JP3040203U - Boron nitride compact setter for large area ceramics sintering - Google Patents

Abstract

(57) Abstract: A pattern and a pattern hole are respectively provided on the end faces of a plurality of plate-shaped boron nitride molded bodies to be bonded to each other, and the pattern and the pattern hole are engaged with each other and the pattern is spliced. A boron nitride compact setter for sintering large-area ceramics, characterized in that the compacts are joined together. According to the present invention, a large area boron nitride compact setter can be easily obtained and a large area ceramics can be sintered.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a boron nitride compact setter for sintering ceramics.

[0002]

[Problems to be solved by conventional techniques and devices]

Conventionally, as a setter for sintering ceramics, a boron nitride compact is mainly used because it has excellent heat resistance, thermal conductivity, reactivity, and lubricity. Since this boron nitride molded body has a lower strength than other ceramics, it is usually manufactured mainly by the hot press method under high temperature and high pressure (for example, 1900 ° C or higher, 150 kg / cm ² or higher), and the density is 1.9 g / It uses the one densified to cm ³ or more.

However, the hot pressing method of the above-mentioned boron nitride molded body is limited to one having an area of about 350 mm in diameter at present. Therefore, when using the boron nitride molded body as a setter for sintering ceramics, it was impossible to sinter ceramics having a large area of 250 mm square or more without deteriorating workability and deterioration of characteristics.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a boron nitride compact setter capable of easily sintering a large-area ceramic.

[0005]

[Means for Solving the Problems]

In order to achieve the above object, the present invention provides: (1) A handle and a handle hole are provided on the end faces of a plurality of plate-shaped boron nitride compacts to be joined to each other, and the handle and the handle hole are engaged with each other. Patterned sputters, which are obtained by joining the above-mentioned compacts together, (2) a boron nitride compact for large-area ceramics sintering setter, (2) the setter according to (1), wherein the handle is dovetail-shaped, (3) A setter according to (1) or (2), in which a pin hole is formed in the joint portion along the thickness direction, and a pin is driven into the pin hole to fix the mutually joined molded products, (4) the molded product density of a ^{1.5~1.95g / cm 3 (1),} (2) or (3), wherein the setter (5) density of the compact is 1.7~1.8g / cm ³ (4) is provided.

According to the present invention, the diameter of the cylindrical boron nitride molded body obtained from the current hot pressing method depends on the inner diameter of the mold at the time of manufacturing the hot pressing, and a setter having a large area generally exceeding 300 mm square is used. Although it was impossible to manufacture, a boron nitride compact setter for sintering a large area of ceramics can be obtained by using the above-mentioned joining method of the boron nitride compact, whereby aluminum nitride etc. can be obtained. The ceramics can be easily sintered even if they have a large area.

[0007]

Embodiments and Examples of the Invention

 The boron nitride compact setter for sintering large-area ceramics according to the present invention is formed by connecting and bonding the end faces (side faces) of a plurality of boron nitride compact plates to each other.

Here, the boron nitride molded body preferably has a density of 1.5 to 1.95 g / cm ³ , particularly 1.7 to 1.8 g / cm ³ . The density of the boron nitride compact is 1. If it is less than 5 g / cm ³ , the strength of the setter is extremely weak and it is easily damaged during processing or use. In terms of strength, the boron nitride molded body has a density of 1.7 to 1. More preferably, it is 8 g / cm ³ .

Such a boron nitride compact can be easily obtained by treating the raw material boron nitride powder by, for example, a low-temperature low-pressure hot press molding method or an atmospheric pressure, particularly a hydrostatic pressure sintering method. .

In this case, a sintering aid such as boron oxide or calcium oxide may be added in advance to the raw material boron nitride powder, and the addition amount thereof is 0 to 3% by weight of the entire boron nitride powder, especially 0. It is preferable to be 0.1 to 1.5% by weight.

Further, when processing by a hot press molding method, in a nitrogen atmosphere, at a temperature of 1700 to 2100 ° C., particularly 1800 to 2100 ° C., 30 to 250 kg / cm ² , particularly 100 to 200 kg / cm ² , It is preferable to perform hot pressing under pressure conditions, and when processing by the hydrostatic pressure sintering method, the raw material powder is subjected to hydrostatic pressure at 100 to 5000 kg / cm ² , particularly 1000 to 5000 kg / cm ² at room temperature. After pressing, it is preferable to sinter at 1700 to 2100 ° C., particularly 1800 to 2100 ° C. in an inert gas atmosphere.

In addition, in the case of obtaining a boron nitride molded body, an optional component can be added in addition to the above boron nitride within a range that does not impair the effects of the present invention. As an optional component, for example, for the purpose of improving the strength of ceramics, it is preferable to add silicon nitride, aluminum nitride, silicon carbide or the like.

Further, the above-mentioned boron nitride molded body may be used as it is as a setter for sintering ceramics, but it can be highly purified by performing heat treatment for a shorter time. The heat treatment is preferably performed at 1800 to 2100 ° C. for about 1 to 3 hours.

Thus, the setter of the present invention is to bond a plurality of the above-mentioned boron nitride molded body plates to each other, and specifically, the end surface of one molded body plate to be connected to each other. A handle is formed on the side surface, and a handle hole that engages with the handle is formed on the end surface (side face) of the other molded body plate. The handle and the handle hole are engaged to connect the molded bodies to each other. It is something that goes.

