JPH0381728A - Liquid crystal display element - Google Patents
Liquid crystal display elementInfo
- Publication number
- JPH0381728A JPH0381728A JP21979489A JP21979489A JPH0381728A JP H0381728 A JPH0381728 A JP H0381728A JP 21979489 A JP21979489 A JP 21979489A JP 21979489 A JP21979489 A JP 21979489A JP H0381728 A JPH0381728 A JP H0381728A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- layer
- film
- fumarate
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 30
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 claims abstract description 22
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 20
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 abstract description 12
- 239000011521 glass Substances 0.000 abstract description 10
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000565 sealant Substances 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 39
- 239000010408 film Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 10
- 229920001721 polyimide Polymers 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229920001778 nylon Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- FWUIHQFQLSWYED-ONEGZZNKSA-N (e)-4-oxo-4-propan-2-yloxybut-2-enoic acid Chemical compound CC(C)OC(=O)\C=C\C(O)=O FWUIHQFQLSWYED-ONEGZZNKSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- 239000004990 Smectic liquid crystal Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、ラビングによる配向処理を用いない液晶表示
素子に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a liquid crystal display element that does not use alignment treatment by rubbing.
[従来の技術1
従来の配向処理層の製法としては、電極の付い・た基体
表面にポリイミドなどの高分子を塗布し。[Conventional technology 1] The conventional method for producing an alignment layer is to coat a polymer such as polyimide on the surface of a substrate with electrodes attached.
布や皮などで擦って配向処理をするラビング法と呼ばれ
る方法をとるのが一般的である。また、配向処理剤とし
てシランカップリング剤などを用いる方法や酸化珪素の
蒸着などによる方法ちあるが、コスト、生産性、安定性
などの理由からあまり一般的ではない。It is common to use a method called the rubbing method, which involves rubbing with cloth, leather, etc. for orientation treatment. Further, there are methods using a silane coupling agent or the like as an alignment treatment agent, methods using vapor deposition of silicon oxide, etc., but these are not very common for reasons such as cost, productivity, and stability.
又、たとえばポリアミック酸などをLangmuir−
Blodgett (以下LBと省略する)法によって
付け、処理してポリイミドとした配向処理層によってツ
イストネマチック(以下TNと略す)モードの液晶を並
べたという報告はある。In addition, for example, polyamic acid can be mixed with Langmuir-
There is a report that twisted nematic (hereinafter abbreviated as TN) mode liquid crystals are arranged by an alignment layer formed by the Blodgett (hereinafter abbreviated as LB) method and processed to form a polyimide.
【発明が解決しようとする課題]
現在−船釣な高分子膜形成/ラビング法は、直接接触に
よる表面処理であり、多量のほこりが発生するうえ、表
面に静電気が帯電して薄膜トランジスタや二端子素子を
破壊し、更には電極を破壊するという問題がある。また
、LB法によって付けた配向処理層は、数層から数十層
の累積を必要とするが、工程が精密で時間がかかるうえ
、累積層数を増やすと逆に配向が乱れる箇所が発生し。[Problems to be Solved by the Invention] Currently, the polymer film formation/rubbing method carried out by boat involves surface treatment by direct contact, which not only generates a large amount of dust but also causes static electricity to be charged on the surface, resulting in thin film transistors and two terminals. There is a problem in that it destroys the element and further destroys the electrode. In addition, the alignment treatment layer applied by the LB method requires the accumulation of several to several tens of layers, but the process is precise and time-consuming, and increasing the number of accumulated layers may result in areas where the alignment becomes disordered. .
適当な条件が出にくいなどの課題があった。There were issues such as difficulty in finding suitable conditions.
そこで本発明はこのような課題を解決するちので、ラビ
ングによる配向処理を用いない、均一で容易に形成でき
る配向処理層を有した液晶表示素子の提供を目的とする
ちのである。In order to solve these problems, the present invention aims to provide a liquid crystal display element having an alignment layer that is uniform and easily formed without using alignment treatment by rubbing.
[課題を解決するための手段]
本発明の液晶表示素子は、対向する2枚の1i電極基板
に液晶を狭持した液晶表示素子において。[Means for Solving the Problems] The liquid crystal display element of the present invention is a liquid crystal display element in which a liquid crystal is sandwiched between two opposing 1i electrode substrates.
前記電極基板の少なくと61枚は、’WtI上にポリジ
アルキルフマレートを材料とする平坦化層、およびポリ
ジアルキルフマレートを材料とするLB膜配向処理層を
有していることを特徴とする。At least 61 of the electrode substrates are characterized in that they have a flattening layer made of polydialkyl fumarate and an LB film alignment layer made of polydialkyl fumarate on 'WtI. .
[作 用]
一般的な液晶表示素子の重陽には、ITO(Indiu
m Tin 0xide)透明電極が用いられている。[Function] ITO (Indiu
m Tin Oxide) transparent electrode is used.
