JPH0369867B2 - - Google Patents

Info

Publication number
JPH0369867B2
JPH0369867B2 JP13803682A JP13803682A JPH0369867B2 JP H0369867 B2 JPH0369867 B2 JP H0369867B2 JP 13803682 A JP13803682 A JP 13803682A JP 13803682 A JP13803682 A JP 13803682A JP H0369867 B2 JPH0369867 B2 JP H0369867B2
Authority
JP
Japan
Prior art keywords
molded body
ceramic
metal
ceramic molded
binder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13803682A
Other languages
Japanese (ja)
Other versions
JPS5930782A (en
Inventor
Nobuyuki Mizunoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP13803682A priority Critical patent/JPS5930782A/en
Publication of JPS5930782A publication Critical patent/JPS5930782A/en
Publication of JPH0369867B2 publication Critical patent/JPH0369867B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Welding/Diffusion-Bonding (AREA)
  • Laminated Bodies (AREA)
  • Ceramic Products (AREA)

Description

【発明の詳細な説明】 [発明の技術分野] 本発明はフレーム状のセラミツクス−金属複合
体の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for manufacturing a frame-shaped ceramic-metal composite.

[発明の技術的背景とその問題点] 従来より電気機器その他の用途に矩形もしくは
円形のセラミツクス−金属複合体が使用されてい
る。
[Technical background of the invention and its problems] Rectangular or circular ceramic-metal composites have been used in electrical equipment and other applications.

このようなフレーム状のセラミツクス−金属複
合体を製造するには、粉末状のアルミナ、窒化け
い素等のセラミツクスを少量の有機バインダを用
いて金型によりフレーム状に圧縮成形して焼成す
るか、あるいは板状に圧縮成形し、その後中央部
をくりぬいてフレーム状とし、これを焼成してま
ずフレーム状のセラミツクス成形体を製造し、こ
れにメタライズ処理を施してニツケルめつきによ
りフレーム状の金属部材をろう付けして接合する
方法がとられている。
In order to manufacture such a frame-shaped ceramic-metal composite, a ceramic such as powdered alumina or silicon nitride is compressed into a frame shape using a mold using a small amount of organic binder, and then fired. Alternatively, it is compression molded into a plate shape, then hollowed out in the center to form a frame shape, and fired to produce a frame-shaped ceramic molded body, which is then subjected to metallization treatment and nickel plated to form a frame-shaped metal member. A method of joining by brazing is used.

このような方法においては、特に厚さの薄いフ
レーム状のセラミツクス−金属複合体を製造する
場合は、成形時にセラミツクス成形体の強度が不
充分であつて壊れ易いとともに焼成工程での収縮
等によりセラミツクス成形体がねじれたりあるい
は角部が丸く変形するという難点があつた。
In such a method, especially when producing a thin frame-shaped ceramic-metal composite, the strength of the ceramic molded body during molding is insufficient and it is easily broken, and the ceramic molded body may shrink due to shrinkage during the firing process. There were problems in that the molded product was twisted or the corners were deformed into rounded shapes.

また、たとえ良好な形状のセラミツクス成形体
が得られても金属部材とのろう付け時の高温によ
り変形し易いという難点があつた。
Further, even if a ceramic molded body with a good shape is obtained, there is a problem in that it is easily deformed due to the high temperature during brazing with a metal member.

[発明の目的] 本発明はこのような問題のない、すなわち成形
時の破損や焼成時および金属部材との接合時に変
形のないフレーム状セラミツクス−金属複合体を
製造する方法を提供することを目的とする。
[Object of the Invention] The object of the present invention is to provide a method for manufacturing a frame-shaped ceramic-metal composite that does not have such problems, that is, does not suffer from breakage during molding or deformation during firing and joining with metal members. shall be.

[発明の概要] すなわち本発明方法は、有底セラミツクス成形
体を用意し、これを焼成した後その上面に金属部
材を接合し、しかる後その底部を除去することを
特徴とする。
[Summary of the Invention] That is, the method of the present invention is characterized in that a bottomed ceramic molded body is prepared, a metal member is bonded to the top surface of the ceramic molded body after firing the body, and then the bottom portion is removed.

本発明に使用するセラミツク成形体としては、
二酸化けい素、アルミナ、窒化けい素等があげら
れる。
The ceramic molded body used in the present invention includes:
Examples include silicon dioxide, alumina, and silicon nitride.

