JPH0359386A - Surface drying device - Google Patents

Surface drying device

Info

Publication number
JPH0359386A
JPH0359386A JP19262189A JP19262189A JPH0359386A JP H0359386 A JPH0359386 A JP H0359386A JP 19262189 A JP19262189 A JP 19262189A JP 19262189 A JP19262189 A JP 19262189A JP H0359386 A JPH0359386 A JP H0359386A
Authority
JP
Japan
Prior art keywords
liquid
laser beam
projecting
objective matter
laser beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19262189A
Other languages
Japanese (ja)
Inventor
Masao Matsumura
正夫 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP19262189A priority Critical patent/JPH0359386A/en
Publication of JPH0359386A publication Critical patent/JPH0359386A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To dry the surface of an objective matter efficiently in a short period of time while maintaining clean environment and remove liquid adhered to the surface by providing the projecting means of laser beams, having a wave length absorbed selectively by the liquid adhered to the surface of the objective matter, against the surface of the objective matter. CONSTITUTION:A surface drying device 10 includes a laser beam generating device 12 and a laser beam projecting device 14, projecting laser beams B against liquid L adhered to the upper side surface of an objective matter W. The laser beams B, having a wave length absorbed by the liquid L selectively, are selected. Upon removing the liquid L adhered to the surface of the objective matter W, the laser beams B, generated by the laser beam generating device 12, are projected from the laser beam projecting device 14 against the liquid L to evaporate the liquid in a projecting range instantaneously. The projecting position of the laser beams B is moved across the whole surface area of the objective matter W in cooperation with the operation of a turn table whereby the drying of the objective matter W may be finished.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、洗浄液、塗料等の各種液体が表面に付着して
濡れた状態となった対象物を乾燥して、その表面に付着
した液体を除去する表面乾燥装置に関する。
[Detailed Description of the Invention] [Industrial Field of Application] The present invention is directed to drying an object that has become wet due to various liquids such as cleaning fluids and paints adhering to its surface. The present invention relates to a surface drying device for removing.

[従来の技術] 洗浄液による洗浄作業、液体塗料による塗布作業、その
他において、対象物の表面に各種液体が付着して濡れた
状態となる場合が種々存在する。
[Prior Art] In cleaning work using a cleaning liquid, application work using a liquid paint, and others, there are various cases in which various liquids adhere to the surface of an object and the object becomes wet.

ここで、対tvAの表嘱に各風板体を信看ち姪寸;tま
でいると、該液体が不純物として悪影響を及ぼしてしま
う場合がある。
Here, if each air plate is used to the extent that the air pressure is applied to the surface of the tvA, the liquid may act as an impurity and have an adverse effect.

そのため、従来、対象物が濡れた状態になった後に、対
象物の表面を乾燥するため、該対象物は乾燥炉の様な設
備に搬入されていた。そして、該設備内部で熱風等が対
象物の表面に当てられて、表面が乾燥し付着した液体が
除去されるのである。
Therefore, conventionally, after the object becomes wet, the object is transported into equipment such as a drying oven in order to dry the surface of the object. Then, hot air or the like is applied to the surface of the object inside the equipment to dry the surface and remove the adhering liquid.

[発明が解決しようとする課題] しかし、上記したような従来の熱風等を利用した乾燥装
置では、清浄な雰囲気を維持しつつ、短時間で能率的に
対象物表面を乾燥することができなかった。すなわち、
除去の対象となる液体が、熱伝達、熱伝導、幅射熱によ
り比較的穏やかに気化、蒸発してゆくので、該液体中の
不純物が濃縮されたり、熱風そのものが汚染物質を運搬
あるいは拡散してしまうという問題点が存在したのであ
る。
[Problems to be Solved by the Invention] However, with the conventional drying equipment using hot air, etc. as described above, it is not possible to efficiently dry the surface of an object in a short time while maintaining a clean atmosphere. Ta. That is,
Since the liquid to be removed evaporates and evaporates relatively gently due to heat transfer, thermal conduction, and radiation, impurities in the liquid may become concentrated, or the hot air itself may transport or diffuse contaminants. There was a problem that the

本発明は上記した従来技術の問題点に鑑みて創作された
もので、清浄な雰囲気を維持しつつ短時間で能率的に対
象物表面を乾燥して、そこに付着した液体を除去するこ
とができる表面乾燥装置の提供を目的としている。
The present invention was created in view of the problems of the prior art described above, and is capable of efficiently drying the surface of an object in a short period of time while maintaining a clean atmosphere, and removing liquid attached thereto. The purpose is to provide a surface drying device that can

[課題を解決するための手段] 本発明の表面乾燥装置は、対象物の表面に付着した液体
を除去するための表面乾燥装置において、対象物の表面
にレーザ光を照射する手段を設け、該レーザ光は対象物
の表面に付着した液体に選択的に吸収される波長となっ
ている。
[Means for Solving the Problems] The surface drying device of the present invention is a surface drying device for removing liquid adhering to the surface of an object, and includes means for irradiating the surface of the object with a laser beam. The laser beam has a wavelength that is selectively absorbed by the liquid attached to the surface of the object.

