JPH0378062U - - Google Patents
Info
- Publication number
- JPH0378062U JPH0378062U JP13936589U JP13936589U JPH0378062U JP H0378062 U JPH0378062 U JP H0378062U JP 13936589 U JP13936589 U JP 13936589U JP 13936589 U JP13936589 U JP 13936589U JP H0378062 U JPH0378062 U JP H0378062U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- carbon plate
- substrate
- forming chamber
- transported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
図面は本考案の一実施例を概略的に示す断面図
である。 １……成膜室、２……ＲＦ電極、５……基板、
８……吸熱板（カーボン板）、９……搬送カート
、１０……カーボン板。
である。 １……成膜室、２……ＲＦ電極、５……基板、
８……吸熱板（カーボン板）、９……搬送カート
、１０……カーボン板。
Claims (1)
- 成膜を要する基板が背面にカーボン板を密着さ
れ搬送カートによつて一体搬送されるように設け
るとともに、前記基板をＲＦ電極と対峙させるべ
き成膜室に搬送した際に前記カーボン板がアノー
ド電極の機能を担うように設定し、さらにこの成
膜室内に前記カーボン板の背面と僅かな隙間を隔
てて対面する吸熱板を配設していることを特徴と
するインライン式成膜装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13936589U JPH0378062U (ja) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13936589U JPH0378062U (ja) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378062U true JPH0378062U (ja) | 1991-08-07 |
Family
ID=31686416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13936589U Pending JPH0378062U (ja) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378062U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010189701A (ja) * | 2009-02-18 | 2010-09-02 | Kochi Fel Kk | 成膜装置 |
-
1989
- 1989-11-30 JP JP13936589U patent/JPH0378062U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010189701A (ja) * | 2009-02-18 | 2010-09-02 | Kochi Fel Kk | 成膜装置 |