JPH0369511A - Fibrous dielectric and its production - Google Patents
Fibrous dielectric and its productionInfo
- Publication number
- JPH0369511A JPH0369511A JP20427389A JP20427389A JPH0369511A JP H0369511 A JPH0369511 A JP H0369511A JP 20427389 A JP20427389 A JP 20427389A JP 20427389 A JP20427389 A JP 20427389A JP H0369511 A JPH0369511 A JP H0369511A
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- fibrous
- titanium dioxide
- titanium oxide
- tio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 63
- 239000000835 fiber Substances 0.000 claims abstract description 46
- 238000006243 chemical reaction Methods 0.000 claims abstract description 23
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910002113 barium titanate Inorganic materials 0.000 claims abstract description 18
- 238000002156 mixing Methods 0.000 claims abstract description 16
- 239000004408 titanium dioxide Substances 0.000 claims abstract description 14
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 10
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 claims abstract description 7
- 229910001863 barium hydroxide Inorganic materials 0.000 claims abstract description 7
- 239000000203 mixture Substances 0.000 claims abstract description 4
- 239000003989 dielectric material Substances 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 229910052788 barium Inorganic materials 0.000 claims description 2
- IYVLHQRADFNKAU-UHFFFAOYSA-N oxygen(2-);titanium(4+);hydrate Chemical compound O.[O-2].[O-2].[Ti+4] IYVLHQRADFNKAU-UHFFFAOYSA-N 0.000 claims description 2
- 239000000047 product Substances 0.000 description 15
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 11
- 229910052700 potassium Inorganic materials 0.000 description 11
- 239000011591 potassium Substances 0.000 description 11
- 239000013078 crystal Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 5
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- ZUDYPQRUOYEARG-UHFFFAOYSA-L barium(2+);dihydroxide;octahydrate Chemical compound O.O.O.O.O.O.O.O.[OH-].[OH-].[Ba+2] ZUDYPQRUOYEARG-UHFFFAOYSA-L 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000001553 barium compounds Chemical class 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000012798 spherical particle Substances 0.000 description 2
- 241001576023 Chikunia Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- TUCNEACPLKLKNU-UHFFFAOYSA-N acetyl Chemical compound C[C]=O TUCNEACPLKLKNU-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- -1 alkali metal salts Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000007716 flux method Methods 0.000 description 1
- 238000010335 hydrothermal treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000002990 reinforced plastic Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Fibers (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、誘電材料として用いられる繊維状誘電体およ
びその製造方法に関し、特に、誘電率が約100ないし
1600の広範囲にわたる所望値に制御することが可能
な誘電体およびその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a fibrous dielectric used as a dielectric material and a method for producing the same, and in particular, the invention relates to a fibrous dielectric used as a dielectric material and a method for manufacturing the same. The present invention relates to a dielectric material that can be used as a dielectric material and a method for manufacturing the same.
〈従来の技術〉
チタン酸バリウムは誘電体・半導体・圧電体の材料とし
て広範囲に利用されており、工業的にも大量に生産され
ている。最近粒子配向セラミツク等に応用しようと結晶
軸の配向した繊維状チタン酸バリウムの製造に関する研
究がいくつかなされている。<Prior Art> Barium titanate is widely used as a material for dielectrics, semiconductors, and piezoelectrics, and is also industrially produced in large quantities. Recently, several studies have been conducted on the production of fibrous barium titanate with oriented crystal axes for application to grain-oriented ceramics and the like.
例えば特公昭62−55243号公報には、K2O・n
T i O2で表されるチタン酸カリウム繊維とバリウ
ム酸化物又は高温で分解してバリウム酸化物となるバリ
ウム化合物を混合して、次に焼成することにより粒子の
配向したチタン酸バリウムを製造する固相法が開示され
ている。For example, in Japanese Patent Publication No. 62-55243, K2O・n
A solid material that produces barium titanate with oriented particles by mixing potassium titanate fibers represented by T i O2 and barium oxide or a barium compound that decomposes at high temperatures to become barium oxide, and then firing the mixture. A mutual law has been disclosed.
