JPH0378053U - - Google Patents
Info
- Publication number
- JPH0378053U JPH0378053U JP13978889U JP13978889U JPH0378053U JP H0378053 U JPH0378053 U JP H0378053U JP 13978889 U JP13978889 U JP 13978889U JP 13978889 U JP13978889 U JP 13978889U JP H0378053 U JPH0378053 U JP H0378053U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- notch
- control body
- irradiation device
- beam irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、この考案の一実施例に係るイオンビ
ーム照射装置を部分的に示す図である。第２図は
、第１図中の制御体を示す斜視図である。第３図
は、制御体の切欠きとイオンビームとの関係の例
を示す正面図である。第４図ＡおよびＢは、それ
ぞれ、イオンビームの断続状態の例を示す図であ
る。第５図は、従来のイオンビーム照射装置の一
例を部分的に示す図である。第６図は、イオンビ
ームの電流密度分布の一例を示す図である。
２……真空容器、４……イオンビーム、８……
ターゲツト、１０……制御体、１２ａ，１２ｂ…
…切欠き、１８……駆動装置。
FIG. 1 is a diagram partially showing an ion beam irradiation apparatus according to an embodiment of this invention. FIG. 2 is a perspective view showing the control body in FIG. 1. FIG. 3 is a front view showing an example of the relationship between the notch of the control body and the ion beam. FIGS. 4A and 4B are diagrams each showing an example of an intermittent state of the ion beam. FIG. 5 is a diagram partially showing an example of a conventional ion beam irradiation device. FIG. 6 is a diagram showing an example of the current density distribution of the ion beam. 2... Vacuum vessel, 4... Ion beam, 8...
Target, 10... Control body, 12a, 12b...
...Notch, 18... Drive device.
Claims (1)
する構成のイオンビーム照射装置において、ター
ゲツトに向かうイオンビームの経路上に設けられ
た円筒状の制御体であつて、その側面の相対向す
る位置に、その周方向の幅がその軸方向に順次変
化している第１の切欠きおよびこの第１の切欠き
を少なくともカバーする第２の切欠きを有するも
のと、この制御体をその周方向に回転させかつそ
の軸方向に往復直進させる駆動装置とを備えるこ
とを特徴とするイオンビーム照射装置。 In an ion beam irradiation device configured to irradiate a target with an ion beam in a vacuum chamber, the control body is a cylindrical control body installed on the path of the ion beam toward the target, and has two control bodies located at opposing positions on its side. A first notch whose circumferential width sequentially changes in the axial direction, and a second notch that at least covers the first notch, and the control body is rotated in the circumferential direction. What is claimed is: 1. An ion beam irradiation device characterized by comprising: a drive device that moves the ion beam irradiation device back and forth in an axial direction;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13978889U JPH0378053U (en) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13978889U JPH0378053U (en) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378053U true JPH0378053U (en) | 1991-08-07 |
Family
ID=31686813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13978889U Pending JPH0378053U (en) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378053U (en) |
-
1989
- 1989-11-30 JP JP13978889U patent/JPH0378053U/ja active Pending