JPH0356007A - Magnetic levitation conveyor - Google Patents
Magnetic levitation conveyorInfo
- Publication number
- JPH0356007A JPH0356007A JP1189086A JP18908689A JPH0356007A JP H0356007 A JPH0356007 A JP H0356007A JP 1189086 A JP1189086 A JP 1189086A JP 18908689 A JP18908689 A JP 18908689A JP H0356007 A JPH0356007 A JP H0356007A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic levitation
- floating
- storage battery
- truck
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 title claims abstract description 31
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000000428 dust Substances 0.000 abstract description 7
- 230000001846 repelling effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/60—Other road transportation technologies with climate change mitigation effect
- Y02T10/7072—Electromobility specific charging systems or methods for batteries, ultracapacitors, supercapacitors or double-layer capacitors
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Electric Propulsion And Braking For Vehicles (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は塵埃を全く発生させずに完全に非接触状態で物
品の搬送を行うための磁気浮上搬送装置に関する．
〔従来の技術〕
近年と超高密度集積回路（超ＬＳＩ）の高集積化と微細
化とは目覚しいものがあり、その製造工程では、空気中
の塵埃量が製品の歩留りを大きく左右するため、極めて
高い清浄度が要求されている．このため、発塵源となる
ものはすべて排除する努力が払われており、ウェハの搬
送装置においては、摺動や摩擦がなくて完全に非接触状
態で搬送することができる磁気浮上搬送装置が注目され
ている．
一般に磁気浮上搬送装置は、磁気浮上部とその駆動源で
ある蓄電池とを内蔵した浮上台車と、この浮上台車がそ
の上を走行する軌道とを備えて構戒されている．浮上台
車は軌道とは完全に非接触状態で空中に浮いており、そ
の浮上のためのエネルギー源は、磁気浮上部に内蔵した
蓄電池である．したがって、蓄電池の電力がなくなると
浮上できなくなるため、一定時間間隔に給電する必要が
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic levitation conveyance device for conveying articles in a completely non-contact manner without generating any dust. [Prior art] In recent years, the integration and miniaturization of ultra-high-density integrated circuits (VLSI) have been remarkable, and in the manufacturing process, the amount of dust in the air greatly affects the yield of the product. Extremely high cleanliness is required. For this reason, efforts are being made to eliminate all sources of dust generation, and magnetic levitation transfer devices, which can transfer wafers in a completely non-contact manner without sliding or friction, are being used as wafer transfer devices. Attention has been paid. In general, a magnetic levitation transport device is equipped with a levitation cart containing a magnetic levitation unit and a storage battery that is its driving source, and a track on which the levitation cart runs. The levitation vehicle floats in the air completely without contact with the track, and the energy source for its levitation is a storage battery built into the magnetic levitation unit. Therefore, if the storage battery runs out of power, it will no longer be able to float, so it is necessary to supply power at regular intervals.
従来の磁気浮上搬送装置の給電方式としては、接触式の
ものが用いられている．第３図は、これを利用した磁気
浮上搬送装置の一例を示す斜視図、第４図はその給電方
式の構成を示すブロック図である．第３図および第４図
に示すように、磁気浮上搬送装置は、磁気の吸引力また
は反発力を利用して非接触状態で浮上するための磁気浮
上部１２とその駆動源である蓄電池１３とを内蔵し、被
搬送物４を搭載して軌道１５上を浮上して走行する浮上
台車１１と、外部から給電を受けるため浮上台車１１の
側面に設けた集電端子１４と、この集電端子１４と接触
して電気的接続を行う電極１８と、これを機械的に移動
させる電極移動装置１つと、外部から電極１８および集
電端子１７を介して蓄電池１３を充電する充電回路１７
および外部電源１６とを備えている．
浮上台車１１の蓄電池１３の電力が低下して給電を行う
場合は、浮上台車１１を所定の位置に停止させ、電極移
動装置１９によって電＄ｉ１８を移動させて集電端子１
４に接触させて電気的に接続する。次に外部に設置した
充電回路１７と外部電源１６とによって蓄電池１３を充
電する．充電が終了すると、電極移動装置１３を逆方向
に動かして電極１８と集電端子１４を分離して浮上台車
１１を走行可能状態とする．
〔発明が解決しようとする課題〕
上述したような従来の磁気浮上搬送装置は、蓄電池への
給電を接触式で行っているため、接触部に摺動や摩擦が
生じて塵埃が発生するという欠点がある．また、電極移
動装置が動作することによっても発塵が起こるという欠
点もある．〔課題を解決するための手段〕
本発明の磁気浮上搬送装置は、磁気浮上部と前記磁気浮
上部の駆動源である蓄電池とを内蔵して被搬送物を搭載
して軌道上を浮上して走行する浮上台車と、前記浮上台
車の走行方向に対して直角方向の外側面に取付けた太陽
電池と、前記浮上台車に内蔵され前記太陽電池で発電し
た電力を前記蓄電池に充電する充電回路と、所定の位置
に停止した前記浮上台車の前記太陽電池に対して光を照
射する投光装置とを−備えている。Conventional magnetic levitation transport devices use a contact type power supply system. FIG. 3 is a perspective view showing an example of a magnetic levitation transport device using this, and FIG. 4 is a block diagram showing the configuration of its power supply system. As shown in FIGS. 3 and 4, the magnetic levitation transport device includes a magnetic levitation section 12 for levitating in a non-contact state using magnetic attraction or repulsion, and a storage battery 13 as its driving source. A floating trolley 11 which has a built-in object 4 and floats on a track 15 and travels, a current collecting terminal 14 provided on the side surface of the floating trolley 11 to receive power from the outside, and this current collecting terminal. 14, an electrode moving device that mechanically moves the electrode 18, and a charging circuit 17 that charges the storage battery 13 from the outside via the electrode 18 and the current collecting terminal 17.
