JPH03772B2 - - Google Patents

Info

Publication number
JPH03772B2
JPH03772B2 JP60298813A JP29881385A JPH03772B2 JP H03772 B2 JPH03772 B2 JP H03772B2 JP 60298813 A JP60298813 A JP 60298813A JP 29881385 A JP29881385 A JP 29881385A JP H03772 B2 JPH03772 B2 JP H03772B2
Authority
JP
Japan
Prior art keywords
opening
slider
closing
closing member
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60298813A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62158334A (ja
Inventor
Seishiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP29881385A priority Critical patent/JPS62158334A/ja
Publication of JPS62158334A publication Critical patent/JPS62158334A/ja
Publication of JPH03772B2 publication Critical patent/JPH03772B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
  • Transmission Devices (AREA)
JP29881385A 1985-12-28 1985-12-28 開閉装置 Granted JPS62158334A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29881385A JPS62158334A (ja) 1985-12-28 1985-12-28 開閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29881385A JPS62158334A (ja) 1985-12-28 1985-12-28 開閉装置

Publications (2)

Publication Number Publication Date
JPS62158334A JPS62158334A (ja) 1987-07-14
JPH03772B2 true JPH03772B2 (pm) 1991-01-08

Family

ID=17864553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29881385A Granted JPS62158334A (ja) 1985-12-28 1985-12-28 開閉装置

Country Status (1)

Country Link
JP (1) JPS62158334A (pm)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03230092A (ja) * 1990-02-02 1991-10-14 Ngk Insulators Ltd 外部加熱装置
JP4727808B2 (ja) * 2000-12-07 2011-07-20 庸 菊池 空気圧機器の検査装置
JP2011091386A (ja) * 2009-09-24 2011-05-06 Semiconductor Energy Lab Co Ltd 熱処理装置、熱処理方法及び半導体装置の作製方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166507U (pm) * 1974-11-18 1976-05-26
JPS5526715A (en) * 1978-08-16 1980-02-26 Kokusai Denshin Denwa Co Ltd <Kdd> Data string rearrangement unit
JPS5674746A (en) * 1979-11-22 1981-06-20 Fuji Electric Co Ltd Data processing unit

Also Published As

Publication number Publication date
JPS62158334A (ja) 1987-07-14

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