JPH0359543B2 - - Google Patents

Info

Publication number
JPH0359543B2
JPH0359543B2 JP57084189A JP8418982A JPH0359543B2 JP H0359543 B2 JPH0359543 B2 JP H0359543B2 JP 57084189 A JP57084189 A JP 57084189A JP 8418982 A JP8418982 A JP 8418982A JP H0359543 B2 JPH0359543 B2 JP H0359543B2
Authority
JP
Japan
Prior art keywords
rotating disk
stainless steel
ion implantation
aluminum
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57084189A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5951448A (ja
Inventor
Toshimichi Taya
Eiji Myochin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57084189A priority Critical patent/JPS5951448A/ja
Publication of JPS5951448A publication Critical patent/JPS5951448A/ja
Publication of JPH0359543B2 publication Critical patent/JPH0359543B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP57084189A 1982-05-18 1982-05-18 イオン打込用回転円板の冷却機構 Granted JPS5951448A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57084189A JPS5951448A (ja) 1982-05-18 1982-05-18 イオン打込用回転円板の冷却機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57084189A JPS5951448A (ja) 1982-05-18 1982-05-18 イオン打込用回転円板の冷却機構

Publications (2)

Publication Number Publication Date
JPS5951448A JPS5951448A (ja) 1984-03-24
JPH0359543B2 true JPH0359543B2 (enrdf_load_stackoverflow) 1991-09-10

Family

ID=13823521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57084189A Granted JPS5951448A (ja) 1982-05-18 1982-05-18 イオン打込用回転円板の冷却機構

Country Status (1)

Country Link
JP (1) JPS5951448A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6977392B2 (en) 1991-08-23 2005-12-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor display device
US7420628B1 (en) 1991-02-16 2008-09-02 Semiconductor Energy Laboratory Co., Ltd. Method of making an active-type LCD with digitally graded display
US7489367B1 (en) 1991-03-26 2009-02-10 Semiconductor Energy Laboratory, Co., Ltd. Electro-optical device and method for driving the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420628B1 (en) 1991-02-16 2008-09-02 Semiconductor Energy Laboratory Co., Ltd. Method of making an active-type LCD with digitally graded display
US7489367B1 (en) 1991-03-26 2009-02-10 Semiconductor Energy Laboratory, Co., Ltd. Electro-optical device and method for driving the same
US6977392B2 (en) 1991-08-23 2005-12-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor display device

Also Published As

Publication number Publication date
JPS5951448A (ja) 1984-03-24

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