JPH0363567U - - Google Patents
Info
- Publication number
- JPH0363567U JPH0363567U JP12635589U JP12635589U JPH0363567U JP H0363567 U JPH0363567 U JP H0363567U JP 12635589 U JP12635589 U JP 12635589U JP 12635589 U JP12635589 U JP 12635589U JP H0363567 U JPH0363567 U JP H0363567U
- Authority
- JP
- Japan
- Prior art keywords
- target
- substrate
- magnet
- detection device
- position detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 3
- 230000005672 electromagnetic field Effects 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635589U JPH0363567U (zh) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635589U JPH0363567U (zh) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363567U true JPH0363567U (zh) | 1991-06-20 |
Family
ID=31674169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12635589U Pending JPH0363567U (zh) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363567U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016514207A (ja) * | 2013-03-01 | 2016-05-19 | スパッタリング・コンポーネンツ・インコーポレーテッド | スパッタリング装置 |
-
1989
- 1989-10-26 JP JP12635589U patent/JPH0363567U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016514207A (ja) * | 2013-03-01 | 2016-05-19 | スパッタリング・コンポーネンツ・インコーポレーテッド | スパッタリング装置 |
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