In this case, various patterns such as a long pattern, a double pattern, a two-layer pattern, a four-layer pattern, and a stitch pattern are known and can be arbitrarily selected, but they are easy to carry and have a gap at the joint. The ant pattern method, which is difficult to make, is the most preferable. Further, the number of patterns to be connected is not limited, and the size and shape of the pattern can be appropriately selected. Further, it is possible to make one or more holes along the thickness direction at the joint portion and drive a pin of a boron nitride molded body of the same material into the hole to strengthen the joint.

With respect to this point, one embodiment of the present invention will be described with reference to the drawings. In the figure, 1a, 1b and 1c are boron nitride molded body plates, respectively, and one end surface of the first molded body plate 1a is Has a protruding portion (handle) 2 having an inverted trapezoidal cross-section, which is integrally projected along the longitudinal direction thereof, and the end face adjacent to the end face on which the handle 2 is provided is engaged with the handle 2. A long groove (handle hole) 3 having a trapezoidal cross-section is formed. Further, the same pattern holes 3 as described above are formed on one end surface of the second molded body plate 1b and the end surface adjacent to the one end surface. Further, a handle 2 similar to the above is integrally provided on one end surface of the third molded body plate 1c and an end surface adjacent to the one end surface, respectively. Then, the handle 2 of the first molded body plate 1a is engaged with one of the handle holes 3 of the second molded body plate 1b, and the handle hole 3 of the first molded body plate 1a is prepared separately from the above. The same handle 2 of the first molded body plate 1a is engaged, and the handle hole 3 of the second molded body plate 1b and the handle hole 3 of the other first molded body plate 1a described above are respectively engaged. By engaging the handles 2 and 2 of the third molded body plate 1c, a large area setter 10 as shown in FIG. 4 in which four molded body plates are connected and joined to each other is formed.

The present invention is not limited to the above example, and the number of joints and the like are appropriately selected according to the shape and size of the ceramics to be sintered, as described above, and other ones. The configuration can be variously modified within the scope of the present invention.

The boron nitride compact setter for sintering large-area ceramics of the present invention is, for example, ceramics such as aluminum nitride, silicon nitride, silicon carbide, titanium boride, and chromium carbide, or a hybrid containing two or more of these. It can be preferably used for sintering chemical ceramics and the like, and in this case, even if the ceramic to be sintered is large, it can be sintered without any trouble.

Next, an experimental example will be shown. [Inventive Example] A graphite mold was filled with boron nitride powder containing 0.5% by weight of B ₂ O ₃ as a sintering aid, and hot pressed at a temperature of 2000 ° C. and a pressure of 150 kg / cm ² for nitriding. A boron compact was obtained.

Next, eight 200 mm × 200 mm × 20 mm plates were cut out from these boron nitride molded bodies, processed into a size of 196 mm × 196 mm × 13 mm, and heated at 2000 ° C. for 2 hours in a nitrogen gas atmosphere. Processed. Then, these plates were processed into four sheets based on FIG. 1, two sheets based on FIG. 2 and two sheets based on FIG. Then, two sets of 380 mm square setters 10 were produced by combining these as described above (FIG. 4).

Next, a frame 11 of a boron nitride molded body is provided between the setters 10 and 10 obtained as shown in FIG. 5, an aluminum nitride 350 mm × 350 mm × 1 mm green sheet 12 is placed, and a nitrogen gas atmosphere is placed. Sintering was performed at 1800 ° C. in the middle, and an aluminum nitride compact having the same characteristics as the conventional one could be obtained.

[Comparative Example] Four 190 mm square boron nitride molded bodies without a pattern, which have been subjected to the same treatment as the above, are arranged to form a laying board, and the same aluminum nitride green sheet and frame as the above are placed on the laying board. A boron nitride compact having the same shape as the above was capped and sintered under the same conditions as above. The lid frame was provided with a crosspiece made of the same material to maintain its shape. In the obtained aluminum nitride sintered body, there was a local density variation.

[0023]

[Effect of the invention]

 According to the present invention, a large area boron nitride compact setter can be easily obtained, and a large area ceramics can be sintered.

[Brief description of the drawings]

FIG. 1 shows an example of a first boron nitride molded body plate,
(A) is a plan view, (B) is a right side view, (C) is a front view,
(D) is an enlarged view of the X part of (C), and (E) is an enlarged view of the Y part of (B).

FIG. 2 shows an example of a second boron nitride molded body plate,
(A) is a plan view, (B) is a left side view, and (C) is a front view.

FIG. 3 shows an example of a third boron nitride molded body plate,
(A) is a plan view, (B) is a left side view, and (C) is a rear view.

FIG. 4 shows a setter according to an embodiment of the present invention obtained by joining the first to third molded body plates, (A) is a plan view,
(B) is a front view.

FIG. 5 is a perspective view showing a state in which ceramics is sintered using the setter.

[Explanation of symbols]

 1a, 1b, 1c Boron nitride molded body plate 2 Handle 3 Handle hole 10 Setter

Claims (5)

[Utility model registration claims] 1. A pattern and a pattern hole are respectively provided on end faces of a plurality of plate-shaped boron nitride molded bodies to be bonded to each other, and the pattern and the pattern hole are engaged with each other and spliced together, and the molded bodies are mutually connected. A boron nitride compact setter for sintering large-area ceramics, characterized by being joined together. 2. The setter according to claim 1, wherein the handle is ant-shaped. 3. The setter according to claim 1, wherein a pin hole is formed in the joint portion along the thickness direction, and a pin is driven into the pin hole to fix the molded bodies joined together. 4. The molded product has a density of 1.5 to 1.95 g.
/ Cm ³ The setter according to claim 1, 2 or 3. 5. The density of the molded body is 1.7 to 1.8 g /
The setter according to claim 4, which is cm ³ .