JPH0371403A - Ring head - Google Patents

Ring head

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Publication number
JPH0371403A
JPH0371403A JP20634189A JP20634189A JPH0371403A JP H0371403 A JPH0371403 A JP H0371403A JP 20634189 A JP20634189 A JP 20634189A JP 20634189 A JP20634189 A JP 20634189A JP H0371403 A JPH0371403 A JP H0371403A
Authority
JP
Japan
Prior art keywords
film
magnetic
iron
head
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20634189A
Other languages
Japanese (ja)
Inventor
Nobuyuki Ishiwata
延行 石綿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP20634189A priority Critical patent/JPH0371403A/en
Publication of JPH0371403A publication Critical patent/JPH0371403A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a ring head having a high saturation magnetization characteristic and a good soft magnetic characteristic by forming a gap with a magnetic film having in-plane uniaxial magnetic anisotropy, specifying the angle of an axis of easy magnetization of the magnetic film to the gap and connecting a soft magnetic material to the magnetic film to form the closed magnetic circuit of a core. CONSTITUTION:The first core obtained by sandwiching an iron film 10 between ceramic substrates 12 and 12 and the second core consisting of a ferrite 14 are bound together integrally to constitute a head. The iron film 10 has the in-plane uniaxial magnetic anisotropy exhibiting a excellent soft magnetic characteristic only in the axis of easy magnetization in the film plane, the easy axis is strictly symmetrical to the gap 18 between both left and right sides and formed along the main magnetic path in the iron film 10 as shown by the arrow M. The dotted arrow K shows the magnetic path in the ferrite 14 or its magnetization direction. As a result, a high-saturation magnetization head having a good soft magnetic characteristic is obtained.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、高密度磁気記録用のリング型ヘッドに関する
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a ring-shaped head for high-density magnetic recording.

[従来の技術] 最近の磁気記録技術においては記録媒体の高保持力化の
開発が進められ、それに対応するため磁気ヘッドに高飽
和磁化が要求されている。
[Prior Art] In recent magnetic recording technology, the development of higher coercivity of recording media is progressing, and in order to cope with this, high saturation magnetization is required of magnetic heads.

従来のリング型ヘッドは、フェライト、パーマロイ、セ
ンダスト等の軟磁性材でコアを構成している。これら磁
性材の飽和磁化は、それぞれ約5kG、7kG、10k
Gである。
A conventional ring-type head has a core made of a soft magnetic material such as ferrite, permalloy, or sendust. The saturation magnetization of these magnetic materials is approximately 5kG, 7kG, and 10k, respectively.
It is G.

[発明が解決しようとす6課M] しかしながら、10kG程度の飽和磁化では上記高飽和
磁化の要求を満足するものではない。出来れば20kG
程度の飽和磁化を有するヘッドが望まれる。もちろん、
ヘッドとして良好な軟磁気特性も備えたものでなければ
ならない。
[Lesson 6 M that the invention seeks to solve] However, saturation magnetization of about 10 kG does not satisfy the above-mentioned requirement for high saturation magnetization. 20kG if possible
A head with a certain degree of saturation magnetization is desired. of course,
The head must also have good soft magnetic properties.

本発明は、かかる問題点に鑑みてなされたもので、新規
な磁性材を利用してヘッド構造に工夫をこらすことによ
り高飽和磁化特性と良好な軟磁気特性を備えたリング型
へノドを提供することを目的とする。
The present invention was made in view of these problems, and provides a ring-shaped nodlet with high saturation magnetization characteristics and good soft magnetic characteristics by using a new magnetic material and devising a head structure. The purpose is to

[課題を解決するための手段] 上記の目的を達成するため、本発明のリング型ヘッドは
、面内を軸磁気異方性を有する磁性膜でギャップを形成
し、かつ磁性膜の磁化容易軸をギャップに対して所定の
向きとし、コアの閉磁路を形成するようフェライトまた
はセンダスト等の軟磁性体を磁性膜に接続してなる構成
とした。
[Means for Solving the Problems] In order to achieve the above object, the ring type head of the present invention has a gap formed in the plane by a magnetic film having axial magnetic anisotropy, and an axis of easy magnetization of the magnetic film. is oriented in a predetermined direction with respect to the gap, and a soft magnetic material such as ferrite or sendust is connected to the magnetic film to form a closed magnetic path of the core.

