Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and TechnologyfiledCriticalAgency of Industrial Science and Technology
Priority to JP59208480ApriorityCriticalpatent/JPS6185258A/ja
Priority to DE8585302506Tprioritypatent/DE3571345D1/de
Priority to EP19850302506prioritypatent/EP0177112B1/en
Publication of JPS6185258ApublicationCriticalpatent/JPS6185258A/ja
Publication of JPH038310B2publicationCriticalpatent/JPH038310B2/ja