本発明に使用する金属部材としては、銅、鉄、
クロム、ニツケル、モリブデン、銀、コバルト、
アルミニウム等の単体、合金あるいは混合物があ
げられ、その形状はセラミツクス成形体の接合面
に適合する形状とする。
Metal members used in the present invention include copper, iron,
Chromium, nickel, molybdenum, silver, cobalt,
It may be made of a single substance such as aluminum, an alloy, or a mixture thereof, and its shape should be adapted to the joint surface of the ceramic molded body.

次に本発明方法を図面を参照に説明する。 Next, the method of the present invention will be explained with reference to the drawings.

まず、第1図aに示すように、焼成前のセラミ
ツクス成形体の上面に、周縁に所定の幅l1,l2
縁部が形成されるように上面中央部を一定深さd
まで切削して有底セラミツクス成形体1を成形
し、この有底セラミツクス成形体1を焼成した
後、セラミツクス成形体の上面にフレーム状の金
属部材2を接合させる。
First, as shown in Fig. 1a, the central part of the upper surface is cut to a certain depth d so that edges with predetermined widths l 1 and l 2 are formed on the periphery of the upper surface of the ceramic molded body before firing.
After cutting to the bottom to form a bottomed ceramic molded body 1, and firing the bottomed ceramic molded body 1, a frame-shaped metal member 2 is joined to the upper surface of the ceramic molded body.

次に第1図bに示すように、有底セラミツクス
成形体1の胴部を深さdの位置Eで底面と平行に
切断して底部3を除去することにより、第1図c
に見られる本発明のセラミツクス−金属複合体が
得られる。
Next, as shown in FIG. 1b, the body of the bottomed ceramic molded body 1 is cut parallel to the bottom surface at a depth d, and the bottom portion 3 is removed.
The ceramic-metal composite of the present invention as seen in FIG.

なお有底セラミツクス成形体の底部は部分的に
貫通する孔を有していてもよい。ここでいう底部
は焼成工程において縁部の変形を防止する強度を
有していればよい。
Note that the bottom of the bottomed ceramic molded body may have a partially penetrating hole. The bottom part here only needs to have enough strength to prevent the edge part from being deformed during the firing process.

また金属部材と接合させる前のセラミツクス成
形体を第2図aに示すように、セラミツクス成形
体の上面に全周にわたつて所定深さdの溝5をエ
ンドミル等で切削し、焼成した後金属部材を接合
することもできる。この場合は第2図bに示すよ
うに、溝の深さの位置Eで底面と平行に切断して
底部3と中央部6とを除去するようにしてセラミ
ツクス−金属複合体が得られる。
In addition, as shown in FIG. 2a, the ceramic molded body before being joined to a metal member is cut with an end mill or the like to cut a groove 5 of a predetermined depth d over the entire circumference on the upper surface of the ceramic molded body. It is also possible to join the parts together. In this case, as shown in FIG. 2b, a ceramic-metal composite is obtained by cutting parallel to the bottom surface at position E at the depth of the groove and removing the bottom portion 3 and central portion 6.

第3図は縁部から延在するリブを有するセラミ
ツクス−金属複合体を示す斜視図である。なおセ
ラミツクス成形体と金属部材との接合方法として
は、あらかじめセラミツクス成形体の上面をメタ
ライズ処理し、ニツケルめつきして金属部材をろ
う付けする方法をとることもできるが、次の方法
により直接セラミツクス成形体と金属部材を接合
するのが望ましい。
FIG. 3 is a perspective view of a ceramic-metal composite with ribs extending from the edges. As a method for joining the ceramic molded body and the metal member, it is also possible to metalize the top surface of the ceramic molded body in advance, plate it with nickel, and braze the metal member, but the following method can be used to directly bond the ceramic body It is desirable to join the molded body and the metal member.

すなわち金属部材を酸素等の結合剤で表面処理
するか、あるいは金属部材に結合剤を含有させ
て、これをセラミツクス成形体に接触配置させ、
窒素ガス等の不活性ガス中で加熱する方法、また
は結合剤を含有しない、あるいは結合剤で処理さ
れていない金属部材を使用する場合は、金属部材
をセラミツクス成形体と接触配置して結合剤を含
むガス雰囲気中で加熱する方法が望ましい。
That is, the metal member is surface-treated with a binder such as oxygen, or the metal member is made to contain a binder, and this is placed in contact with the ceramic molded body.
When heating in an inert gas such as nitrogen gas, or when using a metal part that does not contain or has not been treated with a binder, the metal part is placed in contact with the ceramic molded body and the binder is applied. A method of heating in a gas atmosphere containing the above is desirable.