上記磁性膜の磁化容易軸の好ましい方向としては、ギヤ
、ブを中心としてその両側間で磁化容易軸が対称となる
ような構成とする。
A preferable direction of the axis of easy magnetization of the magnetic film is such that the axis of easy magnetization is symmetrical between both sides of the gear and the hub.

上記磁性膜の材質としては、鉄膜または鉄を母材として
Sit At、Gap Ge、Be C+ Nのうちの
少なくとも1種類、あるいは鉄以外の遷移金属元素のう
ちの少なくとも1種類の元素を1at%以上含む金属膜
とする。
The material of the magnetic film is an iron film or an iron base material containing 1 at% of at least one of Sit At, Gap Ge, Be C+ N, or at least one of transition metal elements other than iron. A metal film containing the above.

また、より優れた高周波特性を得るには、上記磁性膜を
、上記鉄膜または金属膜とセラミック層との積層構造と
すればよい。
Further, in order to obtain better high frequency characteristics, the magnetic film may have a laminated structure of the iron film or metal film and a ceramic layer.

〔作用コ 面内1軸磁気異方性を有する磁性膜は、膜面内の特定の
1方向(磁化容易軸)においてのみ優れた軟磁気特性を
示す。その磁化容易軸がギャップに対して所定の方向、
例えば両側で対称になるように構成されるので、コア全
体としても良好な軟磁気特性が得られる。
[A magnetic film having uniaxial in-plane magnetic anisotropy exhibits excellent soft magnetic properties only in one specific direction (axis of easy magnetization) within the film plane. Its axis of easy magnetization is in a predetermined direction with respect to the gap,
For example, since the core is configured to be symmetrical on both sides, good soft magnetic properties can be obtained for the core as a whole.

このような磁性膜の材質として、鉄または鉄を母材とし
てSit AI+ Gap Get B+ C+ Nの
うちの少なくとも1[類、あるいは鉄以外の遷移金属元
素のうちの少なくとも1種類の元素を1at%以上含む
金属膜とすると、特に高い飽和磁化(約20kG)を有
し、かつ軟磁気特性の良好なヘッドが得られる。
As the material of such a magnetic film, iron or iron is used as a base material, and at least one of Sit AI+ Gap Get B+ C+ N, or at least one element of transition metal elements other than iron is contained at 1 at% or more. If a metal film is used, a head with particularly high saturation magnetization (approximately 20 kG) and good soft magnetic properties can be obtained.

また、そのような鉄膜または金属膜とセラミック層との
積層構造にすると、高周波でも渦電流が流れにくくなり
、無駄な電流損失が減少するとともに、高周波特性が向
上する。
Moreover, when such a laminated structure of an iron film or a metal film and a ceramic layer is used, eddy currents are difficult to flow even at high frequencies, wasteful current loss is reduced, and high frequency characteristics are improved.

[実施例] 以下、添付図を参照して本発明の詳細な説明する。[Example] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

先ず、第1図ないし第7図につき幾つかの実施例による
リング型ヘッドの構造および作用を説明する。
First, the structure and operation of ring-shaped heads according to some embodiments will be explained with reference to FIGS. 1 to 7.

第1図は第1の実施例によるリング型ヘッドの構造を示
す。(イ)は上面図、(a)は正面図、(ハ)は側面図
である。このヘッドは、鉄膜10をセラミ’7り基板1
2.12で挟んだサンドイッチ型の第1のコア部と、フ
ェライト14からなる第2のコア部とを一体的に結合し
てなる構造である。コイル16は第1のコア部に巻かれ
る。
FIG. 1 shows the structure of a ring-shaped head according to a first embodiment. (a) is a top view, (a) is a front view, and (c) is a side view. This head consists of an iron film 10 and a ceramic substrate 1.
It has a structure in which a sandwich-type first core part sandwiched by 2.12 and a second core part made of ferrite 14 are integrally joined. Coil 16 is wound around the first core portion.

