JPH037028B2 - - Google Patents

Info

Publication number
JPH037028B2
JPH037028B2 JP18590283A JP18590283A JPH037028B2 JP H037028 B2 JPH037028 B2 JP H037028B2 JP 18590283 A JP18590283 A JP 18590283A JP 18590283 A JP18590283 A JP 18590283A JP H037028 B2 JPH037028 B2 JP H037028B2
Authority
JP
Japan
Prior art keywords
cryopanel
louver
cryopump
blind
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18590283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6079183A (ja
Inventor
Yoshinao Sanada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP18590283A priority Critical patent/JPS6079183A/ja
Publication of JPS6079183A publication Critical patent/JPS6079183A/ja
Publication of JPH037028B2 publication Critical patent/JPH037028B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP18590283A 1983-10-06 1983-10-06 クライオポンプ Granted JPS6079183A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18590283A JPS6079183A (ja) 1983-10-06 1983-10-06 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18590283A JPS6079183A (ja) 1983-10-06 1983-10-06 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS6079183A JPS6079183A (ja) 1985-05-04
JPH037028B2 true JPH037028B2 (enrdf_load_stackoverflow) 1991-01-31

Family

ID=16178876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18590283A Granted JPS6079183A (ja) 1983-10-06 1983-10-06 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS6079183A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083445A (en) * 1989-01-20 1992-01-28 Hitachi, Ltd. Cryopump
US6920789B2 (en) 2002-07-01 2005-07-26 Yokio Sakai System for watching and forecasting changes in natural phenomena and weather based on sounds from the earth
JP5669895B2 (ja) * 2013-07-22 2015-02-18 住友重機械工業株式会社 クライオポンプ及びその製造方法

Also Published As

Publication number Publication date
JPS6079183A (ja) 1985-05-04

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