本発明に使用する結合剤は、金属との間に共晶
合金を生成するものであり、酸素、いおう、り
ん、けい素等があげられる。これらはセラミツク
ス成形体と金属のそれぞれの種類および組合せに
応じて適宜選択する。例えば金属が銅、鉄、クロ
ムの場合は、結合剤としては酸素、いおうが適し
ており、アルミニウムの場合はけい素が適してい
る。
The binder used in the present invention forms a eutectic alloy with the metal, and examples include oxygen, sulfur, phosphorus, and silicon. These are appropriately selected depending on the respective types and combinations of the ceramic molded body and the metal. For example, when the metal is copper, iron, or chromium, oxygen or sulfur is suitable as a binder, and when the metal is aluminum, silicon is suitable.

またセラミツクス成形体と金属部材とを接触さ
せて加熱する温度は金属の融点以下でかつ金属と
結合剤との共晶合金の共晶温度以上が適してい
る。例えば金属が銅で結合剤が酸素の場合は、銅
の融点(1083℃)以下、銅−酸化銅の共晶温度
(1065℃)以上である。
The temperature at which the ceramic molded body and the metal member are brought into contact and heated is preferably below the melting point of the metal and above the eutectic temperature of the eutectic alloy of the metal and the binder. For example, when the metal is copper and the binder is oxygen, the temperature is below the melting point of copper (1083°C) and above the eutectic temperature of copper-copper oxide (1065°C).

またセラミツクス成形体が窒化けい素等の非酸
化物系セラミツクスの場合は、セラミツクス成形
体をあらかじめ結合剤で表面処理あるいは結合剤
を含有させてから金属部材と接触させて加熱する
ことが望ましい。すなわち結合剤が酸素の場合、
セラミツク成形体を酸化処理するかあるいはセラ
ミツクス成形体に酸化物を含有させる。
Further, when the ceramic molded body is a non-oxide ceramic such as silicon nitride, it is desirable that the ceramic molded body is previously surface-treated with a binder or impregnated with a binder, and then brought into contact with a metal member and heated. That is, if the binder is oxygen,
The ceramic molded body is oxidized or the ceramic molded body is made to contain an oxide.

この直接接触させる方法が好ましい理由は、前
述したろう付け方法では少なくとも2回の熱処理
が必要であるのに対し、直接接合させる場合は1
回の熱処理で済むことによる。
The reason why this direct contact method is preferable is that the brazing method described above requires at least two heat treatments, whereas direct bonding requires one heat treatment.
This is because only one heat treatment is required.

[発明の実施例] 次に本発明の実施例について説明する。[Embodiments of the invention] Next, examples of the present invention will be described.

実施例 1 アルミナ90重量部、他にシリカ、カルシア、マ
グネシアを10重量部、バインダとしてポリビニル
アルコール樹脂を1重量部、パラフインワツクス
を5重量部混合し、平板状キヤビテイを有する金
型を用いて約1ton/cm2の圧力で圧縮成形し、80mm
×50mm×5mmの圧粉成形体を得た。
Example 1 90 parts by weight of alumina, 10 parts by weight of silica, calcia, and magnesia, 1 part by weight of polyvinyl alcohol resin as a binder, and 5 parts by weight of paraffin wax were mixed, and a mold having a flat cavity was used. Compression molded at a pressure of approximately 1 ton/cm 2 to 80 mm.
A powder compact measuring 50 mm x 5 mm was obtained.

これを幅l1=l2=2.5mmで、かつ深さd=4mmと
なるよう上面中央部を切削して第1図aに示す有
底セラミツクス成形体を形成した。
This was cut at the center of the upper surface so that width l 1 =l 2 =2.5 mm and depth d = 4 mm to form a bottomed ceramic molded body as shown in FIG. 1a.

これを1500℃で焼成した後、セラミツクス成形
体の上面に適合する形状の厚さ0.07mmのタフピツ
チ銅からなる銅箔をセラミツクス成形体の上面に
接触配置させ、窒素ガス雰囲気中で1075℃で10分
間加熱した。
After firing this at 1500°C, a copper foil made of tough pitch copper with a thickness of 0.07 mm and having a shape that fits the top surface of the ceramic molded body was placed in contact with the top surface of the ceramic molded body, and was heated at 1075°C for 10 minutes in a nitrogen gas atmosphere. Heated for minutes.

