JPH0371660A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPH0371660A JPH0371660A JP1209307A JP20930789A JPH0371660A JP H0371660 A JPH0371660 A JP H0371660A JP 1209307 A JP1209307 A JP 1209307A JP 20930789 A JP20930789 A JP 20930789A JP H0371660 A JPH0371660 A JP H0371660A
- Authority
- JP
- Japan
- Prior art keywords
- bonding wire
- pad
- lead
- semiconductor device
- semiconductor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 57
- 229920005989 resin Polymers 0.000 claims abstract description 34
- 239000011347 resin Substances 0.000 claims abstract description 34
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 18
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05553—Shape in top view being rectangular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85909—Post-treatment of the connector or wire bonding area
- H01L2224/8592—Applying permanent coating, e.g. protective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、半導体チップとリードフレームとがボンディ
ングワイヤで接続された半導体装置に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a semiconductor device in which a semiconductor chip and a lead frame are connected by bonding wires.
〈従来の技術〉
従来のこの種の半導体装置について第4図及び第5図を
参照しつつ説明する。<Prior Art> A conventional semiconductor device of this type will be described with reference to FIGS. 4 and 5.
この種の半導体装置は、半導体チップ10と、リードフ
レーム30と、半導体チップIOのパッド11とリード
フレーム30のインナリード312 とを接続するボン
ディングワイヤ20と、リードフレーム30のアウタリ
ード311以外の部分、すなわち半導体チップ10、ボ
ンディングワイヤ20及びインナリード312を封止す
る封止用樹脂40とから構成されている。This type of semiconductor device includes a semiconductor chip 10, a lead frame 30, a bonding wire 20 connecting the pad 11 of the semiconductor chip IO and an inner lead 312 of the lead frame 30, a portion of the lead frame 30 other than the outer lead 311, That is, it is composed of the semiconductor chip 10, the bonding wires 20, and the sealing resin 40 that seals the inner leads 312.
リードフレーム30は、半導体チップ10がダイボンデ
ィングされるダイパッド32と、リード部31とからな
り、リード部31の先端は図示しない基板の配線パター
ンに接続されるアウタリード311、後端はインナリー
ド312となっている。このようなリードフレーム30
は、エツチング加工によって形成される。The lead frame 30 consists of a die pad 32 to which the semiconductor chip 10 is die-bonded, and a lead part 31. The leading end of the lead part 31 is an outer lead 311 connected to a wiring pattern of a substrate (not shown), and the rear end is an inner lead 312. It has become. Such a lead frame 30
is formed by etching.
半導体チップ10は、前記ダイパッド32にダイボンデ
ィングされ、半導体チップ10のパッド11とインナリ
ード312とがボンディングワイヤ20によって接続さ
れる。そして、アウタリード311以外の部分が封止用
樹脂40によって封止されて半導体装置が形成される。The semiconductor chip 10 is die-bonded to the die pad 32, and the pad 11 of the semiconductor chip 10 and the inner lead 312 are connected by the bonding wire 20. Then, parts other than the outer leads 311 are sealed with the sealing resin 40 to form a semiconductor device.
〈発明が解決しようとする課題〉
しかしながら、上述した従来の半導体装置には以下のよ
うな問題点がある。<Problems to be Solved by the Invention> However, the conventional semiconductor device described above has the following problems.
すなわち、リード部31の数が多いいわゆる多ビン構造
の半導体装置では、リードフレーム30のインナリード
312とダイパッド32との間の距離を短く設定するこ
とが困難になっている。これは、エツチング加工技術の
限界に起因している。That is, in a semiconductor device having a so-called multi-bin structure having a large number of lead portions 31, it is difficult to set the distance between the inner lead 312 of the lead frame 30 and the die pad 32 short. This is due to the limitations of etching technology.