and an external power supply 16. When the electric power of the storage battery 13 of the floating carriage 11 has decreased and power is to be supplied, the floating carriage 11 is stopped at a predetermined position, and the electrode moving device 19 moves the electricity $i18 to the current collecting terminal 1.
4 to make an electrical connection. Next, the storage battery 13 is charged by an externally installed charging circuit 17 and an external power source 16. When charging is completed, the electrode moving device 13 is moved in the opposite direction to separate the electrode 18 and current collecting terminal 14, and the floating cart 11 is made ready to travel. [Problems to be Solved by the Invention] The conventional magnetic levitation conveyance device as described above uses a contact method to supply power to the storage battery, which has the drawback of generating dust due to sliding and friction at the contact portion. There is. Another disadvantage is that dust is generated due to the operation of the electrode moving device. [Means for Solving the Problems] The magnetic levitation transport device of the present invention has a built-in magnetic levitation unit and a storage battery that is a drive source for the magnetic levitation unit, and carries a transported object while floating on an orbit. a traveling floating truck; a solar cell attached to an outer surface of the floating truck in a direction perpendicular to the traveling direction; a charging circuit built into the floating truck and charging the storage battery with electric power generated by the solar cell; and a light projecting device that irradiates light onto the solar cells of the floating trolley stopped at a predetermined position.
次に、本発明の実施例について図面を参照して詳細に説
明する．
第ｌ図は本発明の一実施例を示す斜視図、第２図は第１
図の実施例の給電方式の構成を示すブロック図である．
第１図および第２図において、浮上台車１は、磁気の吸
引力または反発力を利用して非接触状態で浮上するため
の磁気浮上部２と、その駆動源である蓄電池３を内蔵し
ており、被搬送物４を搭載して軌道５上を非接触状態で
浮上して走行する．この浮上台車１の走行方向と直角方
向の外側面には、太陽電池６を取付けてある．この太陽
電池６で発電した電力を蓄電池３に充電するための充電
回路７が浮上台車１に内蔵されている．浮上台車１が給
電のために停止する位置には投光装置８が設置してあり
、太陽電池６に投光装置８からの光が正しく照射するよ
うにその位置を調整してある。Next, embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 is a perspective view showing one embodiment of the present invention, and Fig. 2 is a perspective view showing one embodiment of the present invention.
FIG. 2 is a block diagram showing the configuration of the power feeding system of the embodiment shown in the figure. In FIGS. 1 and 2, a levitation cart 1 has a built-in magnetic levitation section 2 for levitating in a non-contact state using magnetic attraction or repulsion, and a storage battery 3 as its driving source. The vehicle carries the transported object 4 and floats on the track 5 in a non-contact state. A solar cell 6 is attached to the outer surface of the floating trolley 1 in a direction perpendicular to the traveling direction. A charging circuit 7 for charging the storage battery 3 with the power generated by the solar cell 6 is built into the floating trolley 1. A light projector 8 is installed at a position where the floating cart 1 stops for power supply, and its position is adjusted so that the solar cell 6 is correctly irradiated with light from the light projector 8.
