JPS5930782A - Manufacture of ceramics-metal complex body - Google Patents

Manufacture of ceramics-metal complex body

Info

Publication number
JPS5930782A
JPS5930782A JP13803682A JP13803682A JPS5930782A JP S5930782 A JPS5930782 A JP S5930782A JP 13803682 A JP13803682 A JP 13803682A JP 13803682 A JP13803682 A JP 13803682A JP S5930782 A JPS5930782 A JP S5930782A
Authority
JP
Japan
Prior art keywords
ceramic
molded body
metal
ceramic molded
metal member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13803682A
Other languages
Japanese (ja)
Other versions
JPH0369867B2 (en
Inventor
水野谷 信幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP13803682A priority Critical patent/JPS5930782A/en
Publication of JPS5930782A publication Critical patent/JPS5930782A/en
Publication of JPH0369867B2 publication Critical patent/JPH0369867B2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 [発明の技術分野] 本発明はフレーム状のセラミックス−金属複合体の製造
方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for manufacturing a frame-shaped ceramic-metal composite.

[発明の技術的背景とその問題点」 従来より電気機器その他の用途に矩形もしくは円形のセ
ラミックス−金属複合体が使用されている。
[Technical Background of the Invention and Problems thereof] Rectangular or circular ceramic-metal composites have been used in electrical equipment and other applications.

このようなフレーム状のセラミックス−金属複合体を製
造するには、粉末状のアルミナ、窒化けい素等のセラミ
ックを少量の有機バインダを用いて金型によりフレーム
状に圧縮成形して焼成するか、あるいは板状に圧縮成形
し、その後中火部をくりぬいてフレーム状とし、これを
焼成してまずフレーム状のセラミックス成形体を製造し
、これにメタライズ処理を施してニッケルめっきにより
フレーム状の金属部材をろう付けして接合する方法がと
られている。
In order to manufacture such a frame-shaped ceramic-metal composite, a ceramic such as powdered alumina or silicon nitride is compression molded into a frame shape using a mold using a small amount of organic binder, and then fired. Alternatively, compression mold it into a plate shape, then hollow out the medium heat part to make a frame shape, and then fire it to produce a frame-shaped ceramic molded body, which is then subjected to metallization treatment and nickel plated to make a frame-shaped metal member. A method of joining by brazing is used.

このような方法においては、特に厚さの薄し1フレーム
状のセラミックス−金属複合体を製造する場合は、成形
時にセラミックス成形体の強度が不充分であって壊れ易
いとともに焼成工程での収縮等によりセラミックス成形
体がねじれたりあるl/)は角部が丸く変形するという
難点があった。
In such a method, especially when manufacturing a thin one-frame ceramic-metal composite, the strength of the ceramic molded body during molding is insufficient and it is easily broken, and it also suffers from shrinkage during the firing process. This has the disadvantage that the ceramic molded body is twisted and the corners of the ceramic molded body become rounded.

また、たとえ良好な形状のセラミックス成形体が得られ
ても金属部材とのろう付は時の高温により変形し易いと
いう難点があった。
Further, even if a ceramic molded body with a good shape is obtained, there is a problem in that it is easily deformed due to the high temperature during brazing with a metal member.

[発明の目的] 本発明はこのような問題のない、すなわち成形時の破損
や焼成時および金属部材との接合時に変形のないフレー
ム状セラミックス−金属複合体を製造する方法を提供す
ることを目的とする。
[Object of the invention] The object of the present invention is to provide a method for manufacturing a frame-shaped ceramic-metal composite that does not have such problems, that is, does not suffer from breakage during molding or deformation during firing and joining with metal members. shall be.

[発明の概要] すなわち本発明方法は、有底セラミックス成形体を用意
し、これを焼成した後その上面に金属部材を接合し、し
かる後その底部を除去することを特徴とする。
[Summary of the Invention] That is, the method of the present invention is characterized in that a ceramic molded body with a bottom is prepared, a metal member is bonded to the top surface of the molded body after firing the body, and then the bottom portion thereof is removed.