例えば、100ビン以上の半導体装置では、パッド11
とインナリード312との距離が3.511In以上に
なるので、ボンディングワイヤ20はリード部31の数
が少ない半導体装置より長いものを使用しなければなら
ない。かかるボンディングワイヤ20は、封止用樹脂4
0の封止時に流れ込む封止用樹脂40の圧力のため、ワ
イヤ流れ(封止用樹脂40の注入時の圧力によるボンデ
ィングワイヤ20の変形をいう)が発生しやすい。かか
るワイヤ流れは、第5図に示す半導体チップ10−ボン
ディングワイヤ20(第5図のA部参照)、ボンディン
グワイヤ20ボンデイングワイヤ20(第5図のB部参
照)、インナリード312−ボンディングワイヤ20
(第5図のC部参照)の如き短絡不良の発生原因となる
。For example, in a semiconductor device with 100 bins or more, pad 11
Since the distance between the lead portion 312 and the inner lead 312 is 3.511 In or more, the bonding wire 20 must be longer than that of a semiconductor device having fewer lead portions 31. The bonding wire 20 is bonded to the sealing resin 4.
Due to the pressure of the sealing resin 40 flowing during the sealing process, wire flow (referring to deformation of the bonding wire 20 due to the pressure when the sealing resin 40 is injected) is likely to occur. Such wire flow is as shown in FIG. 5: semiconductor chip 10 - bonding wire 20 (see section A in FIG. 5), bonding wire 20 - bonding wire 20 (see section B in FIG. 5), inner lead 312 - bonding wire 20
(See section C in FIG. 5).
本発明は上記事情に鑑みて創案されたもので、多ビン構
造の半導体装置であってもボンディングワイヤのワイヤ
流れが発生しない半導体装置を提供することを目的とし
ている。The present invention was devised in view of the above circumstances, and an object of the present invention is to provide a semiconductor device in which bonding wire does not flow even in a semiconductor device having a multi-bin structure.
〈課題を解決するための手段〉
本発明に係る半導体装置は、リードフレームのダイパッ
ドにダイボンディングされた半導体チップのパッドと、
リードフレームのリード部のインナリードとがボンディ
ングワイヤで接続され、リード部のアウタリード以外の
部分が封止樹脂で刺止されてなる半導体装置であって、
少なくとも前記パッドとボンディングワイヤとの接続部
分が補強用樹脂で覆われている。<Means for Solving the Problems> A semiconductor device according to the present invention includes a pad of a semiconductor chip die-bonded to a die pad of a lead frame;
A semiconductor device in which an inner lead of a lead part of a lead frame is connected with a bonding wire, and a part of the lead part other than the outer lead is sealed with a sealing resin,
At least the connection portion between the pad and the bonding wire is covered with reinforcing resin.
く作用〉
補強用樹脂で少なくともボンディングワイヤとパッドと
の接続部分を覆う。補強用樹脂で覆われた部分は、ワイ
ヤ流れが発生しない。Effect> Cover at least the connection portion between the bonding wire and the pad with reinforcing resin. Wire drift does not occur in the portion covered with reinforcing resin.
〈実施例〉
以下、図面を参照して本発明に係る一実施例を説明する
。<Example> Hereinafter, an example according to the present invention will be described with reference to the drawings.
第1図は本発明の一実施例に係る半導体装置の概略的断
面図、第2図及び第3図は他の実施例に係る半導体装置
の概略的断面図である。なお、従来のものと略同−の部
品等には同一の符号を付して説明を行う。FIG. 1 is a schematic cross-sectional view of a semiconductor device according to one embodiment of the present invention, and FIGS. 2 and 3 are schematic cross-sectional views of semiconductor devices according to other embodiments. Note that parts and the like that are substantially the same as those of the conventional one will be described with the same reference numerals.
本実施例に係る半導体装置は、リードフレーム30のダ
イパッド32にダイボンディングされた半導体チップ1
0のバッド11と、リードフレーム30のリード部31
のインナリード312とがボンディングワイヤ20で接
続され、リード部31のアウタリード311以外の部分
が封止用樹脂40で封止されている。The semiconductor device according to this embodiment includes a semiconductor chip 1 die-bonded to a die pad 32 of a lead frame 30.
0's pad 11 and the lead part 31 of the lead frame 30
are connected to the inner leads 312 by the bonding wires 20, and the portions of the lead portions 31 other than the outer leads 311 are sealed with a sealing resin 40.
