述する。(Example) Hereinafter, the organometallic raw material supplying apparatus of the present invention will be described in detail using specific examples.
第１図において、有機金属１８０は、トリメチルアルミ
ニウムとし、キャリアガスの水素ガスをインレットより
２０３ＣＣＭの流量で供給しているとする。バブラの温
度は１８℃とし、バブラ内の圧力は、ニードル弁で、８
００ｔｏｒｒ一定に調節する。In FIG. 1, it is assumed that the organic metal 180 is trimethylaluminum, and hydrogen gas as a carrier gas is supplied from an inlet at a flow rate of 203 CCM. The temperature of the bubbler was 18℃, and the pressure inside the bubbler was adjusted to 8℃ using a needle valve.
Adjust to a constant value of 00 torr.
この状態において、有機金属原料供給待時に、何らかの
原因で、出口配管の圧力が、突発的に８００ｔｏｒｒか
ら、１０００ｔｏｒｒに上昇したと仮定する。Assume that in this state, the pressure in the outlet pipe suddenly rises from 800 torr to 1000 torr for some reason while waiting for the supply of the organic metal raw material.
この時、逆止弁１５０の動作圧力を、例えば、出口配管
１７０が、入口配管１６０よりも３０ｔｏｒｒ以上高く
なったときに開放するようにしておけば、出口配管に入
った圧力サージは、入口配管１６０に解放され、有機金
属原料の逆流を防止することができる。At this time, if the operating pressure of the check valve 150 is set to open when the outlet piping 170 becomes 30 torr or more higher than the inlet piping 160, the pressure surge entering the outlet piping can be prevented. 160 to prevent backflow of the organometallic raw material.
（発明の効果）
以上述べたように、本発明の有機金属原料供給装置によ
れば、下流配管からの圧力サージによる有機金属原料の
逆流を防止することができる。(Effects of the Invention) As described above, according to the organometallic raw material supply device of the present invention, backflow of the organometallic raw material due to pressure surge from the downstream piping can be prevented.
第１図は本発明の有機金属原料供給装置の模式図、第２
図は従来の有機金属原料供給装置の模式図である。
１００・・・入口配管開閉バルブ、１１０・・・出口配
管開閉バルブ、１２０・・・バブラバイパスバルブ、１
３０・・・メインライン開閉バルブ、１４０・・・ベン
トライン開閉バルブ、１５０・・・逆止弁、１６０・・
・入口配管、１７０・・・出口配管、１８０・・・有機
金属、１
９０・・・有機金属バブラ。FIG. 1 is a schematic diagram of the organometallic raw material supplying device of the present invention, and FIG.
The figure is a schematic diagram of a conventional organometallic raw material supply device. 100... Inlet piping opening/closing valve, 110... Outlet piping opening/closing valve, 120... Bubbler bypass valve, 1
30... Main line opening/closing valve, 140... Vent line opening/closing valve, 150... Check valve, 160...
- Inlet piping, 170... Outlet piping, 180... Organometallic, 1 90... Organometallic bubbler.
Claims (1)
り、キャリアガス出口配管の先端が有機金属液面より上
に位置する有機金属気相成長用バブラの前記キャリアガ
ス出口配管から前記キャリアガス入口配管方向への通気
のみ可能な逆止弁を、前記キャリアガス入口配管と前記
キャリアガス出口配管との間に設けて成ることを特徴と
する逆流防止機構付き有機金属原料供給装置。The carrier gas inlet is connected to the carrier gas inlet from the carrier gas outlet pipe of a bubbler for organometallic vapor phase growth in which the tip of the carrier gas inlet pipe is immersed in the organometallic liquid and the tip of the carrier gas outlet pipe is located above the organometallic liquid level. An organometallic raw material supply device with a backflow prevention mechanism, characterized in that a check valve that allows ventilation only in the piping direction is provided between the carrier gas inlet piping and the carrier gas outlet piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22136989A JPH0383898A (en) | 1989-08-28 | 1989-08-28 | Organometallic raw material feeder with equipped with counterflow preventing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22136989A JPH0383898A (en) | 1989-08-28 | 1989-08-28 | Organometallic raw material feeder with equipped with counterflow preventing mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0383898A true JPH0383898A (en) | 1991-04-09 |
Family
ID=16765717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22136989A Pending JPH0383898A (en) | 1989-08-28 | 1989-08-28 | Organometallic raw material feeder with equipped with counterflow preventing mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0383898A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100365569B1 (en) * | 2000-11-23 | 2002-12-26 | 박홍규 | Fishing line connect ring and manufacture method of lure for squidfishing |
| CN102226088A (en) * | 2011-04-27 | 2011-10-26 | 南京大学 | Polyurethane-based ecological sand-fixing agent and preparation method thereof |
| CN115369477A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
-
1989
- 1989-08-28 JP JP22136989A patent/JPH0383898A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100365569B1 (en) * | 2000-11-23 | 2002-12-26 | 박홍규 | Fishing line connect ring and manufacture method of lure for squidfishing |
| CN102226088A (en) * | 2011-04-27 | 2011-10-26 | 南京大学 | Polyurethane-based ecological sand-fixing agent and preparation method thereof |
| CN115369477A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
| CN115369477B (en) * | 2022-09-26 | 2023-02-21 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
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