JPH0371623U - - Google Patents
Info
- Publication number
- JPH0371623U JPH0371623U JP13308789U JP13308789U JPH0371623U JP H0371623 U JPH0371623 U JP H0371623U JP 13308789 U JP13308789 U JP 13308789U JP 13308789 U JP13308789 U JP 13308789U JP H0371623 U JPH0371623 U JP H0371623U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- boat
- semiconductor wafers
- surface area
- increased
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13308789U JPH0371623U (de) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13308789U JPH0371623U (de) | 1989-11-17 | 1989-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371623U true JPH0371623U (de) | 1991-07-19 |
Family
ID=31680503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13308789U Pending JPH0371623U (de) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371623U (de) |
-
1989
- 1989-11-17 JP JP13308789U patent/JPH0371623U/ja active Pending