鉄gtoは、膜面内の特定の1方向(磁化容易軸)にの
み優れた軟磁気特性を示す面内1軸磁気異方性を有する
。この磁化容易軸は、ギャップ18に対して両側(左右
)間で厳密に対称で、好ましくは第2図の矢印Mで示す
ような鉄膜10内の主磁路に沿った方向に選ばれる。点
線の矢印にはフェライト14内の磁路または磁化方向を
示す。
Iron GTO has in-plane uniaxial magnetic anisotropy that exhibits excellent soft magnetic properties only in one specific direction within the film plane (the axis of easy magnetization). This axis of easy magnetization is strictly symmetrical between both sides (left and right) with respect to the gap 18, and is preferably selected in a direction along the main magnetic path in the iron film 10 as shown by arrow M in FIG. Dotted arrows indicate magnetic paths or magnetization directions within the ferrite 14.

なお、第2図では、セラミック基板12.12とコイル
16を説明の便宜上から省いている。
In addition, in FIG. 2, the ceramic substrate 12.12 and the coil 16 are omitted for convenience of explanation.

第3図は鉄膜10の磁化曲線を示す。曲線20が磁化容
易軸の方向における磁化曲線で、図示のように保磁力の
小さく立ち上がりの急使な優れた軟磁気特性を示す。こ
れに対し、曲線22は磁化容易軸方向に垂直な方向にお
ける磁気曲線で、これは保磁力が大きくて立ち上がりが
鈍く、良好な軟磁気特性とはいえない。他の方向では、
これら2つの曲線20.22の中間の特性を示す磁化曲
線が得られる。
FIG. 3 shows the magnetization curve of the iron film 10. Curve 20 is a magnetization curve in the direction of the easy axis of magnetization, and as shown, it exhibits excellent soft magnetic properties with a small coercive force and a rapid rise. On the other hand, curve 22 is a magnetic curve in the direction perpendicular to the axis of easy magnetization, which has a large coercive force and a slow rise, and cannot be said to have good soft magnetic properties. In the other direction,
A magnetization curve having characteristics intermediate between these two curves 20 and 22 is obtained.

第4図は、本実施例ヘッドおよび従来のフェライト製ヘ
ッドのオーバライド特性を比較したものである。このオ
ーバライド特性は、保磁力IEioooe(エルステッ
ド)の磁気テープ上に、それぞれのヘッドで先ずIMH
zの信号を記録し、次に5MHzの信号を道ねて記録し
、しかる後に再生でIMHzの信号がノイズとしてどの
程度現れるか(つまり消し残りがどの程度あるのか)を
調べたものである。図中、曲線24が本実施例へノドに
よるもの、曲線26が従来のフェライト製へノドによる
ものであり、前者(本実施例ヘッド)のオーバライド特
性は後者(従来ヘッド)のそれに比して大幅に優れてい
ることがわかる。
FIG. 4 compares the override characteristics of the head of this embodiment and a conventional ferrite head. This override characteristic is based on the magnetic tape with coercive force IEioooe (Oersted).
A 5 MHz signal was recorded, and then a 5 MHz signal was recorded, and the extent to which the I MHz signal appeared as noise during playback (that is, how much was left unerased) was investigated. In the figure, curve 24 is due to the groove in this embodiment, and curve 26 is due to the conventional ferrite groove, and the override characteristic of the former (head of this embodiment) is significantly greater than that of the latter (conventional head). It can be seen that it is excellent.

第5図は第2の実施例によるヘッド構造を示す図で、(
イ)は上面図、(0は正面図、(ハ)は側面図である。
FIG. 5 is a diagram showing the head structure according to the second embodiment.
A) is a top view, (0 is a front view, and (C) is a side view.

このヘッドの第1および第2のコア部は、それぞれ上記
第1実施例のヘッドの第1および第2のコア部と同様な
材質である。しかし、第1実施例ではテープ摺動面19
の全面を第1のコア部で形成したのに対して、この第2
の実施例ではテープ摺動面19′の中心部だけを第1の
コア部で形成し、テープ摺動面19′の両端部は第2の
コア部(フェライト14゛)で形成する。したがって、
第1のコア部はギャップの周りの小部分だけを構成し、
第2のコア部のフェライトがヘッドの大部分を占める。
The first and second core portions of this head are made of the same material as the first and second core portions of the head of the first embodiment, respectively. However, in the first embodiment, the tape sliding surface 19
was formed entirely by the first core part, whereas this second core part was formed entirely by the first core part.
In this embodiment, only the center portion of the tape sliding surface 19' is formed of the first core portion, and both ends of the tape sliding surface 19' are formed of the second core portion (ferrite 14'). therefore,
The first core portion constitutes only a small portion around the gap;
The ferrite in the second core occupies most of the head.

