JPH035862Y2 - - Google Patents
Info
- Publication number
- JPH035862Y2 JPH035862Y2 JP11376786U JP11376786U JPH035862Y2 JP H035862 Y2 JPH035862 Y2 JP H035862Y2 JP 11376786 U JP11376786 U JP 11376786U JP 11376786 U JP11376786 U JP 11376786U JP H035862 Y2 JPH035862 Y2 JP H035862Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- photoresist
- suction tube
- support member
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 238000005507 spraying Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000010977 unit operation Methods 0.000 description 1
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11376786U JPH035862Y2 (ko) | 1986-07-24 | 1986-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11376786U JPH035862Y2 (ko) | 1986-07-24 | 1986-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6320023U JPS6320023U (ko) | 1988-02-09 |
| JPH035862Y2 true JPH035862Y2 (ko) | 1991-02-14 |
Family
ID=30995882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11376786U Expired JPH035862Y2 (ko) | 1986-07-24 | 1986-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH035862Y2 (ko) |
-
1986
- 1986-07-24 JP JP11376786U patent/JPH035862Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6320023U (ko) | 1988-02-09 |
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