JPH0366145U - - Google Patents

Info

Publication number
JPH0366145U
JPH0366145U JP12729289U JP12729289U JPH0366145U JP H0366145 U JPH0366145 U JP H0366145U JP 12729289 U JP12729289 U JP 12729289U JP 12729289 U JP12729289 U JP 12729289U JP H0366145 U JPH0366145 U JP H0366145U
Authority
JP
Japan
Prior art keywords
pair
flat plate
plate electrodes
inductively coupled
coupled plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12729289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541496Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989127292U priority Critical patent/JPH0541496Y2/ja
Publication of JPH0366145U publication Critical patent/JPH0366145U/ja
Application granted granted Critical
Publication of JPH0541496Y2 publication Critical patent/JPH0541496Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP1989127292U 1989-10-31 1989-10-31 Expired - Lifetime JPH0541496Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989127292U JPH0541496Y2 (enrdf_load_stackoverflow) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989127292U JPH0541496Y2 (enrdf_load_stackoverflow) 1989-10-31 1989-10-31

Publications (2)

Publication Number Publication Date
JPH0366145U true JPH0366145U (enrdf_load_stackoverflow) 1991-06-27
JPH0541496Y2 JPH0541496Y2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=31675053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989127292U Expired - Lifetime JPH0541496Y2 (enrdf_load_stackoverflow) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0541496Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01252772A (ja) * 1988-03-31 1989-10-09 Ulvac Corp イオン注入装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01252772A (ja) * 1988-03-31 1989-10-09 Ulvac Corp イオン注入装置

Also Published As

Publication number Publication date
JPH0541496Y2 (enrdf_load_stackoverflow) 1993-10-20

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