JPH0383862A - Production of silicon nitride-boron nitride multiple sintered compact - Google Patents
Production of silicon nitride-boron nitride multiple sintered compactInfo
- Publication number
- JPH0383862A JPH0383862A JP1220926A JP22092689A JPH0383862A JP H0383862 A JPH0383862 A JP H0383862A JP 1220926 A JP1220926 A JP 1220926A JP 22092689 A JP22092689 A JP 22092689A JP H0383862 A JPH0383862 A JP H0383862A
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- silicon
- nitride
- sintered
- metallic silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052582 BN Inorganic materials 0.000 title claims abstract description 36
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 10
- 239000010703 silicon Substances 0.000 title claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000002131 composite material Substances 0.000 claims abstract description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000012299 nitrogen atmosphere Substances 0.000 claims abstract description 8
- 239000002002 slurry Substances 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 6
- 239000011268 mixed slurry Substances 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 3
- 238000005245 sintering Methods 0.000 abstract description 7
- 239000002344 surface layer Substances 0.000 abstract description 7
- 238000005260 corrosion Methods 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 6
- 239000011863 silicon-based powder Substances 0.000 abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、A1溶湯に対して耐食性が優れる窒化珪素・
窒化硼素複合焼結体の製造方法に関する。Detailed Description of the Invention (Industrial Field of Application) The present invention is directed to silicon nitride, which has excellent corrosion resistance against A1 molten metal.
The present invention relates to a method for manufacturing a boron nitride composite sintered body.
(従来技術〉
窒化珪素・窒化硼素複合焼結体は、A1溶湯に濡れにく
い窒化硼素を含んでいるために、A1溶湯に対する耐食
性に優れるという長所を有している。(Prior Art) The silicon nitride/boron nitride composite sintered body contains boron nitride, which is difficult to wet with the A1 molten metal, and therefore has the advantage of being excellent in corrosion resistance against the A1 molten metal.
従来、窒化珪素・窒化硼素複合焼結体の製造方法は、金
属シリコン粉末と、窒化硼素粉末とをバイングーととも
に混練し、仮成形したのち窒化と同時に焼結する反応焼
結法が知られている(特開昭56−120575号公報
)。Conventionally, the known method for manufacturing silicon nitride/boron nitride composite sintered bodies is a reaction sintering method in which metallic silicon powder and boron nitride powder are kneaded with bangu, preformed, and then sintered at the same time as nitriding. (Japanese Unexamined Patent Publication No. 120575/1983).
しかしながら、上記従来方法による複合焼結体は、窒化
硼素が焼結強度に寄与しないので、窒化硼素の添加量の
増加に比例して、焼結体強度が低下するという欠点があ
る。 また、窒化硼素ががなり高価である点も実用上に
難点がある。However, the composite sintered body produced by the above conventional method has a drawback that the strength of the sintered body decreases in proportion to an increase in the amount of boron nitride added, since boron nitride does not contribute to the sintered strength. Further, boron nitride is difficult to use in practice because it is fragile and expensive.
(発明が解決しようとする課題)
本発明の目的は、強度が高くかつ安価な窒化珪素・窒化
硼素複合焼結体を提供することにある。(Problems to be Solved by the Invention) An object of the present invention is to provide a silicon nitride/boron nitride composite sintered body that has high strength and is inexpensive.
(課題を解決するための手段と作用)
本発明者らは、上記目的を種々検討した結果、金属シリ
コン成形体の表面から、耐食性に必要な表層部に窒化硼
素を含浸して、窒素雰囲気中で反応焼結させるならば、
所望の複合焼結体を得ることを見いだして、本発明を完
敗することができた。(Means and effects for solving the problem) As a result of various studies on the above-mentioned objects, the present inventors impregnated boron nitride into the surface layer necessary for corrosion resistance from the surface of a metal silicon molded body and placed it in a nitrogen atmosphere. If reaction sintering is performed with
It was discovered that the desired composite sintered body could be obtained, and the present invention was completely defeated.