また例えば特開昭63−260822号公報には、Ti
O2゜n H□0で表される酸化チタン繊維とBaO・
TiO2として過剰のバリウム化合物とNaC1−KC
l系フラックスを混合し噴霧乾燥後焼成して多結晶の繊
維状チタン酸バリウムを製造するフラツクス性が開示さ
れている。For example, in Japanese Patent Application Laid-Open No. 63-260822, Ti
Titanium oxide fiber represented by O2゜n H□0 and BaO・
Excess barium compound and NaCl-KC as TiO2
A flux property is disclosed in which polycrystalline fibrous barium titanate is produced by mixing l-based flux, spray drying, and then firing.
さらに例えば特公昭62−7160号公報に20− x
TiO2・yH20で表されるチタン酸カリウム水和物
と水酸化バリウムを水熱条件下で反応せしめ繊維状チタ
ン酸バリウムを製造する水熱法が開示されている。Furthermore, for example, in Japanese Patent Publication No. 62-7160, 20-x
A hydrothermal method is disclosed in which potassium titanate hydrate represented by TiO2.yH20 and barium hydroxide are reacted under hydrothermal conditions to produce fibrous barium titanate.
〈発明が解決しようとする課題〉
しかし、これまでの報告ではチタン酸カリウムを原料に
したりフラツクスとして塩化ナトリウムや塩化カリウム
などのアルカリ金属塩を使うため、その処理条件によっ
ては生成物にナトリウムやカリウムを含んでしまう場合
があった。このナトリウムやカリウムなどの元素を含ん
だチタン酸バリウムで電子デバイスを作製するとその特
性が著しく悪化し、場合によっては他の素子にも悪影響
を及ぼす場合があった。<Problems to be solved by the invention> However, in previous reports, potassium titanate is used as a raw material or alkali metal salts such as sodium chloride or potassium chloride are used as fluxes, so depending on the processing conditions, sodium or potassium may be added to the product. In some cases, it may contain. When electronic devices are manufactured using barium titanate containing elements such as sodium and potassium, their characteristics deteriorate significantly, and in some cases, other devices may also be adversely affected.
また、固相反応を行う場合は充分な混合を行う必要があ
るため、例えばアルくす等のポット中で硬質のボールに
より湿式混合が通常行われており、この混合中に原料の
繊維形状が損なわれる欠点がある。逆に充分な混合が行
われていないと、均一な反応が行えない。フラフクス法
においても、フラフクスの量が少ないと均一な反応が得
難く、多いと反応時間が長くなる。In addition, when performing a solid phase reaction, it is necessary to perform sufficient mixing, so wet mixing is usually performed using hard balls in a pot such as Alx, and during this mixing, the fiber shape of the raw materials is damaged. There are some drawbacks. On the other hand, if sufficient mixing is not performed, a uniform reaction cannot be carried out. Even in the fluffx method, if the amount of fluffx is small, it is difficult to obtain a uniform reaction, and if the amount is large, the reaction time becomes long.
固相・フラツクス性ではその反応温度が比較的高<Ba
OとTiO2の混合比が1=1からずれるとB a T
i z○7やBa 2T i O4の副生成物が生成
する。チタン酸カリウム水和物による水熱反応において
も副生成物に4チタン酸カリウムや6チタン酸カリウム
が生威し電子材料として利用する場合には問題がある。In the solid phase/flux type, the reaction temperature is relatively high <Ba
When the mixing ratio of O and TiO2 deviates from 1=1, B a T
By-products such as i z○7 and Ba 2T i O4 are produced. Even in the hydrothermal reaction using potassium titanate hydrate, potassium tetratitanate and potassium hexatitanate are produced as by-products, which poses a problem when used as electronic materials.
〈課題を解決するための手段〉
本発明の繊維状誘電体の製造方法は、二酸化チタン水和
物繊維TiQ2・nH2O,アナターゼ型酸化チタン繊
維、ルチル型酸化チタン繊維(これらはチタニア繊維と
呼ばれる)の何れかと、水酸化バリウムを混合比にで混
合したのち、水熱条件下で反応させることを特徴とする
。<Means for Solving the Problems> The method for producing a fibrous dielectric of the present invention includes titanium dioxide hydrate fibers TiQ2.nH2O, anatase type titanium oxide fibers, and rutile type titanium oxide fibers (these are called titania fibers). and barium hydroxide at a mixing ratio, and then reacted under hydrothermal conditions.
