JPH0357419B2 - - Google Patents
Info
- Publication number
- JPH0357419B2 JPH0357419B2 JP59500648A JP50064884A JPH0357419B2 JP H0357419 B2 JPH0357419 B2 JP H0357419B2 JP 59500648 A JP59500648 A JP 59500648A JP 50064884 A JP50064884 A JP 50064884A JP H0357419 B2 JPH0357419 B2 JP H0357419B2
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- pressure
- dome
- pressure chamber
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/164—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by holographic interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1984/000002 WO1985003123A1 (en) | 1984-01-05 | 1984-01-05 | Apparatus for the practice of double exposure interferometric non-destructive testing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61501046A JPS61501046A (ja) | 1986-05-22 |
| JPH0357419B2 true JPH0357419B2 (enExample) | 1991-09-02 |
Family
ID=22181994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59500648A Granted JPS61501046A (ja) | 1984-01-05 | 1984-01-05 | 二重露光式干渉測定非破壊試験を行う装置 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0167530A1 (enExample) |
| JP (1) | JPS61501046A (enExample) |
| WO (1) | WO1985003123A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5786533A (en) * | 1996-04-17 | 1998-07-28 | Michelin North America, Inc. | Method for analyzing a separation in a deformable structure |
| NO20002601L (no) * | 1999-10-29 | 2001-04-30 | Holo Tech As | Metode og utstyr for ikke-destruktiv bestemmelse av restspenninger gjennom optisk holografisk interferometer teknikk |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR573492A (fr) * | 1923-02-09 | 1924-06-25 | Appareil pour le remplissage des ampoules médicales | |
| US3111074A (en) * | 1961-10-05 | 1963-11-19 | Jr Dwight C Kennard | Evacuation chamber |
| US3818649A (en) * | 1972-12-18 | 1974-06-25 | H Klievoneit | Method for fabricating a discfile |
| US3998347A (en) * | 1975-10-31 | 1976-12-21 | Cha Industries | Creep resistant sealing arrangement for bell jar |
| US4234256A (en) * | 1978-04-03 | 1980-11-18 | The Goodyear Tire & Rubber Company | Determining depth location of separations within a tire |
| US4425039A (en) * | 1982-05-07 | 1984-01-10 | Industrial Holographics, Inc. | Apparatus for the practice of double exposure interferometric non-destructive testing |
-
1984
- 1984-01-05 WO PCT/US1984/000002 patent/WO1985003123A1/en not_active Ceased
- 1984-01-05 JP JP59500648A patent/JPS61501046A/ja active Granted
- 1984-01-05 EP EP19840900655 patent/EP0167530A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| WO1985003123A1 (en) | 1985-07-18 |
| JPS61501046A (ja) | 1986-05-22 |
| EP0167530A1 (en) | 1986-01-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4425039A (en) | Apparatus for the practice of double exposure interferometric non-destructive testing | |
| JP3576176B2 (ja) | ガス軸受を有する支持装置 | |
| US4420223A (en) | Optical apparatus having a mirror | |
| US6281654B1 (en) | Method for making apparatus with dynamic support structure isolation and exposure method | |
| KR100555930B1 (ko) | 리소그래피 장치, 디바이스 제조방법 및 그 디바이스 | |
| US20090153832A1 (en) | Apparatus and method for isolating vibrations in a lithography machine using two active control units | |
| JPH0310058B2 (enExample) | ||
| CA2088381A1 (en) | Gimbal vibration isolation system | |
| US20090168036A1 (en) | Exposure apparatus, structure, method for setting up apparatus, and device manufacturing method | |
| JPH0357419B2 (enExample) | ||
| US6028351A (en) | Gasket sealed integrated circuit package | |
| CN111103671B (zh) | 用于离轴三反光学系统的分光棱镜组件及其操作方法 | |
| US4510575A (en) | Method for writing holograms | |
| US7907358B2 (en) | Holding apparatus and exposure apparatus | |
| JP2001242364A (ja) | 光学素子の保持機構、および該保持機構によって構成された投影光学系を備える露光装置 | |
| EP0334871A1 (en) | Analysis of periodic motions using moire fringes | |
| JPS6386430A (ja) | パタ−ン転写方法 | |
| US2266381A (en) | Piezoelectric apparatus | |
| US2641958A (en) | Method and test equipment for measuring the quality of glass surfaces of unusually large dimensions under different supporting and loading conditions | |
| JP2520965B2 (ja) | 弾性体の面形状の光学的計測方法およびその装置 | |
| US5025285A (en) | Apparatus and method for shadow moire mapping | |
| JPH061090B2 (ja) | 免震支持装置 | |
| Mannery et al. | Design of the Apache Point Observatory 3.5 m Telescope III. Primary mirror support system | |
| TWI874510B (zh) | 用於薄晶圓的振動與環境的隔離之腔室 | |
| US5305152A (en) | Evacuated optical structure comprising optical bench mounted to sidewall of vacuum chamber in a manner which inhibits deflection and rotation of the optical bench |