本発明を実施するに際して、対象物は固定されていても
良く、或いは回転可能に支持されてレーザ光照射に伴っ
て回転されるように構成しても良い。
In carrying out the present invention, the object may be fixed, or may be rotatably supported and rotated as the object is irradiated with laser light.

また、対象物の表面に付着した液体に選択的に吸収され
るレーザ光としては、例えば、該液体が水の場合はCO
又はCO2レーザが用いられる。
In addition, as a laser beam that is selectively absorbed by a liquid attached to the surface of an object, for example, when the liquid is water, CO
Or a CO2 laser is used.

但し、より選択性の良い各種レーザを用いることも可能
である。
However, it is also possible to use various lasers with better selectivity.

[作用] 上記のような構成を有する本発明の表面乾燥装置によれ
ば、対象物表面のレーザ光照射範囲上に付着した液体は
、レーザ光の照射によって瞬時に気化、蒸発する。その
ため、熱風等を用いた場合の様に、液体中の不純物が徐
々に濃縮されたり、汚染物質が運搬あるいは拡散されて
しまうことは無い。
[Operation] According to the surface drying device of the present invention having the above-described configuration, the liquid adhering to the laser beam irradiation range on the surface of the object is instantaneously vaporized and evaporated by the laser beam irradiation. Therefore, unlike when hot air is used, impurities in the liquid are not gradually concentrated, and contaminants are not transported or diffused.

ここで、前記レーザ光は、対象物の表面に付着した液体
に選択的に吸収される波長となっているので、レーザ光
の照射により対象物の表面が傷んでしまうことはない。
Here, since the laser beam has a wavelength that is selectively absorbed by the liquid attached to the surface of the object, the surface of the object will not be damaged by irradiation with the laser beam.

[実施例] 以下、添付図面を参照して、本発明の1実施例について
説明する。
[Example] Hereinafter, an example of the present invention will be described with reference to the accompanying drawings.

第1図において、全体を符号10で示す表面乾燥装置は
、レーザ光発生装置12と、対象物Wの上側表面に付着
した液体りにレーザ光Bを照射するレーザ光照射装置1
4とを含んでいる。ここで、レーザ光線Bは、液体りに
選択的に吸収されるような波長を有するものが選定され
る。換言すると、レーザ光線Bは液体りの種類によって
決定されるのである。
In FIG. 1, the surface drying device, which is generally designated by the reference numeral 10, includes a laser beam generator 12 and a laser beam irradiation device 1 that irradiates a liquid adhered to the upper surface of an object W with a laser beam B.
Contains 4. Here, the laser beam B is selected to have a wavelength that is selectively absorbed by the liquid. In other words, the laser beam B is determined by the type of liquid.

なお、第1図では明確に示されていないが、レーザ光照
射装置14にはレーザ光Bの照射位置を矢印Aで示すよ
うに移動する機構が設けられている。また、対象物Wは
、図示しない回転テーブルに載置されている。
Although not clearly shown in FIG. 1, the laser beam irradiation device 14 is provided with a mechanism for moving the irradiation position of the laser beam B as shown by arrow A. Further, the object W is placed on a rotating table (not shown).

対象物Wの表面に付着した液体りを除去するに際して、
レーザ光発生装置12により発生したレーザ光Bはレー
ザ光照射装置14から液体りに照射され、照射範囲上の
該液体を瞬時に蒸発せしめる。そして、図示しない回転
テーブルの作動と相俟って、レーザ光Bの照射位置は対
象物Wの表面全域に亘って移動(走査)される。これに
より、対象物Wの乾燥が完了するのである。
When removing liquid adhering to the surface of the object W,
The laser beam B generated by the laser beam generator 12 is irradiated onto the liquid from the laser beam irradiator 14, and instantaneously evaporates the liquid on the irradiation range. In conjunction with the operation of a rotary table (not shown), the irradiation position of the laser beam B is moved (scanned) over the entire surface of the object W. This completes drying of the object W.

第2図および第3図は、レーザ光照射装置14の実施例
をそれぞれ示している。
2 and 3 show examples of the laser beam irradiation device 14, respectively.

第2図において、レーザ光発生装置12には光ファイバ
18が接続されており、該発生装置12で発生したレー
ザ光は光フアイバ18内を通過して、その先端部19か
らレーザ光Bとして照射される。この先端部19は移動
ヘッド20に支持、固定されており、該移動ヘッド20
は案内部材22上を矢印Aで示すように摺動移動する。
In FIG. 2, an optical fiber 18 is connected to the laser beam generator 12, and the laser beam generated by the generator 12 passes through the optical fiber 18 and is irradiated as laser beam B from its tip 19. be done. This tip portion 19 is supported and fixed to a moving head 20, and the moving head 20
slides on the guide member 22 as shown by arrow A.