このようにして製造された本発明の繊維状誘電体の一般
構造は、二酸化チタン繊維の表面に球状のチタン酸バリ
ウムが全重量の20%以上付着した、TiOx−BaT
iO2系の繊維状誘電体である。The general structure of the fibrous dielectric of the present invention manufactured in this way is TiOx-BaT, in which spherical barium titanate is attached to the surface of titanium dioxide fibers by 20% or more of the total weight.
It is an iO2-based fibrous dielectric.
この構造において球状チタン酸ハリウ1、の付着率が増
大すると、チタン酸バリウムの球状の微細結晶粒子が繊
維状に結合してなる誘電体となる。In this structure, when the adhesion rate of spherical halium titanate 1 increases, a dielectric material is formed in which spherical microcrystalline particles of barium titanate are bonded in the form of fibers.
本発明で使用するチタニア水和物繊維は、チタン酸カリ
ウムを酸で処理することにより、アナターゼ繊維は酸溶
液中で水熱処理することにより、ルチル繊維はチタニア
水和物繊維を1000’C以上で熱処理することにより
、それぞれ得られる。The titania hydrate fiber used in the present invention is produced by treating potassium titanate with an acid, the anatase fiber by hydrothermally treating it in an acid solution, and the rutile fiber by treating the titania hydrate fiber at 1000'C or more. Each can be obtained by heat treatment.
このチタニア繊維と水酸化バリウムと水の所定量を反応
容器にいれ100℃以上の温度で反応を行う。反応温度
が高いほど処理時間を少なくできるが、腐食や圧力の問
題で容器の材質・構造の選定が難しくなり経済的にも5
00℃以下で行うべきである。100%反応するための
時間は200℃で10時間、500℃で1時間以内であ
る。反応温度が100℃以下では反応に要する時間が長
くなるばかりでなく、100%反応させることが難しく
なる。The titania fibers, barium hydroxide, and water are placed in a reaction vessel in predetermined amounts and reacted at a temperature of 100° C. or higher. The higher the reaction temperature, the shorter the processing time, but problems such as corrosion and pressure make it difficult to select the material and structure of the container, making it less economical.
The temperature should be below 00°C. The time for 100% reaction is 10 hours at 200°C and within 1 hour at 500°C. If the reaction temperature is 100° C. or lower, not only will the time required for the reaction become longer, but it will also be difficult to achieve 100% reaction.
本反応は溶解−析出反応と考えられ、溶出したTiO2
と溶液中のバリウムが結合して微細な球状のチタン酸バ
リウムとしてチクニア繊維に析出する。その析出面が結
晶であるためその結晶軸が配向するもので、基板に結晶
を用いたエピタキシャルな薄膜の生成機構と同種のもの
と考えられる。This reaction is considered to be a dissolution-precipitation reaction, and the eluted TiO2
and barium in the solution combine to form fine spherical barium titanate and precipitate on the chikunia fibers. Since the precipitation surface is a crystal, its crystal axis is oriented, and it is thought to be similar to the generation mechanism of epitaxial thin films using crystals as substrates.
得られた生成物は、球状の微細なチタン酸バリウムがそ
の結晶軸が配向して繊維状に結合したもので、誘電・圧
電性の異方性を利用したデバイスの作製が可能になる、
原料の混合比(Ba○/ T i Oz)(以下BT比
と略記する)を小さくすると二酸化チタン繊維の表面に
球状のチタン酸バリウムがイ」着した形態を有する繊維
ができる。この繊維の基木は単結晶繊維(ウィスカー)
である。The resulting product is made of fine spherical barium titanate with its crystal axis oriented and bonded into fibers, making it possible to create devices that utilize dielectric and piezoelectric anisotropy.
When the mixing ratio (Ba○/T i Oz) (hereinafter abbreviated as BT ratio) of the raw materials is made small, a fiber having a form in which spherical barium titanate is deposited on the surface of the titanium dioxide fiber is produced. The base material of this fiber is single crystal fiber (whisker)
It is.
