JPH01112554U - - Google Patents
Info
- Publication number
- JPH01112554U JPH01112554U JP801188U JP801188U JPH01112554U JP H01112554 U JPH01112554 U JP H01112554U JP 801188 U JP801188 U JP 801188U JP 801188 U JP801188 U JP 801188U JP H01112554 U JPH01112554 U JP H01112554U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- implantation apparatus
- value
- ion implantation
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 5
- 230000001133 acceleration Effects 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP801188U JPH01112554U (zh) | 1988-01-25 | 1988-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP801188U JPH01112554U (zh) | 1988-01-25 | 1988-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01112554U true JPH01112554U (zh) | 1989-07-28 |
Family
ID=31213510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP801188U Pending JPH01112554U (zh) | 1988-01-25 | 1988-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01112554U (zh) |
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1988
- 1988-01-25 JP JP801188U patent/JPH01112554U/ja active Pending