JPH036668B2 - - Google Patents
Info
- Publication number
- JPH036668B2 JPH036668B2 JP57012730A JP1273082A JPH036668B2 JP H036668 B2 JPH036668 B2 JP H036668B2 JP 57012730 A JP57012730 A JP 57012730A JP 1273082 A JP1273082 A JP 1273082A JP H036668 B2 JPH036668 B2 JP H036668B2
- Authority
- JP
- Japan
- Prior art keywords
- gate
- active matrix
- insulating film
- line
- tft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 29
- 239000011159 matrix material Substances 0.000 claims description 27
- 239000004973 liquid crystal related substance Substances 0.000 claims description 17
- 230000015556 catabolic process Effects 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 5
- 230000003068 static effect Effects 0.000 description 15
- 230000005611 electricity Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57012730A JPS58130562A (ja) | 1982-01-29 | 1982-01-29 | アクティブマトリクス型液晶表示装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57012730A JPS58130562A (ja) | 1982-01-29 | 1982-01-29 | アクティブマトリクス型液晶表示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58130562A JPS58130562A (ja) | 1983-08-04 |
JPH036668B2 true JPH036668B2 (zh) | 1991-01-30 |
Family
ID=11813551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57012730A Granted JPS58130562A (ja) | 1982-01-29 | 1982-01-29 | アクティブマトリクス型液晶表示装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58130562A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58178553A (ja) * | 1982-04-13 | 1983-10-19 | Seiko Epson Corp | マトリツクスアレ− |
-
1982
- 1982-01-29 JP JP57012730A patent/JPS58130562A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58130562A (ja) | 1983-08-04 |
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