また、コイル16゛は第2のコア部に巻かれる。The coil 16' is also wound around the second core portion.

かかるヘッド構造に対応し、面内1軸磁気異方性を有す
る鉄膜10”において、磁化容易軸は第6図の矢印りで
示すように、ギャップ18゛に対して直角な主磁路の方
向(両側間で対称)に選ばれる。これにより、このヘッ
ドでも、鉄膜10′の高飽和磁化(約21 kG)と優
れた軟磁気特性が効果的に作用し、第1実施例のヘッド
と同等の性能が得られる。
Corresponding to such a head structure, in an iron film 10" having in-plane uniaxial magnetic anisotropy, the axis of easy magnetization is located along the main magnetic path perpendicular to the gap 18", as shown by the arrow in FIG. As a result, the high saturation magnetization (approximately 21 kG) and excellent soft magnetic properties of the iron film 10' work effectively in this head, and the head of the first embodiment The same performance can be obtained.

第7図は第3の実施例による薄膜ヘッド構造を示す側面
図である。このヘッドは面内1軸磁気異方性を有する鉄
膜10”とパーマロイ14″とでギャップを形成するよ
うにしたもので、鉄膜10”内の磁化容易軸は矢印Hで
示すような磁路の方向に選ばれる。
FIG. 7 is a side view showing a thin film head structure according to a third embodiment. This head is designed to form a gap between an iron film 10" having in-plane uniaxial magnetic anisotropy and a permalloy 14", and the axis of easy magnetization within the iron film 10" is aligned with the magnetic field shown by arrow H. The direction of the road is selected.

次に、第8図ないし第13図につき上記実施例で用いた
鉄膜10(10’、10”)およびコアの製造方法の一
例を説明する。
Next, an example of a method for manufacturing the iron film 10 (10', 10'') and core used in the above embodiment will be explained with reference to FIGS. 8 to 13.

第8図は実施例による鉄膜の製造に使用するスパッタ条
件のターゲットおよび基板構成を示す。
FIG. 8 shows the target and substrate configurations under sputtering conditions used to manufacture the iron film according to the example.

このスパツク装置の特徴は、基板20の両側にターゲッ
ト(鉄)の板22.22を配置した点にある。このよう
な対向ターゲット式スバ・ノタ装置により、第10図に
示すようなスパッタ条件にした5 かい、結晶化ガラス基板(膨張率α: 1.45X 1
0 )20上に鉄膜を蒸着する。鉄膜形成の後、第11
図に示す熱処理条件にしたがい、第9図に示す炉内で、
基板20上の鉄膜(試料)36を所定時間回転させなが
ら熱処理を施す。第9図において、34はヒータ、38
は磁石、40はロータリ・ポンプ、42は油拡散ポンプ
、44は液体窒素タンクである。
A feature of this spacing device is that target (iron) plates 22, 22 are placed on both sides of the substrate 20. Using such a facing target type Suba-Nota apparatus, a crystallized glass substrate (expansion coefficient α: 1.45×1) was prepared under the sputtering conditions shown in FIG.
0) Deposit an iron film on 20. After iron film formation, the 11th
According to the heat treatment conditions shown in the figure, in the furnace shown in Figure 9,
Heat treatment is performed while rotating the iron film (sample) 36 on the substrate 20 for a predetermined period of time. In FIG. 9, 34 is a heater, 38
40 is a rotary pump, 42 is an oil diffusion pump, and 44 is a liquid nitrogen tank.