なお、移動ヘッド20を案内部材22上で摺動移動する
ための手段として各種アクチュエータ等を利用すること
が出来るが、図示は省略しである。
Note that various actuators and the like can be used as means for slidingly moving the movable head 20 on the guide member 22, but they are not shown.

第3図で示す実施例では、前記案内部材22がガイド2
4上をさらに摺動移動するようになっている。ここで、
案内部材22の摺動部には、ガイドローラ方式を採用す
ることもできるし、また磁気浮上方式を採用することも
できる。この場合、ゴミ発生防止という観点からは磁気
浮上方式が好ましいが、設備の簡略化の点からはガイド
ローラ方式が好ましい。すなわち、状況に応じて両方式
が採用可能である。
In the embodiment shown in FIG.
4. It is designed to move further by sliding on the top. here,
For the sliding portion of the guide member 22, a guide roller system or a magnetic levitation system may be employed. In this case, the magnetic levitation method is preferable from the viewpoint of preventing dust generation, but the guide roller method is preferable from the viewpoint of simplifying the equipment. In other words, both methods can be adopted depending on the situation.

なお、レーザ光発生装置12で発生したレーザ光を通過
せしめるレーザ光誘導部材としては、ファイバ以外のも
のを用いることも可能であるが、軽量化という観点から
は、ファイバが最も好ましい。
Although it is possible to use something other than a fiber as the laser beam guide member through which the laser beam generated by the laser beam generator 12 passes, a fiber is most preferable from the viewpoint of weight reduction.

[発明の効果] 以上説明したように、本発明による表面乾燥装置によれ
ば、対象物の表面に付着した液体にレーザ光を照射する
ことで、照射範囲上の液体を瞬時に気化、蒸発すること
ができる。しかも、対象物の表面を傷める事がない。
[Effects of the Invention] As explained above, according to the surface drying device of the present invention, by irradiating the liquid attached to the surface of the object with laser light, the liquid on the irradiation range is instantaneously vaporized and evaporated. be able to. Moreover, it does not damage the surface of the object.

そのため、乾燥作業の高能率化、雰囲気の清浄化が同時
に達成されるのである。
Therefore, high efficiency of drying work and clean atmosphere can be achieved at the same time.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の1実施例を簡略化して示す正面図、第
2図は本発明で用いられるレーザ光発生装置のl実施例
を示す斜視図、第3図は本発明で用いられるレーザ光発
生装置のその他の実施例を示す斜視図である。 IO・・・表面乾燥装置  12・・・レーザ光発生装
置  14・・・レーザ光照射装置  B・・・レーザ
光L・・・液体  W・・・対象物 第 図 2
FIG. 1 is a simplified front view of one embodiment of the present invention, FIG. 2 is a perspective view of an embodiment of a laser beam generator used in the present invention, and FIG. 3 is a simplified front view of one embodiment of the present invention. FIG. 7 is a perspective view showing another embodiment of the light generating device. IO...Surface drying device 12...Laser beam generator 14...Laser beam irradiation device B...Laser beam L...Liquid W...Target figure 2

Claims (1)

【特許請求の範囲】[Claims] 対象物の表面に付着した液体を除去するための表面乾燥
装置において、対象物の表面にレーザ光を照射する手段
を設け、該レーザ光は対象物の表面に付着した液体に選
択的に吸収される波長である事を特徴とする表面乾燥装
置。
A surface drying device for removing liquid adhering to the surface of an object is provided with means for irradiating the surface of the object with laser light, and the laser beam is selectively absorbed by the liquid adhering to the surface of the object. This is a surface drying device that is characterized by its wavelength.
JP19262189A 1989-07-27 1989-07-27 Surface drying device Pending JPH0359386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19262189A JPH0359386A (en) 1989-07-27 1989-07-27 Surface drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19262189A JPH0359386A (en) 1989-07-27 1989-07-27 Surface drying device

Publications (1)

Publication Number Publication Date
JPH0359386A true JPH0359386A (en) 1991-03-14

Family

ID=16294305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19262189A Pending JPH0359386A (en) 1989-07-27 1989-07-27 Surface drying device

Country Status (1)

Country Link
JP (1) JPH0359386A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133058A (en) * 1983-01-21 1984-07-31 Nippon Insatsu Seihon Shiko Kikai Kougiyoukai Ink dryer for printed matter
JPH01105952A (en) * 1987-10-19 1989-04-24 Nissha Printing Co Ltd Production of light shielding plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133058A (en) * 1983-01-21 1984-07-31 Nippon Insatsu Seihon Shiko Kikai Kougiyoukai Ink dryer for printed matter
JPH01105952A (en) * 1987-10-19 1989-04-24 Nissha Printing Co Ltd Production of light shielding plate

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