原料の混合比(BT比)が1.0を越えると繊維破壊が
激しくなり、1.5以上ではもはや繊維構造が維持され
なくなる。またBT比が0.2未満ではその誘電率の値
が通常の酸化チタンの値と変わらなくなる。When the mixing ratio (BT ratio) of raw materials exceeds 1.0, fiber destruction becomes severe, and when it exceeds 1.5, the fiber structure can no longer be maintained. Further, when the BT ratio is less than 0.2, the dielectric constant value is no different from that of ordinary titanium oxide.
〈作用〉
第3図に特性図を示す通り、BT比を変えることにより
、誘電率の値が100より1600までの範囲の生成物
を得ることができる。<Operation> As shown in the characteristic diagram in FIG. 3, by changing the BT ratio, products with dielectric constant values in the range of 100 to 1600 can be obtained.
また本発明の生成物は繊維状であって、その抗張力が大
きいので、強化プラスチフクの複合材料に適している。The products of the invention are also fibrous and have a high tensile strength, making them suitable for reinforced plastic composites.
〈実施例〉
尖嵐撚上
に、0・4TiO□で表される4チクン酸カリウムをフ
ラツクス法によって台底した。すなわち、二酸化チタン
・炭酸カリウム・モリブデン酸カリウムを所定量調合し
白金ルツボ中で1)00℃まで加熱後、5℃/時間の速
度で850℃まで冷却して、その後ル・シボを炉から取
り出して大気中で室温まで政令した。続いて生成物を水
洗いしてフラフクスを分離し、4チクン酸カリウムを得
た。<Example> Potassium tetraticunate, represented by 0.4TiO□, was applied to the top of the twisted wire by a flux method. That is, predetermined amounts of titanium dioxide, potassium carbonate, and potassium molybdate are prepared and heated in a platinum crucible to 1) 00°C, then cooled to 850°C at a rate of 5°C/hour, and then the le cibo is removed from the furnace. It was then allowed to reach room temperature in the atmosphere. Subsequently, the product was washed with water to separate the flafukus to obtain potassium tetraticunate.
次に、得られた4チタン酸カリウムを5N(規定)の塩
酸でカリウムを溶出させ4TiO2・2H20で表され
る二酸化チタン永和物繊維を作製した。Next, potassium was eluted from the obtained potassium tetratitanate with 5N (normal) hydrochloric acid to produce a titanium dioxide permanent fiber represented by 4TiO2.2H20.
この繊維のカリウム含有率は原子吸光法による測定にお
いて5 pHm以下であった。The potassium content of this fiber was 5 pHm or less as measured by atomic absorption spectrometry.
こうして得た二酸化チタン永和物繊維10g・水酸化バ
リウムの8水塩(B a (○H)z ・81−120
)のBT比1.0となる量35.5g ・純水35cc
を反応容器に入れ密閉した。このときの充填率は’に:
’J 80%である。次に反応容器を電気炉に投入し温
度200℃で10時間の反応を行った。得られた生成物
は粉末X線回折による測定でチタン酸バリウムのみの回
折ピークを示し、電子顕微鏡による観察では、第1図に
示すように、球状の微細な結晶粒子が集合した繊維形状
をしていた。そして、電子線回折の測定で結晶軸が配向
していることが認められた。10 g of titanium dioxide permanent fiber thus obtained and barium hydroxide octahydrate (B a (○H)z ・81-120
) amount to give a BT ratio of 1.0 35.5g ・35cc of pure water
was placed in a reaction vessel and sealed. The filling rate at this time is ':
'J 80%. Next, the reaction vessel was placed in an electric furnace and a reaction was carried out at a temperature of 200° C. for 10 hours. The obtained product showed a diffraction peak of only barium titanate when measured by powder X-ray diffraction, and when observed using an electron microscope, it had a fibrous shape consisting of a collection of fine spherical crystal particles, as shown in Figure 1. was. Electron diffraction measurements confirmed that the crystal axes were oriented.