以上のようなスパッタおよび熱処理の結果、鉄膜36に
おいて、上記スパッタのターゲット水平方向に磁界を印
加した場合(磁化測定の磁界が第8図の矢印Jの方向)
では第3図の曲線20のような軟磁気特性の優れた磁化
曲線が得られ、その磁界印加方向に垂直な方向(ターゲ
ット垂直方向)では第3図の曲線20で示すような磁化
曲線が得られる。
As a result of the above sputtering and heat treatment, when a magnetic field is applied in the horizontal direction of the sputtering target in the iron film 36 (the magnetic field for magnetization measurement is in the direction of arrow J in FIG. 8).
In this case, a magnetization curve with excellent soft magnetic properties such as curve 20 in Fig. 3 is obtained, and in a direction perpendicular to the direction of magnetic field application (direction perpendicular to the target), a magnetization curve as shown in curve 20 in Fig. 3 is obtained. It will be done.

第12図は、上記の製造方法で得られる鉄膜の保持力H
cの膜厚依存性を示す。図示のように、磁化容易軸方向
では膜厚3μm以上で保磁力HcはLOe以下になり、
その最小値は0.550eである。
Figure 12 shows the holding force H of the iron film obtained by the above manufacturing method.
The film thickness dependence of c is shown. As shown in the figure, in the easy magnetization axis direction, the coercive force Hc becomes less than LOe when the film thickness is 3 μm or more.
Its minimum value is 0.550e.

第13図は、実施例へノド・コアの製造プロセスを示す
。先ず、工程■では上記鉄膜製造方法によって基板50
上に鉄膜を形成し、この鉄膜の形成された鉄膜50と鉄
膜の形成されていない鉄膜50′の表面に溶着ガラス5
2.52をスパツクに形成し、圧着器54により互いに
圧着せしめ、N2ガス中にて熱を加え、両者50.50
”を−体のもの(56)とする。次に、工程■でこの鉄
膜56を所定の寸法のもの(58,58)にスライスし
、各々にコイル装着用の溝60.EiOを形成し、鏡面
研磨を施す。次に、工程■で一対の鉄膜片(58,58
)を合わせて両者をガラス62で溶着する。次に、工程
■でフェライト片40を接合し、工程■で所定の厚みに
スライスすると1個のコアの主体42が出来上がる。こ
の主体42にコイルを巻くと、コアが完成する。
FIG. 13 shows the manufacturing process of the throat core according to the example. First, in step (2), the substrate 50 is fabricated by the above iron film manufacturing method.
An iron film is formed on the surface of the iron film 50 on which the iron film is formed and the iron film 50' on which the iron film is not formed.
2.52 into spacks, crimped them together using a crimper 54, and heated them in N2 gas to make both 50.50
” is a negative body (56).Next, in step (2), this iron film 56 is sliced into pieces (58, 58) of a predetermined size, and a groove 60.EiO for installing a coil is formed in each piece. , mirror polishing is applied.Next, in step 2, a pair of iron film pieces (58, 58
) and weld them together with glass 62. Next, in step (2), the ferrite pieces 40 are joined, and in step (2), they are sliced to a predetermined thickness to complete one core main body 42. A core is completed by winding a coil around this main body 42.

なお、上述した実施例では、鉄膜で面内l軸磁気異方性
を有する磁性膜を構成したが、鉄を母材としてSit 
All Gal Get BI CI Nのうちの少な
くとも1種類の元素あるいは、鉄以外の遷移金属元素を
少なくとも1種類の元素をfat%以上含む金属膜でも
同様な面内裏軸磁気異方性を有する磁性膜を構成するこ
とが可能である。また、鉄膜または上記金属膜とセラミ
ック層との積層構造とすることで、渦電流損を少なくシ
、高周波特性を向上させることができる。また、フェラ
イトに代えて、センダストやパーマロイ等の他の軟磁性
材を使うことも可能である。
In the above-mentioned embodiment, the magnetic film having in-plane l-axis magnetic anisotropy was made of an iron film, but Si
All Gal Get BI CI A magnetic film having similar in-plane back-axis magnetic anisotropy can also be obtained even if it is a metal film containing fat% or more of at least one type of element among N or at least one type of transition metal element other than iron. It is possible to configure Further, by forming a laminated structure of an iron film or the metal film described above and a ceramic layer, it is possible to reduce eddy current loss and improve high frequency characteristics. Further, instead of ferrite, it is also possible to use other soft magnetic materials such as sendust and permalloy.

