JPH0377241B2 - - Google Patents
Info
- Publication number
- JPH0377241B2 JPH0377241B2 JP61260492A JP26049286A JPH0377241B2 JP H0377241 B2 JPH0377241 B2 JP H0377241B2 JP 61260492 A JP61260492 A JP 61260492A JP 26049286 A JP26049286 A JP 26049286A JP H0377241 B2 JPH0377241 B2 JP H0377241B2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- sintering
- trolley
- compact
- cart
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005245 sintering Methods 0.000 claims description 57
- 238000001816 cooling Methods 0.000 claims description 21
- 238000002791 soaking Methods 0.000 claims description 20
- 238000011282 treatment Methods 0.000 claims description 9
- 230000032258 transport Effects 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 4
- 229910001111 Fine metal Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、焼結装置に関し、特に連続的に成形
体を焼結しうる焼結装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a sintering device, and more particularly to a sintering device that can continuously sinter compacts.
（従来の技術）
一般に、固体電解コンデンサは、タンタル等の
弁作用を有する金属の微粉末を任意の形状に加圧
成形し、この成形体を高温・高真空の雰囲気中で
焼結し、焼結後、酸化処理等を施し、製造され
る。(Prior technology) In general, solid electrolytic capacitors are produced by press-molding fine powder of a metal such as tantalum that has a valve action into an arbitrary shape, and then sintering this compact in a high-temperature, high-vacuum atmosphere. After curing, oxidation treatment etc. are performed and the product is manufactured.
特に、成形体を焼結する場合には焼結処理の前
後で各々脱ワツクス処理及び冷却処理を施してお
り、このような処理を連続的に行なうため、各処
理が施される槽を直列に連結し、成形体の載置さ
れた複数個の台車を搬送して、成形体に同時に各
処理を施しうる装置が用いられるようになつてき
た。 In particular, when sintering a compact, wax removal treatment and cooling treatment are performed before and after the sintering treatment, and in order to perform these treatments continuously, the tanks in which each treatment is performed are connected in series. BACKGROUND ART Devices have come into use that can connect a plurality of carts on which molded objects are placed and simultaneously perform various treatments on the molded objects.
（発明が解決しようとする課題）
しかし、このような連続装置では、特性を向上
する等の理由のために各槽内での台車の停留時間
を違えることがあり、この場合には台車が搬入さ
れていない槽が生じることがある。そして、この
槽が焼結槽であると、発熱部分が非常に高温であ
り、その熱をさえぎるものがないために槽の寿命
が短くなる欠点があつた。(Problem to be solved by the invention) However, in such a continuous device, the residence time of the carts in each tank may be different for reasons such as improving characteristics, and in this case, the carts are There may be cases where some tanks have not been properly installed. When this tank is a sintering tank, the heat generating portion is extremely high temperature, and there is nothing to block the heat, resulting in a shortened lifespan of the tank.
本発明の目的は、加熱により焼結槽の寿命が短
くなるのを防止しうる焼結装置を提供するもので
ある。 An object of the present invention is to provide a sintering apparatus that can prevent the life of a sintering tank from being shortened due to heating.
（課題を解決するための手段）
本発明は、上記の目的を達成するために、金属
の微粉末を任意の形状に形成した成形体を、予め
定められた時間経過後に焼結槽内に搬送して焼結
しうる焼結装置において、焼結槽内に設けられた
成形体を加熱して焼結しうる均熱室と、該焼結槽
内の側壁に取り付けられたシールド機構を設け、
このシールド機構は台上に前記均熱室を断熱シー
ルド用台車を有し、この断熱シールド用台車によ
つて前記均熱室の熱を遮蔽することを特徴とする
焼結装置を提供するものである。(Means for Solving the Problems) In order to achieve the above object, the present invention transports a molded body made of fine metal powder into an arbitrary shape into a sintering tank after a predetermined period of time has elapsed. A sintering device capable of sintering by heating and sintering a molded body provided in a sintering tank is provided with a soaking chamber capable of heating and sintering a molded body, and a shield mechanism attached to a side wall of the sintering tank,
This shield mechanism provides a sintering apparatus characterized in that it has a trolley for insulating shielding the soaking chamber on a table, and the heat in the soaking chamber is shielded by the trolley for heat insulating shielding. be.
（作用）
本発明によれば、均熱室にシールド機構によつ
て熱の放散を防止できるために焼結槽の寿命を改
善できる。(Function) According to the present invention, the life of the sintering tank can be improved because heat dissipation can be prevented by the shield mechanism in the soaking chamber.