ほぼ室温まで冷却した後、タイヤモンドカツタ
ーで銅部を底面と平行に切断して底部を除去し、
厚さ4mmのセラミツクス−金属複合体を得た。こ
のようにして100個のセラミツクス−金属複合体
を得たが、得られたセラミツクス−金属複合体に
はいずれも収縮その他の実用上支障のある変形は
見られなかつた。
After cooling to approximately room temperature, cut the copper part parallel to the bottom using a tire cutter and remove the bottom.
A ceramic-metal composite with a thickness of 4 mm was obtained. In this way, 100 ceramic-metal composites were obtained, and none of the ceramic-metal composites exhibited shrinkage or other deformation that would pose a practical problem.

一方フレーム状のキヤビテイを有する金型を用
いて圧縮成形し、焼成して得られるフレーム状の
セラミツクス成形体にメタライズ処理を施し、ニ
ツケルめつきして金属部材をろう付けしたもので
は100個のうち50個に変形が認められた。
On the other hand, out of 100 pieces, a frame-shaped ceramic molded body obtained by compression molding using a mold with a frame-shaped cavity and firing is subjected to metallization treatment, nickel plated, and brazed with metal parts. Deformities were observed in 50 pieces.

実施例 2 実施例1と同じ材料で、1ton/cm2の成形圧で80
mm×80mm×5mmの圧粉成形体を得た。
Example 2 Using the same material as Example 1, molding pressure of 1 ton/cm 2 was 80
A powder compact of mm x 80 mm x 5 mm was obtained.

この成形体を第3図に示すように、幅3mmの縁
部およびリブ部を残すようにエンドミルで切削加
工した。これを1500℃で焼成した後、セラミツク
ス成形体の上面に、上面に適合する大きさの厚さ
0.07mmの表面酸化処理銅箔を接触配置し、実施例
1と同じように加熱した。ほぼ室温まで冷却した
後、底部を除去してフレーム状のセラミツクス−
金属複合体を製造した。このセラミツクス−金属
複合体は変形がなく、特にリブ部の位置ずれはほ
とんどなかつた。
As shown in FIG. 3, this molded body was cut with an end mill so as to leave edges and ribs with a width of 3 mm. After firing this at 1500℃, the top surface of the ceramic molded body is coated with a thickness that fits the top surface.
A 0.07 mm surface oxidized copper foil was placed in contact and heated in the same manner as in Example 1. After cooling to approximately room temperature, the bottom part is removed and the frame-shaped ceramic
A metal composite was produced. This ceramic-metal composite was not deformed, and in particular there was almost no displacement of the rib portion.

[発明の効果] 以上の説明から明らかなように本発明方法によ
れば、成形時の破損や焼成時および接合時等に変
形がなく、高品質でかつ歩留りの良好なフレーム
状セラミツクス−金属複合体が得られる。
[Effects of the Invention] As is clear from the above description, according to the method of the present invention, a frame-shaped ceramic-metal composite that is of high quality and has a good yield without being damaged during molding or deformed during firing or bonding can be produced. You get a body.

【図面の簡単な説明】[Brief explanation of drawings]

第1図のaは有底セラミツクス成形体を金属部
材と接合させるところを示す斜視図、第1図bは
接合後の横断面図、第1図cは第1図bのEで底
部を除去したものの断面図、第2図aは有底セラ
ミツクス成形体と金属部材を接合させた斜視図、
第2図bは第2図aの−′面で切断した断面
図、第3図はセラミツクス−金属複合体を製造す
る方法を説明するための斜視図である。 1……有底セラミツクス成形体、2……金属部
材、3……底部、4……セラミツクス−金属複合
体。
Figure 1 a is a perspective view showing the bottomed ceramic molded body being joined to a metal member, Figure 1 b is a cross-sectional view after joining, and Figure 1 c is the bottom part removed at E in Figure 1 b. Figure 2a is a perspective view of the bottomed ceramic molded body and the metal member joined together;
FIG. 2b is a sectional view taken along the plane -' of FIG. 2a, and FIG. 3 is a perspective view for explaining the method of manufacturing the ceramic-metal composite. DESCRIPTION OF SYMBOLS 1... Bottomed ceramic molded body, 2... Metal member, 3... Bottom, 4... Ceramics-metal composite.