[発明の効果] 本発明は、上述したような構成を有することにより、次
のような効果を奏する。
[Effects of the Invention] By having the above-described configuration, the present invention provides the following effects.

請求項1のリング型ヘッドによれば、市内1軸磁気異方
性を有する磁性膜をコアでギャップを形成し、その磁化
容易軸を所定の向きとし、この磁性体にフェライト等の
通常の軟磁性体を接続して一体的なコアとすることで、
良好な軟磁気特性を備えた高飽和磁化ヘッドが得られる
According to the ring type head of claim 1, a magnetic film having uniaxial magnetic anisotropy is formed with a core to form a gap, the axis of easy magnetization is oriented in a predetermined direction, and this magnetic material is coated with a normal material such as ferrite. By connecting soft magnetic materials to form an integrated core,
A high saturation magnetization head with good soft magnetic properties can be obtained.

請求項2のリング型ヘッドによれば、磁性膜の磁化容易
軸をギャップを中心に両側間で対称となるように配向せ
しめることにより、磁性膜の軟磁気特性を有効に発揮さ
せるヘッドが得られる。
According to the ring type head of claim 2, by orienting the axis of easy magnetization of the magnetic film so that it is symmetrical between both sides with the gap as the center, a head that effectively exhibits the soft magnetic properties of the magnetic film can be obtained. .

請求項3のリング型ヘッドによれば、市内1軸磁気異方
性を有する磁性膜の材質として、鉄または鉄を母材とし
てSir All Gal Ges B。
According to the ring type head of claim 3, the material of the magnetic film having inner uniaxial magnetic anisotropy is iron or Sir All Gal Ges B with iron as the base material.

C,Nのうちの少なくとも1種類の元素あるいは鉄以外
の遷移金属のうちから少なくとも1種類の元素をfat
%以上含む金属膜とすることで、特に高い飽和磁化を有
するヘッドが得られる。
At least one element among C and N or at least one element among transition metals other than iron is added in fat.
% or more, a head with particularly high saturation magnetization can be obtained.

請求項4のリング型ヘッドによれば、請求項3の鉄膜ま
たは金属膜をセラミック層との積層構造とすることで、
渦電流が流れにくくシ、電流損失が少なく高周波特性の
良好なヘッドが得られる。
According to the ring-shaped head of claim 4, the iron film or metal film of claim 3 has a laminated structure with a ceramic layer.
A head with good high-frequency characteristics with less eddy current flow and less current loss can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の第1の実施例によるリング型へノド
の構造を示す図、 第2図は、第1図のヘッドの作用を説明するための図、 第3図は、実施例による鉄膜の磁化特性を示す図、 第4図は、実施例によるヘッドおよび従来ヘッドのそれ
ぞれのオーバライド特性を示す図、第5図は、本発明の
第2の実施例によるリング型ヘッドの構造を示す図、 第6図は、第5図のヘッドの作用を説明するための図、 第7図は、本発明の第3の実施例によるリング型薄膜へ
ノドの構造を示す図、 第8図は、本発明の一実施例によるスパッタ装置の主要
な構成を示す図、 第9図は、本発明の一実施例による熱処理装置の構成を
示す図、 第10図は、実施例のスパッタ条件を示す図、第11図
は、実施例の熱処理条件を示す図、第12図は、実施例
による鉄膜の保磁力の膜厚依存性を示す図、 第13図は、実施例によるヘッド・コ、アの製造プロセ
スを示す図である。 10.10’、10”・・・・鉄膜、 14.14’・・・・フェライト、14”・・・・パー
マロイ18.18’   18”・・・・ギャップ、3
0・・・・結晶ガラス基板、 32・・・・ターゲット、 34・・・・ヒータ、 36・・・・試料(鉄膜)、 38・・・・磁石、 40・・・・ロータリ・ポンプ、 42・・・・油拡散ポンプ。 Cイ) 第1図 第2図 第5図 第8図 30 第10図 (スハ0ツタ条イ牛) (熱処理条イ牛) 第セ図 第13図
FIG. 1 is a diagram showing the structure of a ring-shaped hennode according to a first embodiment of the present invention, FIG. 2 is a diagram for explaining the operation of the head in FIG. 1, and FIG. 3 is an embodiment of the present invention. FIG. 4 is a diagram showing the override characteristics of the head according to the embodiment and the conventional head, and FIG. 5 is the structure of the ring-shaped head according to the second embodiment of the present invention. FIG. 6 is a diagram for explaining the operation of the head in FIG. 5. FIG. 7 is a diagram showing the structure of the ring-shaped thin film nozzle according to the third embodiment of the present invention. 9 is a diagram showing the main structure of a sputtering apparatus according to an embodiment of the present invention. FIG. 9 is a diagram showing the structure of a heat treatment apparatus according to an embodiment of the present invention. FIG. 10 is a diagram showing the sputtering conditions of the embodiment. FIG. 11 is a diagram showing the heat treatment conditions of the example. FIG. 12 is a diagram showing the film thickness dependence of the coercive force of the iron film according to the example. FIG. It is a figure showing the manufacturing process of (a) and (a). 10.10', 10"... Iron film, 14.14'... Ferrite, 14"... Permalloy 18.18'18"... Gap, 3
0... Crystal glass substrate, 32... Target, 34... Heater, 36... Sample (iron film), 38... Magnet, 40... Rotary pump, 42...Oil diffusion pump. C) Figure 1 Figure 2 Figure 5 Figure 8 Figure 30 Figure 10 (Suha 0 ivy row beef) (Heat-treated row beef) Figure C Figure 13