実□るL墨:42す□□23□
実施例1と同様の方法で作製した二酸化チタン永和物繊
維を50%の酢酸(CH3CO○H)溶液中で温度20
0℃、10時間の水熱処理を行いアナターゼ型二酸化チ
タン繊維を得た。Actual L ink: 42 mm 23 mm Titanium dioxide elongated fiber produced in the same manner as in Example 1 was heated in a 50% acetic acid (CH3CO○H) solution at a temperature of 20 mL.
Hydrothermal treatment was performed at 0° C. for 10 hours to obtain anatase type titanium dioxide fibers.
アナターゼ型二酸化チタン10g・水酸化バリウムの8
水塩のBT比1.0となる量39.5g・純水85cc
を反応容器に入れ密閉し、電気炉に投入した。Anatase titanium dioxide 10g/barium hydroxide 8
39.5g amount of water salt with BT ratio of 1.0, 85cc of pure water
was placed in a reaction vessel, sealed, and placed in an electric furnace.
次に、温度200℃で10時間の反応を行い、実施例1
と同様の評価をおこなった。生成物は、第2図に示すよ
うに、球状粒子からなる結晶軸の配向したチタン酸バリ
ウム繊維であった。Next, a reaction was carried out at a temperature of 200°C for 10 hours, and Example 1
A similar evaluation was conducted. The product, as shown in FIG. 2, was a barium titanate fiber consisting of spherical particles with oriented crystal axes.
丈も一例1
実施例1と同様の方法で作製した二酸化チタン永和物繊
維をアルミナルツボに入れ、電気炉中で温度1200’
Cで2時間の熱処理を行い、ルチル型−酸化チタン繊維
をえた。The length is also an example 1 Titanium dioxide permanent fibers produced in the same manner as in Example 1 were placed in an alumina crucible and heated to a temperature of 1200' in an electric furnace.
A heat treatment was performed at C for 2 hours to obtain a rutile-type titanium oxide fiber.
二酸化チタン10g・水酸化バリウムの8水塩のBT比
1.0となる量39.5g・純水85ccを反応容器に
入れ密閉し、電気炉に投入した。次に、温度200℃で
10時間の反応を行い、実施例1と同様の評価を行った
。生成物を電子顕微鏡で観察したところ、実施例2の生
成物とよく似た、球状粒子からなる結晶軸の配向したチ
タン酸バリウム繊維であった。10 g of titanium dioxide, 39.5 g of barium hydroxide octahydrate in an amount that would give a BT ratio of 1.0, and 85 cc of pure water were placed in a reaction vessel, sealed, and placed in an electric furnace. Next, a reaction was performed at a temperature of 200° C. for 10 hours, and the same evaluation as in Example 1 was performed. When the product was observed under an electron microscope, it was found to be barium titanate fibers consisting of spherical particles with oriented crystal axes, very similar to the product of Example 2.
尖旌餘土
実施例1と同様の方法で作製した二酸化チタン永和物繊
維10g・水酸化バリウムの8水塩のBT比0.5とな
る1i17.75g・純水85ccを反応容器に入れ密
閉し、電気炉に投入した。次に、温度200’cで7時
間の反応を行い、実施例1と同様の評価をおこなった。10 g of titanium dioxide permanent fiber produced in the same manner as in Example 1, 17.75 g of barium hydroxide octahydrate with a BT ratio of 0.5, and 85 cc of pure water were placed in a reaction vessel and sealed. , and put it into an electric furnace. Next, a reaction was carried out at a temperature of 200'C for 7 hours, and the same evaluation as in Example 1 was carried out.
生成物を電子顕微鏡で観察したところ、実施例2の生成
物とよく似ており、二酸化チタン繊維に球状のチタン酸
バリウム粒子が付着した形態を有する繊維であった。When the product was observed under an electron microscope, it was found that it was very similar to the product of Example 2, and had a structure in which spherical barium titanate particles were attached to titanium dioxide fibers.