まず、第1図を参照しつつ本発明の一実施例に係る半導
体装置の製造工程について説明する。First, a manufacturing process of a semiconductor device according to an embodiment of the present invention will be described with reference to FIG.
まず、半導体チップIOをグイバッド32にダイボンデ
ィングし、当該半導体チップ10のバッド11とリード
部31のインナリード312との間を金線等のボンディ
ングワイヤ20で接続する。First, the semiconductor chip IO is die-bonded to the guide pad 32, and the pad 11 of the semiconductor chip 10 and the inner lead 312 of the lead portion 31 are connected using bonding wires 20 such as gold wires.
次に、補強用樹脂50を半導体チップ10の上全面に滴
下して、ボンディングワイヤ20とパッドHとの接続部
分を覆って補強する。前記補強用樹脂50は、エポキシ
系樹脂を加熱して液状にしたものであって、滴下後に熱
硬化させる。また、固形の補強用樹脂50を少なくとも
ボンディングワイヤ20とバッド11との接続部分に載
せ、熱溶解、熱硬化させることによって両者を覆っても
よい。Next, a reinforcing resin 50 is dropped onto the entire surface of the semiconductor chip 10 to cover and reinforce the connecting portion between the bonding wire 20 and the pad H. The reinforcing resin 50 is made of an epoxy resin heated to a liquid state, and is thermally cured after being dropped. Alternatively, the solid reinforcing resin 50 may be placed on at least the connection portion between the bonding wire 20 and the pad 11, and may be thermally melted and thermally cured to cover both.
この後に、アウタリード311以外の部分、すなわち半
導体チップ10、ボンディングワイヤ20及びインナリ
ード312を封止用樹脂40でもって封止する。この封
止用樹脂40は、例えばエポキシ系樹脂であって、封止
された半導体チップ10等を外部の雰囲気から保護する
役割を果たす。After this, parts other than the outer leads 311, that is, the semiconductor chip 10, the bonding wires 20, and the inner leads 312 are sealed with the sealing resin 40. This sealing resin 40 is, for example, an epoxy resin, and serves to protect the sealed semiconductor chip 10 and the like from the external atmosphere.
第2図に示す実施例では、補強用樹脂50が半導体チッ
プ10の上全面のみならず、ダイパッド32にも滴下さ
れている。In the embodiment shown in FIG. 2, the reinforcing resin 50 is dripped not only on the entire upper surface of the semiconductor chip 10 but also on the die pad 32.
次に、ボンディングワイヤ20の全体が補強用樹脂50
で覆われた半導体装置について第3図を参照しつつ説明
する。Next, the entire bonding wire 20 is covered with reinforcing resin 50.
A semiconductor device covered with a wafer will be described with reference to FIG.
かかる半導体装置では、リード部31とダイパッド32
との間の隙間から補強用樹脂50が流れ落ちないように
、リード部31とダイパッド32との間の隙間に例えば
ポリイミド等からなるフィルム60を貼付しておく。In such a semiconductor device, the lead portion 31 and the die pad 32
A film 60 made of, for example, polyimide is attached to the gap between the lead part 31 and the die pad 32 to prevent the reinforcing resin 50 from flowing down from the gap between the leads 31 and the die pad 32.
なお、半導体チップIOのダイパッド32へのダイボン
ディング、ボンディングワイヤ20によるパッド11と
インナリード312との接続或いは封止用樹脂40によ
る封止は上述した実施例と同様なので説明は省略する。Note that the die bonding of the semiconductor chip IO to the die pad 32, the connection between the pad 11 and the inner lead 312 using the bonding wire 20, and the sealing with the sealing resin 40 are the same as those in the above-mentioned embodiment, so the explanation will be omitted.
なお、第1図及び第2図に示した実施例においては、補
強用樹脂50は半導体チップ10或いはダイパッド32
から流れ落ちない適宜量だけ滴下するものとする。Note that in the embodiment shown in FIGS. 1 and 2, the reinforcing resin 50 is applied to the semiconductor chip 10 or the die pad 32.
The appropriate amount should be dripped so that it does not run off.
