JPH0373803B2 - - Google Patents
Info
- Publication number
- JPH0373803B2 JPH0373803B2 JP6728082A JP6728082A JPH0373803B2 JP H0373803 B2 JPH0373803 B2 JP H0373803B2 JP 6728082 A JP6728082 A JP 6728082A JP 6728082 A JP6728082 A JP 6728082A JP H0373803 B2 JPH0373803 B2 JP H0373803B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- scanning
- gap
- slider
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 18
- 230000005284 excitation Effects 0.000 claims description 16
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000000691 measurement method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000004069 differentiation Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6728082A JPS58184504A (ja) | 1982-04-23 | 1982-04-23 | 微小すきまの光学的測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6728082A JPS58184504A (ja) | 1982-04-23 | 1982-04-23 | 微小すきまの光学的測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58184504A JPS58184504A (ja) | 1983-10-28 |
| JPH0373803B2 true JPH0373803B2 (enrdf_load_stackoverflow) | 1991-11-25 |
Family
ID=13340395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6728082A Granted JPS58184504A (ja) | 1982-04-23 | 1982-04-23 | 微小すきまの光学的測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58184504A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60131408A (ja) * | 1983-12-21 | 1985-07-13 | Hitachi Ltd | 微小隙間測定装置 |
| JPH0820226B2 (ja) * | 1985-11-18 | 1996-03-04 | ソニー株式会社 | ヘツド浮上量測定方法 |
-
1982
- 1982-04-23 JP JP6728082A patent/JPS58184504A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58184504A (ja) | 1983-10-28 |
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