本発明に使用するセラミックス成形体としては、二酸化
けい素、アルミナ、窒化けい累等があげられる。
Examples of the ceramic molded body used in the present invention include silicon dioxide, alumina, and silicon nitride.

本発明に使用する金属部材としては、銅、鉄、クロム、
ニッケル、モリブデン、銀、コバルト、アルミニウム等
の単体、合金あるいは混合物があげられ、その形状はセ
ラミックス成形体の接合面に適合する形状とする。
Metal members used in the present invention include copper, iron, chromium,
Examples include a single substance, an alloy, or a mixture of nickel, molybdenum, silver, cobalt, aluminum, etc., and the shape thereof should be adapted to the joint surface of the ceramic molded body.

次に本発明方法を図面を参照に説明する。Next, the method of the present invention will be explained with reference to the drawings.

まず、第1図(a )に示すように、焼成前のセラミッ
クス成形体の上面に、゛周縁に所定の幅β1、β2の縁
部が形成されるよう上面中央部を一定深さdまで切削し
て有底セラミックス成形体1を成形し、この有底セラミ
ックス成形体1を焼成した後、セラミックス成形体の上
面にフレーム状の金属部材2を接合させる。
First, as shown in Fig. 1(a), the upper surface of the ceramic molded body before firing is cut at the center of the upper surface to a certain depth d so that edges with predetermined widths β1 and β2 are formed on the periphery. After the bottomed ceramic molded body 1 is molded and the bottomed ceramic molded body 1 is fired, a frame-shaped metal member 2 is joined to the upper surface of the ceramic molded body.

次に第1図(b)に示すように、有底セラミックス成形
体1の胴部を深さdの位置Eで底面と平行に切断して底
部3を除去することにより、第1図(C)に見られる本
発明のセラミックス−金属複合体が得られる。
Next, as shown in FIG. 1(b), the body of the bottomed ceramic molded body 1 is cut parallel to the bottom surface at a depth d position E, and the bottom portion 3 is removed. ) The ceramic-metal composite of the present invention is obtained.

なお有底セラミックス成形体の底部は部分的に貫通する
孔を有していてもよい。ここでいう底部は焼成工程にお
いて縁部の変形を防止する強度を有していればよい。
Note that the bottom of the bottomed ceramic molded body may have a partially penetrating hole. The bottom part here needs only have enough strength to prevent the edge part from being deformed during the firing process.

また金属部材と接合させる前のセラミックス成形体を第
2図(a )に示すように、セラミックス成形体の上面
に全周にわたって所定深さdの溝5をエンドミル等で切
削し、焼成した後金属部材を接合することもできる。こ
の場合は第2図(b)に示すように、溝の深さの位置E
で底面と平行に切断して底部3と中央部6とを除去する
ようにしてセラミックス−金属複合体が得られる。
Furthermore, as shown in FIG. 2(a), a groove 5 of a predetermined depth d is cut on the upper surface of the ceramic molded body before it is bonded to a metal member using an end mill or the like, and after firing, the groove 5 is It is also possible to join the parts together. In this case, as shown in Fig. 2(b), the groove depth position E
A ceramic-metal composite is obtained by cutting parallel to the bottom surface and removing the bottom portion 3 and the center portion 6.

第3図は縁部から延在するリブを有するセラミックス−
金属複合体を示す斜視図である。なおセラミックス成形
体と金属部材との接合方法としては、あらかじめセラミ
ックス成形体の上面をメタライズ処理し、ニッケルめっ
きして金属部材をろう付けする方法をとることもできる
が、次の方法により直接セラミックス成形体と金属部材
を接合するのが望ましい。
Figure 3 shows a ceramic plate with ribs extending from the edge.
FIG. 2 is a perspective view showing a metal composite. As a method for joining the ceramic molded body and the metal member, it is also possible to metalize the top surface of the ceramic molded body in advance, plate it with nickel, and braze the metal member, but the following method can also be used to directly form the ceramic body. It is desirable to join the body and the metal member.