実廠拠工
実施例4で得た生成物を乳鉢で粉砕して、15<の成形
用の型に入れ1000 kg / ciの圧力でプレス
後、1200℃で焼結し厚さ約1關である円板状の試料
を作製した。この試料の両主面に銀ペーストで電極を形
威し誘電率を測定すると、353であった。The product obtained in Example 4 was crushed in a mortar, placed in a mold of 15 mm, pressed at a pressure of 1000 kg/ci, and then sintered at 1200°C to a thickness of about 1 inch. A disk-shaped sample was prepared. When electrodes were formed on both main surfaces of this sample using silver paste and the dielectric constant was measured, it was found to be 353.
〈発明の効果〉
0
本発明によれば、誘電率の値を100から1600の広
範囲にわたり任意に選定することが可能な新規な誘電材
料を得ることができた。しかも、カリウム、ナトリウム
等の半導体製造−L有害な元素を含んでおらず、繊維径
3μm以下と微細でありながら、抗張力が強いので、広
範囲な用途に適用することができ、例えば、EI1表示
素子の絶縁層材料などに好適である。<Effects of the Invention> 0 According to the present invention, a novel dielectric material whose dielectric constant value can be arbitrarily selected over a wide range of 100 to 1600 can be obtained. Furthermore, it does not contain elements harmful to semiconductor manufacturing such as potassium and sodium, and although the fibers are fine with a diameter of 3 μm or less, they have strong tensile strength, so they can be applied to a wide range of applications, such as EI1 display elements. Suitable for insulating layer materials, etc.
第1図は本発明の実施例1により得られた生成物の微細
構造を示す顕微鏡写真である。
第2図は本発明の実施例2により得られた生成物の微細
構造を示す顕微鏡写真である。
第3図は本発明の生成物の原料比率と誘電率の関係を示
す特性図である。FIG. 1 is a micrograph showing the microstructure of the product obtained according to Example 1 of the present invention. FIG. 2 is a micrograph showing the microstructure of the product obtained according to Example 2 of the present invention. FIG. 3 is a characteristic diagram showing the relationship between the raw material ratio and dielectric constant of the product of the present invention.
Claims (6)
状に結合してなる誘電体。(1) A dielectric material made of spherical microcrystalline particles of barium titanate bonded together in the form of fibers.
ウムが全重量の20%以上付着した、TiO_2−Ba
TiO_3系の繊維状誘電体。(2) TiO_2-Ba, in which spherical barium titanate is attached to the surface of titanium dioxide fiber by 20% or more of the total weight
TiO_3-based fibrous dielectric.
て10倍以上である請求項(1)または(2)に記載の
繊維状誘電体。(3) The fibrous dielectric material according to claim (1) or (2), wherein the fiber diameter is 0.2 to 3 μm and the length is 10 times or more the fiber diameter.
O、アナターゼ型酸化チタン繊維、ルチル型酸化チタン
繊維の何れかと、水酸化バリウムを混合比kで混合した
のち、水熱条件下で反応させることを特徴とする繊維状
誘電体の製造方法。(4) Titanium dioxide hydrate fiber TiO_2・nH_2
A method for producing a fibrous dielectric material, which comprises mixing barium hydroxide with O, anatase-type titanium oxide fiber, or rutile-type titanium oxide fiber at a mixing ratio k, and then reacting the mixture under hydrothermal conditions.
aOとTiO_2の量として(BaO/TiO_2)の
比が0.2〜1.5の範囲である請求項(4)に記載の
繊維状誘電体の製造方法。(5) The above mixing ratio k is B contained in each raw material.
The method for producing a fibrous dielectric according to claim 4, wherein the ratio of (BaO/TiO_2) in terms of the amounts of aO and TiO_2 is in the range of 0.2 to 1.5.