（実施例）
以下、本発明を図示の実施例に基づいて説明す
る。(Examples) The present invention will be described below based on illustrated examples.
第１図において、１は、第１脱ワツクス槽であ
り、温度数100℃、圧力１〜10-3Torr程度の雰囲
気に保持され、成形体からワツクスを除去するも
のである。２は、第１脱ワツクス槽１に連結され
た第２脱ワツクス槽であり、第１脱ワツクス槽１
よりも高温・高真空度の雰囲気に保持され、第１
脱ワツクス槽１では除去されないワツクスを除去
するものである。３は、第２脱ワツクス槽２に連
結された第１焼結槽であり、温度1200〜1600℃、
圧力10-5Torr程度の雰囲気に保持されており、
脱ワツクス処理後の成形体を焼結するものであ
る。４は、第１焼結槽３に連結された第２焼結槽
であり、第１焼結槽３よりも高温、低圧力に保持
されている。そしてこれらの第１脱ワツクス槽
１、第２脱ワツクス槽２、第１焼結槽３及び第２
焼結槽４はほぼ同じ長さになつている。５は、第
２焼結槽４に連結された第１冷却槽であり、第２
焼結槽４のほぼ２倍の長さになつており、圧力
10-5Torr程度に保持され、第２焼結槽４で焼結
処理された成形体を約100℃まで真空冷却するも
のである。６は、第１冷却槽５に連結された第２
冷却槽であり、第１冷却槽５とほぼ同じ長さで、
成形体をさらに数10℃程度までガス冷却するもの
で、アルゴン等の不活性ガスが充満し、第１冷却
槽５よりも高い圧力の雰囲気に保たれている。 In FIG. 1, reference numeral 1 denotes a first wax removal tank, which is maintained in an atmosphere at a temperature of several 100 DEG C. and a pressure of about 1 to 10 -3 Torr, and is used to remove wax from the molded body. 2 is a second dewaxing tank connected to the first dewaxing tank 1;
The first
This removes wax that is not removed in the wax removal tank 1. 3 is a first sintering tank connected to the second dewaxing tank 2, and the temperature is 1200 to 1600°C;
It is maintained in an atmosphere with a pressure of about 10 -5 Torr.
The molded body after wax removal treatment is sintered. A second sintering tank 4 is connected to the first sintering tank 3 and is maintained at a higher temperature and lower pressure than the first sintering tank 3. These first dewaxing tank 1, second dewaxing tank 2, first sintering tank 3, and second
The sintering tanks 4 have approximately the same length. 5 is a first cooling tank connected to the second sintering tank 4;
The length is almost twice that of sintering tank 4, and the pressure
The molded body maintained at about 10 -5 Torr and sintered in the second sintering tank 4 is vacuum cooled to about 100°C. 6 is a second cooling tank connected to the first cooling tank 5;
It is a cooling tank, and has approximately the same length as the first cooling tank 5,
The molded body is further gas-cooled to about several tens of degrees Celsius, and is filled with an inert gas such as argon, and is maintained at a higher pressure than the first cooling tank 5.
７は、第２冷却槽６に連結された後槽であり、
第１脱ワツクス槽１等と同じ長さで、ガス冷却後
の成形体を取り出すためのものである。 7 is a rear tank connected to the second cooling tank 6;
It has the same length as the first dewaxing tank 1, etc., and is for taking out the molded body after being cooled with gas.
第１脱ワツクス槽１から後槽７までは搬送ロー
ラーが設けられていて成形体を一定の速度で搬送
しうるものであり、また、各槽１〜７は開閉自在
なシヤツターにより互いに隔離されている。そし
て各槽１〜７を任意の圧力に保持するために、油
回転ポンプ８〜１４やルーツブロアポンプ１５〜
２１、拡散ポンプ２２〜２５が任意の組み合わせ
により各槽１〜７に接続されている。 Transport rollers are provided from the first dewaxing tank 1 to the rear tank 7 to transport the molded product at a constant speed, and the tanks 1 to 7 are isolated from each other by shutters that can be opened and closed. There is. In order to maintain each tank 1 to 7 at a desired pressure, oil rotary pumps 8 to 14 and roots blower pumps 15 to
21, diffusion pumps 22 to 25 are connected to each tank 1 to 7 in any combination.
