JPH0377436U

JPH0377436U -

Info

Publication number: JPH0377436U
Application number: JP13746689U
Authority: JP
Priority date: 1989-11-28
Filing date: 1989-11-28
Publication date: 1991-08-05

Description

[Brief explanation of the drawing]

第１図は本考案に係る第１実施例の縦型処理装
置の断面図、第２図は同実施例の要部のみを拡大
して示した断面図、第３図は第２実施例の要部の
みを示した略示的断面図である。１……炉本体、１ａ……補助部材、２……炉体
カバー、３……断熱層、４……ヒートコイル、５
……均熱管、６……反応管、７……蓋部材、８…
…シヤフト、９……ウエーハボート、１０……半
導体ウエーハ、１１……バツフア、１２……脚部
、１３……燃焼ノズル、１４……噴出ノズル、１
５，１６……ガス導管、２０……上面板、２０ａ
……外蓋、２１……突出栓部、２１ａ……内蓋、
２２……軸管、２３……断熱材、２４……小孔、
２４ａ……小室、２５……減圧手段、２６……連
通部、２７……ダクト、３０……案内凸部、３１
……ツバ、３２……吸引溝、３３……吸引パイプ
、３４……栓部材、ａ……間隙、Ａ，Ｂ……すり
合わせ面。 FIG. 1 is a sectional view of a vertical processing apparatus according to a first embodiment of the present invention, FIG. 2 is an enlarged sectional view of only the main parts of the same embodiment, and FIG. FIG. 2 is a schematic cross-sectional view showing only essential parts. DESCRIPTION OF SYMBOLS 1... Furnace body, 1a... Auxiliary member, 2... Furnace cover, 3... Heat insulation layer, 4... Heat coil, 5
... Soaking tube, 6 ... Reaction tube, 7 ... Lid member, 8 ...
...shaft, 9 ... wafer boat, 10 ... semiconductor wafer, 11 ... buffer, 12 ... leg, 13 ... combustion nozzle, 14 ... jet nozzle, 1
5, 16...Gas conduit, 20...Top plate, 20a
...Outer lid, 21...Protruding plug part, 21a...Inner lid,
22...Axis tube, 23...Insulating material, 24...Small hole,
24a...Small chamber, 25...Decompression means, 26...Communication section, 27...Duct, 30...Guiding convex portion, 31
...Brim, 32... Suction groove, 33... Suction pipe, 34... Plug member, a... Gap, A, B... Grinding surface.

Claims

[Claims for Utility Model Registration] (1) In a vertical heat treatment apparatus in which the opening of a reaction tube is closed by rubbing a lid member together, a suction groove is formed on the rubbing surface, and the suction groove is placed under negative pressure. A closed lid structure for a vertical heat treatment equipment. (2) The lid-sealing structure for a vertical heat treatment apparatus according to claim (1), wherein an auxiliary member is interposed between the opening of the reaction tube and the lid member. (3) A pressure reduction means is provided in communication with the gap formed between the shaft and the through hole of the shaft provided in the lid member, and this gap is maintained at a pressure lower than atmospheric pressure and the internal pressure of the reaction tube. Claims made to
A lid-sealing structure of the vertical heat treatment equipment described in (1) and (2).