浮上台車１の蓄電池３の電力が低下し給電を行うときは
、浮上台車１を所定の位置に停止させ、投光装置８によ
って太陽電池６に対して照射する。When the electric power of the storage battery 3 of the floating carriage 1 is reduced and power needs to be supplied, the floating carriage 1 is stopped at a predetermined position, and the solar cell 6 is irradiated by the light projecting device 8.
これによって太陽電池６が発電し、その電力は充電回路
７を介して蓄電池３を充電する。充電が終了すると、投
光装置８の電源を切断して光の照射を停止する．
〔発明の効果〕
以上説明したように、本発明の磁気浮上搬送装置は、浮
上台車に取付けた太陽電池に投光装置から光を照射する
ことによって完全に非接触状態で充電を行うことができ
るため、塵埃の発生を完全に防止することができるとい
う効果がある．This causes the solar cell 6 to generate electricity, which charges the storage battery 3 via the charging circuit 7. When charging is completed, the power to the light projecting device 8 is cut off to stop emitting light. [Effects of the Invention] As explained above, the magnetic levitation transport device of the present invention can charge the solar cells attached to the levitation cart in a completely non-contact state by irradiating light from the light projection device. This has the effect of completely preventing the generation of dust.
第１図は本発明の一実施例を示す斜視図、第２図は第１
図の実施例の給電方式の構成を示すブロック図、第３図
は従来の磁気浮上搬送装置の一例を示す斜視図、第４図
は第３図の例の充電方式を示すブロック図である。
１・１１・・・浮上台車、２・１２・・・磁気浮上部、
３・１３・・・蓄電池、４・・・被搬送物、５・１５・
・・軌道、６・・・太陽電池、７・１７・・・充電回路
、８・・・投光装置、１４・・・集電端子、１６・・・
外部電源、１８・・・電極、１９・・・電極移動装置。FIG. 1 is a perspective view showing one embodiment of the present invention, and FIG. 2 is a perspective view showing one embodiment of the present invention.
FIG. 3 is a perspective view showing an example of a conventional magnetic levitation conveyance device, and FIG. 4 is a block diagram showing the charging method of the example shown in FIG. 3. 1.11... Levitation trolley, 2.12... Magnetic levitation unit,
3.13... Storage battery, 4... Transported object, 5.15.
... Orbit, 6... Solar cell, 7.17... Charging circuit, 8... Light projector, 14... Current collector terminal, 16...
External power supply, 18... Electrode, 19... Electrode moving device.
Claims (1)
内蔵して被搬送物を搭載して軌道上を浮上して走行する
浮上台車と、前記浮上台車の走行方向に対して直角方向
の外側面に取付けた太陽電池と、前記浮上台車に内蔵さ
れ前記太陽電池で発電した電力を前記蓄電池に充電する
充電回路と、所定の位置に停止した前記浮上台車の前記
太陽電池に対して光を照射する投光装置とを備えること
を特徴とする磁気浮上搬送装置。A levitation truck that has a built-in magnetic levitation unit and a storage battery that is a driving source for the magnetic levitation unit and that carries an object to be transported and travels floating on a track, and A solar cell attached to an outer surface, a charging circuit built into the floating carriage and charging the storage battery with electric power generated by the solar cell, and a solar cell of the floating carriage stopped at a predetermined position emit light. 1. A magnetic levitation conveyance device comprising: a light projection device for irradiating light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1189086A JPH0356007A (en) | 1989-07-20 | 1989-07-20 | Magnetic levitation conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1189086A JPH0356007A (en) | 1989-07-20 | 1989-07-20 | Magnetic levitation conveyor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0356007A true JPH0356007A (en) | 1991-03-11 |
Family
ID=16235090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1189086A Pending JPH0356007A (en) | 1989-07-20 | 1989-07-20 | Magnetic levitation conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0356007A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017039961A1 (en) * | 2015-08-31 | 2017-03-09 | The Boeing Company | System and method for contactless energy transfer to a moving platform |
-
1989
- 1989-07-20 JP JP1189086A patent/JPH0356007A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017039961A1 (en) * | 2015-08-31 | 2017-03-09 | The Boeing Company | System and method for contactless energy transfer to a moving platform |
| CN107852039A (en) * | 2015-08-31 | 2018-03-27 | 波音公司 | System and method for carrying out from non-contact type energy transmission to mobile platform |
| US10264650B2 (en) | 2015-08-31 | 2019-04-16 | The Boeing Company | System and method for contactless energy transfer to a moving platform |
| CN107852039B (en) * | 2015-08-31 | 2021-08-20 | 波音公司 | System and method for contactless energy transfer to a mobile platform |
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