なお、後槽７は必ずしも設ける必要はなく、第
２冷却槽６で成形体を数10℃程度まで冷却した
後、そのまま、空気中に取り出し放置して冷却し
てもよい。 Note that the rear tank 7 is not necessarily provided, and after cooling the molded body to about several tens of degrees Celsius in the second cooling tank 6, it may be taken out into the air and left to cool.
また、第１冷却槽５及び第２冷却槽６は他の槽
のほぼ２倍の長さになつているが、同じ長さであ
つてもよい。ただし、前者の方が冷却に無理がな
く、冷却効果は優れている。 Further, although the first cooling tank 5 and the second cooling tank 6 are approximately twice as long as the other tanks, they may have the same length. However, the former method is easier to cool and has a better cooling effect.
第２図は、第２焼結槽４の断面図である。槽４
の屋根部にはアーチ状の覆２６とその覆２６の内
に設けられたアーチ状のタンタル製のヒータ２７
とが支持棒２８により取り付けられ均熱室２９を
構成している。３０は、均熱室２９の真下に設け
られた搬送用ローラーであり、モーター３１によ
り回転される。３２はこの搬送用ローラー３０に
より搬送される台車であり、成形体が載せられて
いる。３３は台車昇降用のエレベータであり、台
車３２を均熱室２９まで運ぶことができる。３４
は槽４の側壁に取り付けられたシールド機構であ
り、シリンダー３５の先端に、真中に孔のある台
３６が取り付けられており、この台３６に断熱シ
ールド用の台車３７が載置されている。この台車
３７は上部３８がタンタルとモリブデンの積層体
構造となつており、下部に黒鉛をモリブデンで被
覆した断熱部３９が形成されている。 FIG. 2 is a sectional view of the second sintering tank 4. Tank 4
An arch-shaped cover 26 and an arch-shaped tantalum heater 27 provided inside the cover 26 are provided on the roof of the
are attached by support rods 28 to constitute a soaking chamber 29. 30 is a conveyance roller provided directly below the soaking chamber 29, and is rotated by a motor 31. Reference numeral 32 denotes a cart conveyed by the conveyance rollers 30, on which the molded body is placed. Reference numeral 33 is an elevator for raising and lowering the trolley, and can transport the trolley 32 to the soaking room 29. 34
is a shield mechanism attached to the side wall of the tank 4, and a stand 36 with a hole in the center is attached to the tip of the cylinder 35, and a heat shielding cart 37 is placed on this stand 36. The upper part 38 of this truck 37 has a laminate structure of tantalum and molybdenum, and the lower part has a heat insulating part 39 formed by coating graphite with molybdenum.
次に、上記実施例の作用について説明する。 Next, the operation of the above embodiment will be explained.
先ず、タンタル等の弁作用金属の微粉末に圧力
を加えて任意の形状に成形した成形体を台車に載
せ、搬送用ローラーにより一定の速度で搬送す
る。そして各槽で一定時間停留させるが、第１脱
ワツクス槽１、第２脱ワツクス槽２、第１焼結槽
３及び後槽７の停留時間は同じとし、第２焼結槽
４はその1/2そして第１冷却槽５及び第２冷却槽
６はその２倍とする。すなわち、成形体を載せた
台車は、先ず第１脱ワツクス槽１に搬入され一定
時間停留して、成形体のワツクスを除去する。次
に台車は第２脱ワツクス槽２内に搬入され残りの
ワツクスが除去される。ワツクス除去後、台車は
第１焼結槽３に搬入され成形体は焼結される。第
１焼結槽３で焼結後、第２図に示す如く、台車３
２は第２焼結槽４内に搬入される。台車３２が第
２焼結槽４に搬入されると、第３図に示す通り、
エレベータ３３が上昇して台車３２を均熱室２９
まで運ぶ。そして焼結後、エレベータ３３は下降
し台車３２を搬送用ローラー３０の上に載置す
る。台車３２は、搬送用ローラー３０の上に載置
されると、次の第１冷却槽５に搬入される。台車
３２が第２焼結槽４から搬出されても、この間の
焼結時間が第１焼結槽３での焼結時間のほぼ1/2
であるため、次の台車はまだ第２焼結槽４内には
搬入されてこない。この間、第２焼結槽４内で
は、シールド機構３４が作動する。すなわち、第
２焼結槽４から台車３２が搬送され終わると、第
４図に示す如くシリンダー３５が延び断熱シール
ド用の台車３７を均熱室２９の真下まで運ぶ。台
車３７が均熱室２９の真下にくるとエレベータ３
３が台の孔を通して断熱シールド用台車３７を均
熱室２９まで押し上げ、そのため均熱室２９が台
車３７で蓋をした状態になる。従つて、均熱室２
９の熱は遮蔽されて第２焼結槽４の他の部分に直
接伝達されることがない。そして所定時間経過
後、エレベータ３３が下降して台３６の上に台車
３７を置くとシリンダー３５が後退して台車３７
を元の位置（第２図）までもつてゆく。台車３７
が元の位置に戻ると、第１焼結槽３から次の成形
体を載せた台車３７が第２焼結槽３に搬入され以
下同じ動作が繰り返される。第１冷却槽５におい
ては成形体は真空冷却される。真空冷却後は成形
体は第２冷却槽５に搬入されガス冷却される。ガ
ス冷却後、台車は後槽７に搬入される。後槽７は
最初は低圧力に保持され、台車の搬入後、常温常
圧にされるもので、この状態で成形体が台車ごと
搬出される。 First, a molded body made by applying pressure to a fine powder of a valve metal such as tantalum and molding it into an arbitrary shape is placed on a trolley and conveyed at a constant speed by conveying rollers. Then, each tank is allowed to stay for a certain period of time, but the staying time in the first dewaxing tank 1, second dewaxing tank 2, first sintering tank 3, and rear tank 7 is the same, and the second sintering tank 4 is the same. /2 and the first cooling tank 5 and second cooling tank 6 are twice that amount. That is, the trolley carrying the molded body is first carried into the first dewaxing tank 1 and remains there for a certain period of time to remove wax from the molded body. Next, the cart is carried into the second dewaxing tank 2, and the remaining wax is removed. After removing the wax, the cart is carried into the first sintering tank 3 and the compact is sintered. After sintering in the first sintering tank 3, as shown in FIG.
2 is carried into the second sintering tank 4. When the cart 32 is carried into the second sintering tank 4, as shown in FIG.
The elevator 33 rises and transports the trolley 32 to the soaking room 29.
carry it up to After sintering, the elevator 33 descends and places the cart 32 on the transport rollers 30. When the trolley 32 is placed on the transport roller 30, it is carried into the next first cooling tank 5. Even if the cart 32 is carried out from the second sintering tank 4, the sintering time during this period is approximately 1/2 of the sintering time in the first sintering tank 3.
Therefore, the next cart has not yet been carried into the second sintering tank 4. During this time, the shield mechanism 34 operates within the second sintering tank 4. That is, when the cart 32 is completely transferred from the second sintering tank 4, the cylinder 35 extends and carries the heat insulation shielding cart 37 to just below the soaking chamber 29, as shown in FIG. When the trolley 37 comes directly under the soaking room 29, the elevator 3
3 pushes up the heat-insulating shield trolley 37 to the soaking chamber 29 through the hole in the stand, so that the soaking chamber 29 is covered with the trolley 37. Therefore, soaking room 2
9 is shielded and is not directly transmitted to other parts of the second sintering tank 4. After a predetermined period of time has elapsed, the elevator 33 descends and places the trolley 37 on the platform 36, and the cylinder 35 moves back and the trolley 37 is placed on top of the platform 36.
and bring it back to its original position (Figure 2). Trolley 37
When it returns to its original position, the cart 37 carrying the next compact is carried from the first sintering tank 3 to the second sintering tank 3, and the same operation is repeated thereafter. In the first cooling tank 5, the molded body is vacuum cooled. After vacuum cooling, the molded body is carried into the second cooling tank 5 and cooled with gas. After cooling with gas, the cart is carried into the rear tank 7. The rear tank 7 is initially kept at a low pressure, and after the cart is brought in, it is brought to normal temperature and pressure, and in this state the molded bodies are carried out together with the cart.
すなわち、上記実施例によれば、第２焼結槽４
にシールド機構３４を設け、均熱室２９に台車３
７により蓋をすることができるため、成形体を載
せた台車３２が搬入されていない場合にも均熱室
２９の熱が第２焼結槽４の他の部分に直接伝達さ
れるのを防ぐことができ槽４の寿命を改善でき
る。また、均熱室２９の温度を上げ下げするよう
な方法を用いることがないのでヒーター２７の寿
命も改善できる。 That is, according to the above embodiment, the second sintering tank 4
A shield mechanism 34 is provided in the heating chamber 29.
Since the lid can be covered by 7, the heat in the soaking chamber 29 is prevented from being directly transmitted to other parts of the second sintering tank 4 even when the trolley 32 carrying the compact is not carried in. Therefore, the life of the tank 4 can be improved. Further, since there is no need to use a method of increasing or decreasing the temperature of the soaking chamber 29, the life of the heater 27 can be improved.
（発明の効果）
以上の通り、本発明によれば、均熱室２９の熱
の放散をシールド機構により防止できるため、寿
命を向上しうる焼結装置が得られる。(Effects of the Invention) As described above, according to the present invention, the radiation of heat in the soaking chamber 29 can be prevented by the shield mechanism, so that a sintering device with improved lifespan can be obtained.
第１図は本発明の実施例の構成図、第２図〜第
４図は本発明の実施例に用いられる第２焼結槽の
断面図であり、第２図は台車が搬入された状態の
断面図、第３図は台車を均熱室まで上げた状態の
断面図、第４図はシールド機構を動作させた状態
の断面図を示す。
３……第１焼結槽、４……第２焼結槽、２９…
…均熱室、３４……シールド機構、３８……断熱
部。
Fig. 1 is a configuration diagram of an embodiment of the present invention, Figs. 2 to 4 are cross-sectional views of a second sintering tank used in an embodiment of the present invention, and Fig. 2 shows a state in which a cart is carried in. FIG. 3 is a cross-sectional view of the trolley raised to the soaking chamber, and FIG. 4 is a cross-sectional view of the shield mechanism in operation. 3...first sintering tank, 4...second sintering tank, 29...
...Soaking chamber, 34... Shield mechanism, 38... Heat insulation section.
Claims (1)
を、脱ワツクス、焼結及び冷却の各処理を行うた
めの複数の処理槽が直列に連結され、各処理槽間
及び各処理槽の下部に成形体を載置する台車を有
する成形体搬送機構で搬送し焼結する焼結装置に
おいて、焼結槽の上部に設けた成形体を加熱し焼
結する均熱室と、この焼結槽内の側壁に取り付け
たシールド機構を設け、このシールド機構はシリ
ンダーの先端に取り付けた台上に断熱シールド用
台車を有し、この断熱シールド用台車によつて前
記均熱室の熱を遮蔽することを特徴とする焼結装
置。1. A plurality of processing tanks are connected in series to perform dewaxing, sintering, and cooling treatments on molded bodies made of fine metal powder into arbitrary shapes. In a sintering apparatus that transports and sinters a compact by a compact conveyance mechanism having a cart on which the compact is placed, a soaking chamber is provided above the sintering tank for heating and sintering the compact, and the sintering tank includes A shield mechanism is provided on the side wall of the cylinder, and this shield mechanism has a heat insulating shield trolley on a stand attached to the tip of the cylinder, and the heat in the soaking chamber is shielded by the heat insulating shield trolley. A sintering device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26049286A JPS63114907A (en) | 1986-10-31 | 1986-10-31 | Sintering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26049286A JPS63114907A (en) | 1986-10-31 | 1986-10-31 | Sintering device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63114907A JPS63114907A (en) | 1988-05-19 |
| JPH0377241B2 true JPH0377241B2 (en) | 1991-12-10 |
Family
ID=17348714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26049286A Granted JPS63114907A (en) | 1986-10-31 | 1986-10-31 | Sintering device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114907A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4576331B2 (en) * | 2005-12-28 | 2010-11-04 | 中外炉工業株式会社 | Continuous sintering furnace |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS609801A (en) * | 1983-06-27 | 1985-01-18 | Chugai Ro Kogyo Kaisha Ltd | Vacuum sintering furnace |
| JPS6040591U (en) * | 1983-08-26 | 1985-03-22 | マツダ株式会社 | Sink angle control device for drilling equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5861424U (en) * | 1981-10-22 | 1983-04-25 | 東北金属工業株式会社 | vacuum sintering equipment |
| JPS59160529U (en) * | 1983-04-14 | 1984-10-27 | 日本電気株式会社 | Transport platform |
-
1986
- 1986-10-31 JP JP26049286A patent/JPS63114907A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS609801A (en) * | 1983-06-27 | 1985-01-18 | Chugai Ro Kogyo Kaisha Ltd | Vacuum sintering furnace |
| JPS6040591U (en) * | 1983-08-26 | 1985-03-22 | マツダ株式会社 | Sink angle control device for drilling equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63114907A (en) | 1988-05-19 |
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