JPH0364462U - - Google Patents

Info

Publication number
JPH0364462U
JPH0364462U JP12526889U JP12526889U JPH0364462U JP H0364462 U JPH0364462 U JP H0364462U JP 12526889 U JP12526889 U JP 12526889U JP 12526889 U JP12526889 U JP 12526889U JP H0364462 U JPH0364462 U JP H0364462U
Authority
JP
Japan
Prior art keywords
sample
tilting
vertical movement
optical axis
aperture plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12526889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12526889U priority Critical patent/JPH0364462U/ja
Publication of JPH0364462U publication Critical patent/JPH0364462U/ja
Pending legal-status Critical Current

Links

JP12526889U 1989-10-26 1989-10-26 Pending JPH0364462U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12526889U JPH0364462U (enrdf_load_stackoverflow) 1989-10-26 1989-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12526889U JPH0364462U (enrdf_load_stackoverflow) 1989-10-26 1989-10-26

Publications (1)

Publication Number Publication Date
JPH0364462U true JPH0364462U (enrdf_load_stackoverflow) 1991-06-24

Family

ID=31673147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12526889U Pending JPH0364462U (enrdf_load_stackoverflow) 1989-10-26 1989-10-26

Country Status (1)

Country Link
JP (1) JPH0364462U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52120758A (en) * 1976-04-05 1977-10-11 Hitachi Ltd Electronic microscope
JPS5413765A (en) * 1977-07-04 1979-02-01 Jeol Ltd Sample slanting equipment of scanning electron microscope or the like
JPS61220256A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd 試料微動装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52120758A (en) * 1976-04-05 1977-10-11 Hitachi Ltd Electronic microscope
JPS5413765A (en) * 1977-07-04 1979-02-01 Jeol Ltd Sample slanting equipment of scanning electron microscope or the like
JPS61220256A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd 試料微動装置

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