Claims (4)

【特許請求の範囲】[Claims] (1)面内1軸磁気異方性を有する磁性膜でギャップを
形成し、かつ前記磁性膜の磁化容易軸を前記ギャップに
対して所定の向きとし、コアの閉磁路を形成するようフ
ェライトまたはセンダスト等の軟磁性体を前記磁性膜に
接続してなることを特徴とするリング型磁気ヘッド。
(1) A gap is formed with a magnetic film having in-plane uniaxial magnetic anisotropy, and the axis of easy magnetization of the magnetic film is oriented in a predetermined direction with respect to the gap, and a closed magnetic path of the core is formed using ferrite or A ring-shaped magnetic head characterized in that a soft magnetic material such as sendust is connected to the magnetic film.
(2)前記磁性膜の磁化容易軸の方向は前記ギャップを
中心として両側で対称であることを特徴とする請求項1
記載のリング型ヘッド。
(2) The direction of the axis of easy magnetization of the magnetic film is symmetrical on both sides with the gap as the center.
Ring-shaped head as described.
(3)前記磁性膜は、鉄膜または鉄を母材としてSi、
Al、Ga、Ge、B、C、Nのうちの少なくとも1種
類の元素か、あるいは鉄以外の遷移金属元素のうちの少
なくとも1種類の元素を1at%以上含む金属膜からな
ることを特徴とする請求項1記載のリング型ヘッド。
(3) The magnetic film is an iron film or Si using iron as a base material.
It is characterized by being made of a metal film containing 1 at% or more of at least one element among Al, Ga, Ge, B, C, and N, or at least one element among transition metal elements other than iron. A ring-shaped head according to claim 1.
(4)前記磁性膜は、請求項3記載の鉄膜または金属膜
とセラミック層との積層構造を有することを特徴とする
請求項1記載のリング型ヘッド。
(4) The ring-shaped head according to claim 1, wherein the magnetic film has a laminated structure of the iron film or metal film according to claim 3 and a ceramic layer.
JP20634189A 1989-08-09 1989-08-09 Ring head Pending JPH0371403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20634189A JPH0371403A (en) 1989-08-09 1989-08-09 Ring head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20634189A JPH0371403A (en) 1989-08-09 1989-08-09 Ring head

Publications (1)

Publication Number Publication Date
JPH0371403A true JPH0371403A (en) 1991-03-27

Family

ID=16521697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20634189A Pending JPH0371403A (en) 1989-08-09 1989-08-09 Ring head

Country Status (1)

Country Link
JP (1) JPH0371403A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5604045A (en) * 1992-10-13 1997-02-18 Matsushita Electric Industrial Co., Ltd. Magnetic head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5604045A (en) * 1992-10-13 1997-02-18 Matsushita Electric Industrial Co., Ltd. Magnetic head

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