すなわち金属部材を酸素等の結合剤で表面処理するか、
あるいは金属部材に結合剤を含有させて、これをセラミ
ックス成形体に接触配置させ、窒素ガス等の不活性ガス
中で加熱する方法、または結合剤を含有しない、あるい
は結合剤で処理されていない金属部材を使用する場合は
、金属部材をセラミックス成形体と接触配置し゛C結合
剤を含むガス雰囲気中で加熱する方法が望ましい。
In other words, surface treatment of metal parts with a binding agent such as oxygen,
Alternatively, a method in which a metal member is made to contain a binder, placed in contact with a ceramic molded body, and heated in an inert gas such as nitrogen gas, or a metal member that does not contain a binder or is not treated with a binder. When using a member, it is desirable to place the metal member in contact with the ceramic molded body and heat it in a gas atmosphere containing a carbon binder.

本発明に使用する結合剤は、金属との間に共晶合金を生
成するものであり、酸素、いおう、りん、けい素等があ
げられる。これらはセラミックス成形体と金属のそれぞ
れの種類および組合せに応じて適宜選択する。例えば金
属が銅、鉄、クロムの場合は、結合剤としては酸素、い
おうが適しており、アルミニウムの場合はけい素が適し
ている。
The binder used in the present invention forms a eutectic alloy with the metal, and examples include oxygen, sulfur, phosphorus, and silicon. These are appropriately selected depending on the respective types and combinations of the ceramic molded body and the metal. For example, when the metal is copper, iron, or chromium, oxygen or sulfur is suitable as a binder, and when the metal is aluminum, silicon is suitable.

またセラミックス成形体と金属部材とを接触させて加熱
する温度は金属の融点以下でかつ金属と結合剤との共晶
合金の共晶温度以上が適している。
The temperature at which the ceramic molded body and the metal member are brought into contact and heated is preferably below the melting point of the metal and above the eutectic temperature of the eutectic alloy of the metal and the binder.

例えば金属が銅で結合剤が酸素の場合は、銅の融点(1
’083℃)以下、銅−酸化銅の共晶温度(106’5
℃)以上である。
For example, if the metal is copper and the binder is oxygen, the melting point of copper (1
'083℃) or lower, the eutectic temperature of copper-copper oxide (106'5
℃) or more.

またセラミックス成形体が窒化けい素等の非酸化物系セ
ラミックの場合は、セラミックス成形体をあらかじめ結
合剤で表面処理あるいは結合剤を含有させてから金属部
材と接触させて加熱することが望ましい。すなわち結合
剤が酸素の場合、セラミックス成形体を酸化処理するか
あるいはセラミックス成形体に酸化物を含有させる。
In addition, when the ceramic molded body is a non-oxide ceramic such as silicon nitride, it is preferable that the ceramic molded body is previously surface-treated with a binder or is impregnated with a binder, and then brought into contact with a metal member and heated. That is, when the binder is oxygen, the ceramic molded body is oxidized or the ceramic molded body is made to contain an oxide.

この直接接触させる方法が好ましい理由は、前述したろ
う付は方法では少なくとも2回の熱処理が必要であるの
に対し、直接接合させる場合は1回の熱処理で済むこと
による。
The reason why this direct contact method is preferable is that the brazing method described above requires at least two heat treatments, whereas direct bonding requires only one heat treatment.

[発明の実施例] 次に本発明の実施例について説明する。[Embodiments of the invention] Next, examples of the present invention will be described.

実施例1 アルミナ90重量部、他にシリカ、カルシア、マグネシ
アを10重量部、バインダとしてポリビニルアルコール
樹脂を1重量部、パラフィンワックスを5重量部混合し
、平板状キャビティを有する金型を用いて約1 ton
 、/ clの圧力で圧縮成形し、80 u X 50
 in x 5 inの圧粉成形体を得た。
Example 1 90 parts by weight of alumina, 10 parts by weight of silica, calcia, and magnesia, 1 part by weight of polyvinyl alcohol resin as a binder, and 5 parts by weight of paraffin wax were mixed and molded using a mold with a flat cavity. 1 ton
Compression molded at a pressure of ,/cl, 80 u x 50
A green compact of 5 inches x 5 inches was obtained.

