JPH037028B2 - - Google Patents
Info
- Publication number
- JPH037028B2 JPH037028B2 JP18590283A JP18590283A JPH037028B2 JP H037028 B2 JPH037028 B2 JP H037028B2 JP 18590283 A JP18590283 A JP 18590283A JP 18590283 A JP18590283 A JP 18590283A JP H037028 B2 JPH037028 B2 JP H037028B2
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- louver
- cryopump
- blind
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 10
- 238000005086 pumping Methods 0.000 description 10
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18590283A JPS6079183A (ja) | 1983-10-06 | 1983-10-06 | クライオポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18590283A JPS6079183A (ja) | 1983-10-06 | 1983-10-06 | クライオポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6079183A JPS6079183A (ja) | 1985-05-04 |
JPH037028B2 true JPH037028B2 (enrdf_load_stackoverflow) | 1991-01-31 |
Family
ID=16178876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18590283A Granted JPS6079183A (ja) | 1983-10-06 | 1983-10-06 | クライオポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6079183A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5083445A (en) * | 1989-01-20 | 1992-01-28 | Hitachi, Ltd. | Cryopump |
US6920789B2 (en) | 2002-07-01 | 2005-07-26 | Yokio Sakai | System for watching and forecasting changes in natural phenomena and weather based on sounds from the earth |
JP5669895B2 (ja) * | 2013-07-22 | 2015-02-18 | 住友重機械工業株式会社 | クライオポンプ及びその製造方法 |
-
1983
- 1983-10-06 JP JP18590283A patent/JPS6079183A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6079183A (ja) | 1985-05-04 |
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