JPH0166747U - - Google Patents

Info

Publication number
JPH0166747U
JPH0166747U JP1987162430U JP16243087U JPH0166747U JP H0166747 U JPH0166747 U JP H0166747U JP 1987162430 U JP1987162430 U JP 1987162430U JP 16243087 U JP16243087 U JP 16243087U JP H0166747 U JPH0166747 U JP H0166747U
Authority
JP
Japan
Prior art keywords
backscattered electron
detection device
faraday cup
backscattered
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987162430U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987162430U priority Critical patent/JPH0166747U/ja
Publication of JPH0166747U publication Critical patent/JPH0166747U/ja
Pending legal-status Critical Current

Links

JP1987162430U 1987-10-26 1987-10-26 Pending JPH0166747U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987162430U JPH0166747U (enrdf_load_stackoverflow) 1987-10-26 1987-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987162430U JPH0166747U (enrdf_load_stackoverflow) 1987-10-26 1987-10-26

Publications (1)

Publication Number Publication Date
JPH0166747U true JPH0166747U (enrdf_load_stackoverflow) 1989-04-28

Family

ID=31446248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987162430U Pending JPH0166747U (enrdf_load_stackoverflow) 1987-10-26 1987-10-26

Country Status (1)

Country Link
JP (1) JPH0166747U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03165438A (ja) * 1989-11-24 1991-07-17 Nippon Denshi Tekunikusu Kk 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03165438A (ja) * 1989-11-24 1991-07-17 Nippon Denshi Tekunikusu Kk 荷電粒子線装置

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