これを幅、f21 =A2 =2.5關で、かつ深ざd
=4順となるよう上面中央部を切削して第1図(a )
に示す有底セラミックス成形体を形成した。
This is the width, f21 = A2 = 2.5, and the depth d
Figure 1 (a)
A bottomed ceramic molded body shown in FIG.

これを1500℃で焼成した後、セラミックス成形体の
上面に適合する形状の厚さ0.07mmのタフピッチ銅
からなる銅箔をセラミックス成形体の上面に接触配置さ
せ、窒素ガス雰囲気中で1075℃で10分間加熱した
After firing this at 1500°C, a copper foil made of tough pitch copper having a thickness of 0.07 mm and having a shape that fits the top surface of the ceramic molded body was placed in contact with the top surface of the ceramic molded body, and heated at 1075°C in a nitrogen gas atmosphere. Heated for 10 minutes.

はぼ室温まで冷却した後、タイヤモンドカッターで胴部
を底面と平行に切断して底部を除去し、厚さ4關のセラ
ミックス−金属複合体を得た。このようにして100個
のセラミックス−金属複合体を得たが、得られたセラミ
ックス−金属複合体にはいずれも収縮その他の実用上支
障のある変形は見られなかった。
After cooling to room temperature, the body was cut parallel to the bottom using a tire cutter and the bottom was removed to obtain a ceramic-metal composite with a thickness of 4 mm. In this way, 100 ceramic-metal composites were obtained, and none of the ceramic-metal composites exhibited shrinkage or other deformation that would pose a practical problem.

1方フレーム状のキ17ビテイを有する金型を用いて圧
縮成形し、焼成して得られるフレーム状のセラミックス
成形体にメタライズ処理を施し、ニッケルめっきして金
属部材をろう付けしたものでは100個のうち50個に
変形が認められた。
100 pieces of frame-shaped ceramic molded bodies obtained by compression molding using a one-sided frame-shaped mold with a width of 17 bits, metallizing treatment, nickel plating, and brazing metal parts. Deformation was observed in 50 of them.

実施例2 実施例1と同じ材料で、1 ton / clの成形圧
で80 mu X 80寵X 5 mlの圧粉成形体を
得た。
Example 2 A powder compact of 80 mu x 80 mu x 5 ml was obtained using the same material as in Example 1 at a molding pressure of 1 ton/cl.

この成形体を第3図に示すように、幅3nの縁部および
リブ部を残すようにエンドミルで切削加工した。これを
1500’Cで焼成した後、セラミックス成形体の上面
に、上面に適合する大きさの厚さ0.07nの表面酸化
処理銅箔を接触配置し、実施例1と同じように加熱した
。はぼ室温まで冷却した後、底部を除去してフレーム状
のセラミックス−金i複合体を製造した。このセラミッ
クス−金属複合体は変形がなく、特にリブ部の位置ずれ
はほとんどなかった。
As shown in FIG. 3, this molded body was cut with an end mill so as to leave edges and ribs with a width of 3n. After firing this at 1500'C, a surface oxidized copper foil having a thickness of 0.07 nm and having a size suitable for the upper surface was placed in contact with the upper surface of the ceramic molded body, and heated in the same manner as in Example 1. After cooling to room temperature, the bottom portion was removed to produce a frame-shaped ceramic-gold composite. This ceramic-metal composite was not deformed, and in particular there was almost no displacement of the rib portion.

[発明の効果] 以上の説明から明らかなように本発明方法によれば、成
形時の破損や焼成時および接合時等に変形がなく、高品
質でかっ歩留りの良好なフレーム状セラミックス−金属
複合体が得られる。
[Effects of the Invention] As is clear from the above description, according to the method of the present invention, a frame-shaped ceramic-metal composite is produced which is of high quality, large, and has a good yield, without being damaged during molding or deformed during firing, bonding, etc. You get a body.