ITOIliの表面は粗く、蒸着膜でlOO人程度、ス
パッタ膜で620〜30人の表面段差が発生している1
通常のLB法で付ける単分子膜の膜厚は数オングストロ
ームであり、累積するはじめの数十層は、この表面段差
を埋めるためのみに費やされている。ITO[極上に酸
化シリコン等の絶縁膜がある場合も、状況は全く同じで
ある。The surface of ITOIli is rough, with surface steps of about 100 mm for vapor-deposited films and 620 to 30 mm for sputtered films1.
The thickness of a monomolecular film deposited by the normal LB method is several angstroms, and the first several tens of layers that are accumulated are used only to fill in the surface steps. The situation is exactly the same when there is an insulating film such as silicon oxide on top of ITO.
1fli上に平坦化層を設けた後に、精密に制(卸した
LB膜で配向処理層を形成すると、1層、多くとち数層
で液晶が均一に配向する。低屈曲性の棒状高分子である
ポリジアルキルフマレートは、スピンコードで数百オン
グストロームの均質な膜が形成でき、平坦化層の材料と
しては最適である6また、ポリジアルキルフマレートの
LBIIIは、製膜条件に左右されず、安直に無欠陥の
均質な膜を形成できることが知られており(電属ら二金
属表面技術、39 (9)、497 (1988))、
イオンを含まないことから配向処理層として最適である
。After forming a flattening layer on the 1fli, if an alignment treatment layer is formed using the LB film, the liquid crystal will be aligned uniformly in one layer or at most several layers. Polydialkyl fumarate can be formed into a homogeneous film with a thickness of several hundred angstroms using a spin code, making it ideal as a material for the flattening layer. It is known that it is possible to easily form a defect-free homogeneous film (Denki et al. Bimetallic Surface Technology, 39 (9), 497 (1988)).
Since it does not contain ions, it is most suitable as an alignment treatment layer.
〔実 施 例]
実施例1
第1図は実施例1における液晶表示素子の構成を模式的
に示す断面図である。ガラス基板1上にTPT (薄膜
トランジスタ)素子及び、駆動T4極2をITOスパッ
タにより形成した。その上にスピンコーターを用いて、
ポリジイソプロピルフマレート0.3%クロロホルム溶
液を、200Or、p、m、の回転速度で塗布し、膜厚
100オングストロームのポリジイソプロピルフマレー
ト平坦化層3を形成した。平坦化層には欠陥が無く、数
十オングストロームの細かな段差は緩和され、ITOの
粒界の影響を排除できた。[Examples] Example 1 FIG. 1 is a sectional view schematically showing the structure of a liquid crystal display element in Example 1. A TPT (thin film transistor) element and a driving T4 pole 2 were formed on a glass substrate 1 by ITO sputtering. Using a spin coater on top of that,
A 0.3% chloroform solution of polydiisopropyl fumarate was applied at a rotation speed of 200 Or, p, m to form a polydiisopropyl fumarate flattening layer 3 having a thickness of 100 angstroms. There were no defects in the planarization layer, the fine step difference of several tens of angstroms was alleviated, and the influence of ITO grain boundaries could be eliminated.
次に、ポリジイソプロピルフマレートを0. 1%クロ
ロホルム溶液にて水面に展開し、圧縮することにより、
L(ラングミュア)膜化させた0表面圧を25 m N
/ mに保ちながら、6mm/minの速度で基板l
を浸漬し、続いて同速度で引き上げ、LB膜を2層累積
させた。80℃で1時間加熱乾燥することにより、ポリ
ジイソプロピルフマレート配向処理層4を得た。Next, add 0.0% polydiisopropyl fumarate. By spreading it on the water surface with a 1% chloroform solution and compressing it,
The zero surface pressure of the L (Langmuir) film was 25 mN.
/ m at a speed of 6 mm/min.
was immersed and then pulled up at the same speed to accumulate two layers of LB film. By heating and drying at 80° C. for 1 hour, a polydiisopropyl fumarate alignment treatment layer 4 was obtained.
また、別のガラス基板lO上に対向を極9をITO蒸着
により形成した後、スピンコーターでボッジイソプロビ
ルフマレート1%クロロホルム溶液を、3000r、p
、m、の回転速度で塗布し1月莫厚400オングストロ
ームのポリジイソプロピルフマレート平坦化層8を形成
した0次にボッジイソプロビルフマレートをt−11i
化させ、表面圧を25mN/mに保ちながら、6mm/
minの速度で基板lと直交する向きで引き上げ、LB
単分子膜を形成した。80°Cで1時間加熱乾燥するこ
とにより、ポリジイソプロピルフマレート配向処理層7
を得た。In addition, after forming the opposite pole 9 on another glass substrate 1O by ITO vapor deposition, a 1% chloroform solution of bodge isopropyl fumarate was applied at 3000 r, p using a spin coater.
, m, to form a polydiisopropyl fumarate flattening layer 8 with a thickness of 400 angstroms.
6 mm/m while keeping the surface pressure at 25 mN/m.
Pull up in the direction perpendicular to the substrate l at a speed of min, and LB
A monolayer was formed. By heating and drying at 80°C for 1 hour, the polydiisopropyl fumarate alignment treatment layer 7
I got it.
こうして用意した2枚のガラス基板を、シール剤6によ
り7gmの間隔で接着し、TN液晶5を封入した。対角
5インチの液晶パネル内で液晶は均一に配向しており、
ポリイミドをナイロン布で回転ラビングした配向膜を有
する液晶表示素子と、表示品位は変わらなかった。The two glass substrates thus prepared were adhered with a sealant 6 at a distance of 7 gm, and a TN liquid crystal 5 was sealed therein. The liquid crystal is aligned uniformly within the 5-inch diagonal LCD panel.
The display quality was not different from that of a liquid crystal display element having an alignment film made by rotationally rubbing polyimide with a nylon cloth.
実施例2
実施例1と同様の方法で、駆動電極上にポリジイソプロ
ピル平坦化層を形成した6次に、ポリジターシャリ−ブ
チルフマレートを0.1%テトラヒドロフラン溶液にて
水面に展開し、圧縮することによりL膜化させた0表面
圧を20 m N / mに保ちながら、5mm/mi
nの速度で浸漬と引き上げを繰り返し、LB膜を4層累
積させた。80℃で1時間加熱乾燥することにより、ポ
リジターシャリ−ブチルフマレート配向処理層を得た。Example 2 A polydiisopropyl flattening layer was formed on the drive electrode in the same manner as in Example 1.Next, polyditert-butyl fumarate was spread on the water surface with a 0.1% tetrahydrofuran solution and compressed. While keeping the zero surface pressure of the L film at 20 mN/m,
Dipping and pulling were repeated at a speed of n to accumulate four layers of LB film. By heating and drying at 80° C. for 1 hour, a polydi-tertiary-butyl fumarate alignment layer was obtained.
一方、対向電極上に酸化シリコン絶縁層をスパッタで形
成し、ポリイミド膜をスクリーン印刷および焼成により
形成した0毛足2mmのナイロン布を用い、ラビング密
度30で回転ラビングし。On the other hand, a silicon oxide insulating layer was formed on the counter electrode by sputtering, and a polyimide film was formed by screen printing and baking, and rotational rubbing was carried out at a rubbing density of 30 using a 2 mm 0-pile nylon cloth.
ポリイミド配向処理層とした。A polyimide orientation treatment layer was used.
実施例1と同様の方法で液晶表示素子を組み立て評価し
たところ、液晶は均一に配向しており、表示品位も良好
であった。When a liquid crystal display element was assembled and evaluated in the same manner as in Example 1, the liquid crystal was uniformly aligned and the display quality was good.
実施例3
ガラス基板上にMIM (メタル−インシュレーター−
メタル)素子及び、駆動電極をITOスパッタにより形
成した。その上にスピンコーターを用いて、膜厚200
オングストロームのポリジシクロへキシルフマレート平
坦化層を形成した。平坦化層表面には、数十オングスト
ロームの細かな段差は存在しておらず、ITO粒界の影
響は排除できた。Example 3 MIM (metal insulator) on a glass substrate
The metal element and drive electrode were formed by ITO sputtering. On top of that, use a spin coater to coat the film to a thickness of 200.
An Angstrom polydicyclohexyl fumarate planarization layer was formed. There were no fine steps of several tens of angstroms on the surface of the flattened layer, and the influence of ITO grain boundaries could be eliminated.
次に、ポリジシクロへキシルフマレートを。Next, polydicyclohexyl fumarate.
0.1%酢酸エチル溶液にて水面に展開し、圧縮するこ
とによりL膜化させた。表面圧を25mN / mに保
ちながら、4mm/minの速度で引き上げ、100℃
で加熱乾燥させることにより、ポリジシクロへキシルフ
マレート配向処理層を形成した。A 0.1% ethyl acetate solution was spread on the water surface and compressed to form an L film. While maintaining the surface pressure at 25 mN/m, the material was pulled up at a speed of 4 mm/min and heated to 100°C.
By heating and drying, a polydicyclohexyl fumarate alignment layer was formed.
また、別のガラス基板上に対向電極をITOスパッタに
より形成した後、前記の工程でポリジシクロへキシルフ
マレートの平坦化層、及び配向処理層を形成した。基板
の引き上げ方向は、互いに直交する向きで行なった。Further, after forming a counter electrode on another glass substrate by ITO sputtering, a flattening layer of polydicyclohexyl fumarate and an alignment treatment layer were formed in the above steps. The substrates were pulled up in directions perpendicular to each other.