すなわち、本発明は、金属シリコンからなる粉末を成形
した金属シリコン成形体表面に、窒化硼素のスラリー又
は金属シリコンと窒化硼素の混合スラリーを塗布したの
ち、窒素雰囲気中で加熱することを特徴とする窒化珪素
・窒化硼素複合焼結体の製造方法である。That is, the present invention is characterized in that a slurry of boron nitride or a mixed slurry of silicon metal and boron nitride is applied to the surface of a metal silicon molded body obtained by molding powder made of metal silicon, and then heated in a nitrogen atmosphere. This is a method for manufacturing a silicon nitride/boron nitride composite sintered body.
以下に、実施例により本発明を具体的に説明する。The present invention will be specifically explained below using Examples.
(実施例)
第一実施例として、まず、金属シリコン粉末をプレス成
形をして、所定の形状の成形体を得る。(Example) As a first example, first, metal silicon powder is press-molded to obtain a molded body of a predetermined shape.
この成形体表面に、窒化硼素粉末を水に分散させて窒化
硼素固形分20il量%としたスラリーを塗布して、金
属シリコン成形体に窒化硼素を表面から含浸させる。
窒化硼素スラリーを塗布した成形体は、乾燥して水分を
除去したのち、N2雰囲気中で1400℃で3時間加熱
して反応焼結した。A slurry made by dispersing boron nitride powder in water and having a boron nitride solid content of 20 il % is applied to the surface of this molded body to impregnate the metal silicon molded body with boron nitride from the surface.
The molded body coated with the boron nitride slurry was dried to remove moisture, and then heated at 1400° C. for 3 hours in a N2 atmosphere to undergo reaction sintering.
そのようにして得られた複合焼結体は、内部が窒化珪素
として焼結されるが、表層部は窒化珪素と窒化硼素の複
合体となり1表面は窒化硼素として焼結された構造の複
合焼結体となる。The composite sintered body thus obtained has a structure in which the interior is sintered as silicon nitride, but the surface layer is a composite of silicon nitride and boron nitride, and the surface is sintered as boron nitride. It becomes a body.
比較例として、特開昭56−120575号公報に開示
された方法に従い、金属シリコン粉末100重量部と窒
化硼素粉末10重量部を混合し、プレス成形したのち窒
化焼結した複合焼結体を作成した。As a comparative example, a composite sintered body was prepared by mixing 100 parts by weight of metal silicon powder and 10 parts by weight of boron nitride powder, press-forming, and nitriding sintering according to the method disclosed in JP-A-56-120575. did.
第一実施例の試料と、比較例の試料とを、A L合金(
ADC−12)溶湯中に浸漬して耐食テストを行った。The sample of the first example and the sample of the comparative example were made of AL alloy (
ADC-12) A corrosion resistance test was conducted by immersing it in molten metal.
700℃溶湯中、6ケ月浸漬したのち比較すると、両試
料とも、表面からA1合金は容易に剥がれ、また焼結体
表面にA1合金と反応した形跡は認められなかった。After being immersed in molten metal at 700° C. for 6 months, comparison was made. In both samples, the A1 alloy was easily peeled off from the surface, and no evidence of reaction with the A1 alloy was observed on the surface of the sintered body.
次に、曲げ強度を比較すると、比較例のそれは約100
100O/cn2であったのに対して、第一実施例のそ
れは1500kgf/crI2と格段に優れた結果が得
られた。Next, when comparing the bending strength, that of the comparative example is about 100
While it was 100 O/cn2, the first example had a much better result of 1500 kgf/crI2.
次に、第二実施例として、金属シリコン粉末をプレス成
形をした成形体表面に、窒化硼素粉末10重量部と金属
シリコン粉末10重量部と水80重量部の混合スラリー
を塗布して、金属シリコン成形体に窒化硼素を表面から
含浸させる。 混合スラリーを塗布した成形体は、乾燥
して水分を除去したのち、N2雰囲気中で1400℃で
3時間加熱して反応焼結した。Next, as a second example, a mixed slurry of 10 parts by weight of boron nitride powder, 10 parts by weight of metal silicon powder, and 80 parts by weight of water was applied to the surface of a molded body obtained by press-molding metal silicon powder, and The molded body is impregnated with boron nitride from the surface. The molded body coated with the mixed slurry was dried to remove moisture, and then heated at 1400° C. for 3 hours in a N2 atmosphere to undergo reaction sintering.