【図面の簡単な説明】[Brief explanation of drawings]

第1図の(a)は有底セラミックス成形体を金属部材と
接合させるところを示す斜視図、第1図(b)は接合後
の横断面図、第1図(C)は第1図(b)のEで底部を
除去したものの断面図、第2図(a)は有底セラミック
ス成形体と金属部材を接合させた斜視図、第2図(b)
は第2図(a )のI−I’而で切断した断面図、第3
図はセラミックス−金属複合体を製造する方法を説明す
るための斜視図である。 1・・・・・・・・・・・・有底セラミックス成形体2
・・・・・・・・・・・・金属部材 3・・・・・・・・・・・・底 部 4・・・・・・・・・・・・セラミックス−金属複合体
(7317)  代理人弁理士 則近憲佑(ほか1名)
FIG. 1(a) is a perspective view showing the bottomed ceramic molded body being joined to a metal member, FIG. 1(b) is a cross-sectional view after joining, and FIG. 1(C) is a Fig. 2(a) is a cross-sectional view of the product with the bottom removed at E in b); Fig. 2(a) is a perspective view of the bottomed ceramic molded body and the metal member joined; Fig. 2(b)
is a sectional view taken along line I-I' in Figure 2(a);
The figure is a perspective view for explaining a method of manufacturing a ceramic-metal composite. 1......Bottomed ceramic molded body 2
......Metal member 3...Bottom part 4...Ceramics-metal composite (7317) Representative Patent Attorney Kensuke Norichika (and 1 other person)

Claims (5)

【特許請求の範囲】[Claims] (1)有底セラミックス成形体を用意し、これを焼成し
た後その上面に金属部材を接合し、しかる後その底部を
除去することを特徴とするセラミックス−金属複合体の
製造方法。
(1) A method for producing a ceramic-metal composite, which comprises preparing a ceramic molded body with a bottom, firing it, joining a metal member to its top surface, and then removing its bottom.
(2)有底セラミックス成形体は、切削加工により得ら
れる特許請求の範囲第1項記載のセラミックス−金属複
合体の製造方法。
(2) The method for manufacturing a ceramic-metal composite according to claim 1, wherein the bottomed ceramic molded body is obtained by cutting.
(3)金属部材は結合剤を含有し−Cいて直接セラミッ
クス成形体と接合される特許請求の範囲第1項または第
2項記載のセラミックス−金属複合体の製造方法。
(3) The method for producing a ceramic-metal composite according to claim 1 or 2, wherein the metal member contains a binder and is directly joined to the ceramic molded body using -C.
(4)金属部材は結合剤で表面処理されて直接セラミッ
クス成形体と接合される特許請求の範囲第1項または第
2項記載のセラミックス−金属複合体の製造方法。
(4) The method for manufacturing a ceramic-metal composite according to claim 1 or 2, wherein the metal member is surface-treated with a binder and directly joined to the ceramic molded body.
(5)金属部材は銅からなる特許請求の範囲第1項〜第
4項のいずれが1項記載のセラミックス−金属複合体の
製造方法。
(5) The method for manufacturing a ceramic-metal composite according to any one of claims 1 to 4, wherein the metal member is made of copper.
JP13803682A 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body Granted JPS5930782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13803682A JPS5930782A (en) 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13803682A JPS5930782A (en) 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body

Publications (2)

Publication Number Publication Date
JPS5930782A true JPS5930782A (en) 1984-02-18
JPH0369867B2 JPH0369867B2 (en) 1991-11-05

Family

ID=15212532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13803682A Granted JPS5930782A (en) 1982-08-10 1982-08-10 Manufacture of ceramics-metal complex body

Country Status (1)

Country Link
JP (1) JPS5930782A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61217551A (en) * 1985-03-20 1986-09-27 Nippon Kinzoku Kogyo Kk Electric heating fe-cr-al alloy
US5405460A (en) * 1992-03-09 1995-04-11 Nippon Steel Corporation Fe-Cr-Al alloy steel sheet and process for producing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61217551A (en) * 1985-03-20 1986-09-27 Nippon Kinzoku Kogyo Kk Electric heating fe-cr-al alloy
JPH0549740B2 (en) * 1985-03-20 1993-07-27 Nippon Metal Ind
US5405460A (en) * 1992-03-09 1995-04-11 Nippon Steel Corporation Fe-Cr-Al alloy steel sheet and process for producing the same

Also Published As

Publication number Publication date
JPH0369867B2 (en) 1991-11-05

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