〈発明の効果〉
本発明に係る半導体装置は、補強用樹脂で少なくともパ
ッドとボンディングワイヤとの接続部分が補強された後
に、アウタリード以外の部分を封止用樹脂で封止して構
成されているので、封止用樹脂を注入する際の圧力によ
るワイヤ流れは発生しない、従って、多ピン構造の半導
体装置であっても短絡不良がない信頼性の高い半導体装
置とすることができる。具体的には200ピン以上の半
導体装置であっても短絡不良が発生しない。<Effects of the Invention> The semiconductor device according to the present invention is constructed by reinforcing at least the connection portion between the pad and the bonding wire with a reinforcing resin, and then sealing the portion other than the outer lead with a sealing resin. Therefore, no wire flow occurs due to the pressure when the sealing resin is injected. Therefore, even if the semiconductor device has a multi-pin structure, it can be a highly reliable semiconductor device free from short-circuit defects. Specifically, short-circuit failures do not occur even in semiconductor devices with 200 pins or more.
すなわち、第1図或いは第2図に示す半導体装置による
と、ボンディングワイヤとパッドとの接続部分が補強用
樹脂で覆われるので、少なくとも第5図のA部に示す半
導体チップ−ボンディングワイヤの短絡が発生しない。That is, according to the semiconductor device shown in FIG. 1 or 2, the connecting portion between the bonding wire and the pad is covered with reinforcing resin, so that at least the short circuit between the semiconductor chip and the bonding wire shown in part A of FIG. 5 is prevented. Does not occur.
また、第3図に示す半導体装置によると、第5図に示す
A部のみならず、B部、C部に示すボンディングワイヤ
ーボンディングワイヤ、ボンディングワイヤーインナリ
ードの短絡不良が発生しない。Further, according to the semiconductor device shown in FIG. 3, short-circuit failures do not occur in the bonding wire bonding wire and the bonding wire inner lead shown in not only the A section shown in FIG. 5 but also the B section and C section.
第1図は本発明の一実施例に係る半導体装置の概略的断
面図、第2図及び第3図は他の実施例に係る半導体装置
の概略的断面図、第4図は従来の半導体装置の概略的断
面図、第5図は従来の半導体装置の問題点を示す模式的
斜視図である。
10・・・半導体チップ、11・・・パッド、20・・
ボンディングワイヤ、30・・・リードフレーム、31
・・・リード部、311 ・・・アウタリード、31
2 ・ ・ ・インナリード、32・ ・ ・ダイパ
ッド、40・・・封止用樹脂、50・・・補強用樹脂。FIG. 1 is a schematic cross-sectional view of a semiconductor device according to one embodiment of the present invention, FIGS. 2 and 3 are schematic cross-sectional views of semiconductor devices according to other embodiments, and FIG. 4 is a conventional semiconductor device. FIG. 5 is a schematic perspective view showing problems with the conventional semiconductor device. 10... Semiconductor chip, 11... Pad, 20...
Bonding wire, 30...Lead frame, 31
...Lead part, 311 ...Outer lead, 31
2 . . . Inner lead, 32 . . . Die pad, 40 . . . Sealing resin, 50 . . . Reinforcing resin.
Claims (1)
された半導体チップのパッドと、リードフレームのリー
ド部のインナリードとがボンディングワイヤで接続され
、リード部のアウタリード以外の部分が封止用樹脂で封
止されてなる半導体装置において、少なくとも前記パッ
ドとボンディングワイヤとの接続部分が補強用樹脂で覆
われていることを特徴とする半導体装置。(1) The pad of the semiconductor chip die-bonded to the die pad of the lead frame and the inner lead of the lead part of the lead frame are connected with a bonding wire, and the parts of the lead part other than the outer leads are sealed with a sealing resin. 1. A semiconductor device characterized in that at least a connection portion between the pad and the bonding wire is covered with a reinforcing resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1209307A JPH0371660A (en) | 1989-08-10 | 1989-08-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1209307A JPH0371660A (en) | 1989-08-10 | 1989-08-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0371660A true JPH0371660A (en) | 1991-03-27 |
Family
ID=16570790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1209307A Pending JPH0371660A (en) | 1989-08-10 | 1989-08-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0371660A (en) |
-
1989
- 1989-08-10 JP JP1209307A patent/JPH0371660A/en active Pending
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