得られた複合焼結体は、内部が窒化珪素として焼結され
、表層部は窒化珪素と窒化硼素の複合体とという構造の
複合焼結体となっている。The obtained composite sintered body has a structure in which the interior is sintered as silicon nitride, and the surface layer is a composite of silicon nitride and boron nitride.
この第二実施例の耐食テストと曲げ強度試験の結果は、
第一実施例の結果とほぼ等しかった。The results of the corrosion resistance test and bending strength test of this second example are as follows:
The results were almost the same as those of the first example.
(発明の効果)
本発明によれば、金属シリコン成形体に、その表面から
、窒化硼素を含むスラリーを塗布含浸させたのちに、窒
素雰囲気中で反応焼結させるから、耐食性に必要な表層
部にだけ窒化珪素・窒化硼素複合焼結体が形状される。(Effects of the Invention) According to the present invention, a slurry containing boron nitride is coated and impregnated from the surface of a metal silicon molded body, and then the surface layer is sintered in a nitrogen atmosphere. A silicon nitride/boron nitride composite sintered body is shaped only in this way.
また、窒化硼素が内部に・まで含浸するものは少ない
から、内部は金属シリコンが窒素と反応した窒化珪素と
なるから、複合焼結体として機械的強度は、従来法によ
るものより、はるかに高い、 さらに、窒化硼素は必要
な表層部にのみ使用されるから、原料価額を低減させる
ことができる、などの効果をも有する。In addition, since there are few cases in which boron nitride is impregnated into the interior, the interior becomes silicon nitride made by reacting metal silicon with nitrogen, so the mechanical strength of the composite sintered body is much higher than that of conventional methods. Furthermore, since boron nitride is used only in the necessary surface layer, it also has the effect of reducing raw material costs.
Claims (1)
成形体表面に、窒化硼素のスラリー又は金属シリコンと
窒化硼素の混合スラリーを塗布したのち、窒素雰囲気中
で加熱することを特徴とする窒化珪素・窒化硼素複合焼
結体の製造方法。1. Silicon nitride/boron nitride, which is characterized in that a slurry of boron nitride or a mixed slurry of silicon metal and boron nitride is applied to the surface of a metal silicon molded body obtained by molding powder made of metal silicon, and then heated in a nitrogen atmosphere. Method for manufacturing composite sintered body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1220926A JPH0383862A (en) | 1989-08-28 | 1989-08-28 | Production of silicon nitride-boron nitride multiple sintered compact |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1220926A JPH0383862A (en) | 1989-08-28 | 1989-08-28 | Production of silicon nitride-boron nitride multiple sintered compact |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0383862A true JPH0383862A (en) | 1991-04-09 |
JPH0557230B2 JPH0557230B2 (en) | 1993-08-23 |
Family
ID=16758720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1220926A Granted JPH0383862A (en) | 1989-08-28 | 1989-08-28 | Production of silicon nitride-boron nitride multiple sintered compact |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0383862A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03223192A (en) * | 1990-01-29 | 1991-10-02 | Nippon Light Metal Co Ltd | Sintered material bonded with silicon nitride of reaction-sintering type having excellent resistance to welding of metallic melt and its production |
US6461958B1 (en) * | 2000-02-04 | 2002-10-08 | Seagate Technology Llc | Polishing memory disk substrates with reclaim slurry |
-
1989
- 1989-08-28 JP JP1220926A patent/JPH0383862A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03223192A (en) * | 1990-01-29 | 1991-10-02 | Nippon Light Metal Co Ltd | Sintered material bonded with silicon nitride of reaction-sintering type having excellent resistance to welding of metallic melt and its production |
US6461958B1 (en) * | 2000-02-04 | 2002-10-08 | Seagate Technology Llc | Polishing memory disk substrates with reclaim slurry |
Also Published As
Publication number | Publication date |
---|---|
JPH0557230B2 (en) | 1993-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |