JPH0277850U - - Google Patents

Info

Publication number
JPH0277850U
JPH0277850U JP15772188U JP15772188U JPH0277850U JP H0277850 U JPH0277850 U JP H0277850U JP 15772188 U JP15772188 U JP 15772188U JP 15772188 U JP15772188 U JP 15772188U JP H0277850 U JPH0277850 U JP H0277850U
Authority
JP
Japan
Prior art keywords
space
ions
potential barrier
ion implantation
pass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15772188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15772188U priority Critical patent/JPH0277850U/ja
Publication of JPH0277850U publication Critical patent/JPH0277850U/ja
Pending legal-status Critical Current

Links

JP15772188U 1988-12-02 1988-12-02 Pending JPH0277850U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15772188U JPH0277850U (zh) 1988-12-02 1988-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15772188U JPH0277850U (zh) 1988-12-02 1988-12-02

Publications (1)

Publication Number Publication Date
JPH0277850U true JPH0277850U (zh) 1990-06-14

Family

ID=31437415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15772188U Pending JPH0277850U (zh) 1988-12-02 1988-12-02

Country Status (1)

Country Link
JP (1) JPH0277850U (zh)

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