JPH0379196U - - Google Patents

Info

Publication number

JPH0379196U

JPH0379196U JP1989139926U JP13992689U JPH0379196U JP H0379196 U JPH0379196 U JP H0379196U JP 1989139926 U JP1989139926 U JP 1989139926U JP 13992689 U JP13992689 U JP 13992689U JP H0379196 U JPH0379196 U JP H0379196U

Authority

JP

Japan

Prior art keywords

film

thin film

insulating layer

insulating

conductive film

Prior art date

1989-12-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000010408 film Substances 0.000 claims description 7
• 239000010409 thin film Substances 0.000 claims description 5
• 239000011521 glass Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
• 230000002950 deficient Effects 0.000 claims 1
• 229910052760 oxygen Inorganic materials 0.000 claims 1
• 239000001301 oxygen Substances 0.000 claims 1
• BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
• 229910001936 tantalum oxide Inorganic materials 0.000 claims 1
• 239000004020 conductor Substances 0.000 description 1
• 239000012528 membrane Substances 0.000 description 1