2枚の電極基板を、シール剤により8μmの間隔で接着
し、TN液晶を封入した。対角5インチの液晶パネル内
で液晶は均一に配向しており、ボJイミドをナイロン布
で回転ラビングした配向膜を有する液晶表示素子と1表
示品位は変わらなかったー
以上実施例を挙げて説明してきたが1本発明はポリジア
ルキルフマレートの優れた成膜性に特徴があり、アルキ
ル基の種類や重合度に何ら限定されるものではない。ま
た、液晶表示素子の構成は、カラーフィルターや絶縁層
を含んでいてち良く、単純マトリックス駆動方式やST
N (スーパーツイストネマチック)液晶、Sm(スメ
クチック)液晶についても同様の効果がある。Two electrode substrates were adhered with a sealant at an interval of 8 μm, and TN liquid crystal was encapsulated. The liquid crystal was aligned uniformly within the 5-inch diagonal liquid crystal panel, and the display quality was no different from that of a liquid crystal display element with an alignment film made by rotationally rubbing BoJimide with a nylon cloth. As described above, the present invention is characterized by the excellent film-forming properties of polydialkyl fumarate, and is not limited in any way to the type of alkyl group or degree of polymerization. In addition, the structure of the liquid crystal display element may include a color filter and an insulating layer, and may be a simple matrix drive method or an ST
Similar effects can be obtained with N (super twisted nematic) liquid crystal and Sm (smectic) liquid crystal.
(発明の効果]
以上述べたように本発明によれば、対向する2枚の電極
基板間に液晶を狭持した液晶表示素子において、前記電
極基板の少なくとも1枚は、電極上にポリジアルキルフ
マレートを材料とする平坦化層、およびポリジアルキル
フマレートを材料とするLB膜配向処理層を有している
ことにより、ラビングによる配向処理を用いない、均一
で容易に形成できる配向処理層を有した液晶表示素子を
提供できた。(Effects of the Invention) As described above, according to the present invention, in a liquid crystal display element in which a liquid crystal is sandwiched between two opposing electrode substrates, at least one of the electrode substrates has a polydialkyl fume material on the electrode. By having a flattening layer made of carbonate and an LB film alignment layer made of polydialkyl fumarate, it has an alignment layer that is uniform and easily formed without using alignment treatment by rubbing. We were able to provide a liquid crystal display element with the following characteristics.
第1図は、本発明の実施例1における液晶表示素子の構
成を模式的に示す断面図である。
l・・・ガラス基板
2・・・電極
3・・・ポリジアルキルフマレート平坦化層4・・・ポ
リジアルキルフマレートLB膜配向処理層
5・・・液晶
6・・・シール剤
7・・・ポリジアルキルフマレートL B lli配向
処理層
8・・・ポリジアルキルフマレート平坦化層9・・・電
極
lO・・・ガラス基板
以上FIG. 1 is a cross-sectional view schematically showing the structure of a liquid crystal display element in Example 1 of the present invention. l...Glass substrate 2...Electrode 3...Polydialkyl fumarate flattening layer 4...Polydialkyl fumarate LB film alignment treatment layer 5...Liquid crystal 6...Sealing agent 7... Polydialkyl fumarate L B lli alignment treatment layer 8...Polydialkyl fumarate flattening layer 9...Electrode lO...Glass substrate or higher
Claims (1)
子において、前記電極基板の少なくとも1枚は、電極上
にポリジアルキルフマレートを材料とする平坦化層、お
よびポリジアルキルフマレートを材料とするLangm
uir−Blodgett膜配向処理層を有しているこ
とを特徴とする液晶表示素子。In a liquid crystal display element in which a liquid crystal is sandwiched between two opposing electrode substrates, at least one of the electrode substrates has a flattening layer made of polydialkyl fumarate on the electrode, and a flattening layer made of polydialkyl fumarate on the electrode. Langm to be
A liquid crystal display element comprising a uir-Blodgett film alignment treatment layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21979489A JP2853198B2 (en) | 1989-08-25 | 1989-08-25 | Liquid crystal display device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21979489A JP2853198B2 (en) | 1989-08-25 | 1989-08-25 | Liquid crystal display device and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0381728A true JPH0381728A (en) | 1991-04-08 |
JP2853198B2 JP2853198B2 (en) | 1999-02-03 |
Family
ID=16741132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21979489A Expired - Lifetime JP2853198B2 (en) | 1989-08-25 | 1989-08-25 | Liquid crystal display device and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2853198B2 (en) |
-
1989
- 1989-08-25 JP JP21979489A patent/JP2853198B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2853198B2 (en) | 1999-02-03 |
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