る請求項(4)に記載の繊維状誘電体の製造方法。(6) The method for producing a fibrous dielectric according to claim (4), wherein the reaction temperature is 100°C or higher.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20427389A JPH0369511A (en) | 1989-08-07 | 1989-08-07 | Fibrous dielectric and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20427389A JPH0369511A (en) | 1989-08-07 | 1989-08-07 | Fibrous dielectric and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0369511A true JPH0369511A (en) | 1991-03-25 |
Family
ID=16487747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20427389A Pending JPH0369511A (en) | 1989-08-07 | 1989-08-07 | Fibrous dielectric and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0369511A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0434809A (en) * | 1990-05-30 | 1992-02-05 | Otsuka Chem Co Ltd | Fibrous dielectric and manufacture thereof |
JPH04270119A (en) * | 1991-01-11 | 1992-09-25 | Daishinku Co | Fiber made of metallic salt of titanic acid and its production |
WO2000001618A1 (en) * | 1998-07-01 | 2000-01-13 | Cabot Corporation | Hydrothermal process for making barium titanate powders |
JP2000281340A (en) * | 1999-03-26 | 2000-10-10 | Konoshima Chemical Co Ltd | LAMINAR BaTiO3 PARTICLE AND ITS PRODUCTION |
JP2010150087A (en) * | 2008-12-25 | 2010-07-08 | Sakai Chem Ind Co Ltd | Titanium dioxide pigment and production method thereof |
JP2011006292A (en) * | 2009-06-26 | 2011-01-13 | Sakai Chem Ind Co Ltd | Titanium dioxide particles and method for producing the same |
JP2012166958A (en) * | 2011-02-09 | 2012-09-06 | Ohara Inc | Method for producing oxide single crystal |
WO2021024833A1 (en) * | 2019-08-08 | 2021-02-11 | Jnc株式会社 | Barium titanate fiber, resin composition containing same, polymer composite piezoelectric body, and method for producing barium titanate fiber |
JP2022012827A (en) * | 2020-07-02 | 2022-01-17 | Jnc株式会社 | Composite filler, resin composition containing the same, high polymer composite piezoelectric body, and piezoelectric device, as well as manufacturing method of composite filler |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55113623A (en) * | 1979-02-26 | 1980-09-02 | Kyushu Refract Co Ltd | Fibrous titanic acid metal salt and manufacture thereof |
JPS63260822A (en) * | 1987-02-24 | 1988-10-27 | Titan Kogyo Kk | Polycrystalline barium titanate fiber having oriented crystallographic axis |
-
1989
- 1989-08-07 JP JP20427389A patent/JPH0369511A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55113623A (en) * | 1979-02-26 | 1980-09-02 | Kyushu Refract Co Ltd | Fibrous titanic acid metal salt and manufacture thereof |
JPS63260822A (en) * | 1987-02-24 | 1988-10-27 | Titan Kogyo Kk | Polycrystalline barium titanate fiber having oriented crystallographic axis |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0434809A (en) * | 1990-05-30 | 1992-02-05 | Otsuka Chem Co Ltd | Fibrous dielectric and manufacture thereof |
JPH04270119A (en) * | 1991-01-11 | 1992-09-25 | Daishinku Co | Fiber made of metallic salt of titanic acid and its production |
WO2000001618A1 (en) * | 1998-07-01 | 2000-01-13 | Cabot Corporation | Hydrothermal process for making barium titanate powders |
JP2000281340A (en) * | 1999-03-26 | 2000-10-10 | Konoshima Chemical Co Ltd | LAMINAR BaTiO3 PARTICLE AND ITS PRODUCTION |
JP4674927B2 (en) * | 1999-03-26 | 2011-04-20 | 神島化学工業株式会社 | Plate-like BaTiO3 particles and synthesis method thereof |
JP2010150087A (en) * | 2008-12-25 | 2010-07-08 | Sakai Chem Ind Co Ltd | Titanium dioxide pigment and production method thereof |
JP2011006292A (en) * | 2009-06-26 | 2011-01-13 | Sakai Chem Ind Co Ltd | Titanium dioxide particles and method for producing the same |
JP2012166958A (en) * | 2011-02-09 | 2012-09-06 | Ohara Inc | Method for producing oxide single crystal |
WO2021024833A1 (en) * | 2019-08-08 | 2021-02-11 | Jnc株式会社 | Barium titanate fiber, resin composition containing same, polymer composite piezoelectric body, and method for producing barium titanate fiber |
JP2022012827A (en) * | 2020-07-02 | 2022-01-17 | Jnc株式会社 | Composite filler, resin composition containing the same, high polymer composite piezoelectric body, and piezoelectric device, as well as manufacturing method of composite filler |
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