Claims (1)

【特許請求の範囲】 1 有底セラミツクス成形体を用意し、これを焼
成した後その上面に金属部材を接合し、しかる後
その底部を除去することを特徴とするセラミツク
ス−金属複合体の製造方法。 2 有底セラミツクス成形体は、切削加工により
得られる特許請求の範囲第1項記載のセラミツク
ス−金属複合体の製造方法。 3 金属部材は結合剤を含有していて直接セラミ
ツクス成形体と接合される特許請求の範囲第1項
または第2項記載のセラミツクス−金属複合体の
製造方法。 4 金属部材は結合剤で表面処理されて直接セラ
ミツクス成形体と接合される特許請求の範囲第1
項または第2項記載のセラミツクス−金属複合体
の製造方法。 5 金属部材は銅からなる特許請求の範囲第1項
〜第4項のいずれか1項記載のセラミツクス−金
属複合体の製造方法。
[Claims] 1. A method for manufacturing a ceramic-metal composite, which comprises preparing a ceramic molded body with a bottom, firing it, joining a metal member to its top surface, and then removing its bottom. . 2. The method for producing a ceramic-metal composite according to claim 1, wherein the bottomed ceramic molded body is obtained by cutting. 3. The method for producing a ceramic-metal composite according to claim 1 or 2, wherein the metal member contains a binder and is directly joined to the ceramic molded body. 4. Claim 1 in which the metal member is surface-treated with a binder and directly joined to the ceramic molded body.
A method for producing a ceramic-metal composite according to item 1 or 2. 5. The method for manufacturing a ceramic-metal composite according to any one of claims 1 to 4, wherein the metal member is made of copper.
JP13803682A 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body Granted JPS5930782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13803682A JPS5930782A (en) 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13803682A JPS5930782A (en) 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body

Publications (2)

Publication Number Publication Date
JPS5930782A JPS5930782A (en) 1984-02-18
JPH0369867B2 true JPH0369867B2 (en) 1991-11-05

Family

ID=15212532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13803682A Granted JPS5930782A (en) 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body

Country Status (1)

Country Link
JP (1) JPS5930782A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61217551A (en) * 1985-03-20 1986-09-27 Nippon Kinzoku Kogyo Kk Electric heating fe-cr-al alloy
JP3294846B2 (en) * 1992-03-09 2002-06-24 新日本製鐵株式会社 Fe-Cr-Al alloy steel sheet and method for producing the same

Also Published As

Publication number Publication date
JPS5930782A (en) 1984-02-18

Similar Documents

Publication Publication Date Title
JPS59232693A (en) Clad brazing filler metal for joining ceramics and metal or the like and composite body composed of ceramics and metal or the like using said brazing filler metal
JPH08511505A (en) Method for making airtight braze joints and application of this method in manufacturing unit with airtight container
JPH0369867B2 (en)
EP0048496B1 (en) Method for bonding sintered metal pieces
JPH02500907A (en) Ceramic/glass/metal composite
JPH075932B2 (en) Method for manufacturing contact material for vacuum valve
US5275770A (en) Method for fabrication of a carrier body of aluminum nitride
JPS62170405A (en) Production of composite material consisting of metal and ceramics
JPH1171186A (en) Bound structure of ceramic to metal and its binding
JP4318814B2 (en) Method for producing metal-ceramic composite material
JPH0632869B2 (en) Brazing method for ceramics and metal
JPH05211248A (en) Semiconductor mount composite heat radiation board and its manufacture
JPH0328392B2 (en)
JPS60128203A (en) Composite sintered parts
JP3040203U (en) Boron nitride compact setter for large area ceramics sintering
JPS5992161A (en) Joining method of sintered metal
JPH022829B2 (en)
JPS5948778B2 (en) Method for manufacturing ceramic-metal composite
JPS62220297A (en) Joining method for material member
JPS5834889B2 (en) Setsutenoseizouhouhou
JPH03149107A (en) Diamond embedding tool and manufacture thereof
JPS6141702A (en) Composite material containing sintered hard body
JPH06203692A (en) Manufacture of contact material
JPS61127676A (en) Ceramic with bonded portion
JPS63239165A (en) Ceramic joined body