JPH0378053U - - Google Patents
Info
- Publication number
- JPH0378053U JPH0378053U JP13978889U JP13978889U JPH0378053U JP H0378053 U JPH0378053 U JP H0378053U JP 13978889 U JP13978889 U JP 13978889U JP 13978889 U JP13978889 U JP 13978889U JP H0378053 U JPH0378053 U JP H0378053U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- notch
- control body
- irradiation device
- beam irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13978889U JPH0378053U (zh) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13978889U JPH0378053U (zh) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378053U true JPH0378053U (zh) | 1991-08-07 |
Family
ID=31686813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13978889U Pending JPH0378053U (zh) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378053U (zh) |
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1989
- 1989-11-30 JP JP13978889U patent/JPH0378053U/ja active Pending