JPH0141647Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a conveyance facility using a self-propelled vehicle, and particularly to a conveyance facility suitable for use in cases where generation of dust is to be avoided.

Generally, a self-propelled vehicle is supplied with power via a current collector that is in sliding contact with a power supply rail of a rail device, and is guided by the rail device to travel. Therefore, due to its structure, it is impossible to avoid the situation in which dust is generated during current collection and the dust is thrown up. For this reason, in the past, it has been impossible to transport objects that must be protected from dust, such as semiconductors, using self-propelled vehicles.

The present invention was devised in view of the above circumstances, and its purpose is to provide a transport facility using a self-propelled vehicle that does not allow generated dust to adhere to the transported objects.

The features of the present invention include a transport duct that can maintain a sealed state from the outside and is provided with a liquid retention section extending in the longitudinal direction, a running duct provided adjacent to this transport duct, and an inside of this running duct. A self-propelled vehicle is provided so that the magnet faces the conveyance duct with a gap therebetween, and the self-propelled vehicle is guided by the magnet of the self-propelled vehicle within the conveyance duct. A magnet is provided at a position corresponding to the magnet, and a transport vehicle for transporting an object is provided, in which a movable guide member such as a guide roller is provided at a position corresponding to the liquid retention part. It is in.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, the configuration of this embodiment will be explained.

Both the conveyance duct 1 and the travel duct 2 are formed into a rectangular tube shape, and are partitioned by a partition wall 3.
Although not shown, the conveyance duct 1 is provided with an entrance/exit for conveyed objects 36 that can be opened and closed, and is configured to maintain a sealed state when the entrance/exit is closed. Further, grooves 4a and 4b are formed on both sides in the width direction inside the conveyance duct 1 by bending the partition wall 3 downward into an L-shape,
Cross-sectional groove shaped steels 4a' and 4b' are fitted into these grooves 4a and 4b, respectively, and liquid water is stored there to form liquid reservoirs 5a and 5b.

On the other hand, within the travel duct 2, a known rail device 6 is supported by support members 7 arranged at predetermined intervals. This rail device 6 includes a first guide surface 8, a pair of second guide surfaces 9a and 9b set lower than the first guide surface 8, and each second guide surface 9.
Third guide surfaces 10a, 1 rising vertically from a, 9b
0b. And the first guide surface 8
A rack 11 and a signal rail 12 are installed parallel to each other.
and power supply rails 13 and 14 are provided. Note that the travel duct 2 is equipped with both known air jetting and suction mechanisms (not shown), and by operating these mechanisms, clean air is circulated in a fixed direction. Except for this air circulation, the traveling duct 2 can be sealed from the outside.

The main body 16 of the self-propelled vehicle 15 that is guided by the rail device 6 and travels within the travel duct 2 is connected to each second guide surface 9.
It is provided with a guide wheel 17 that abuts on the guide wheels 17a and 9b, and a horizontal roller 18 that has a rotation axis perpendicular to the rotation axis of the guide wheel 17 and abuts on each of the third guide surfaces 10a and 10b. The main body 16 also includes a drive wheel 19 that contacts the first guide surface 8, a gear 20 that meshes with the rack 11, and collectors 21, 22, and 23 that slide on the rails 12, 13, and 14, respectively. The self-propelled vehicle 15 operates a motor (not shown) by being supplied with electric power through the collectors 22 and 23, and rotates the drive wheels 19 by the rotational force of the motor. The upper part of the self-propelled vehicle 15 is
The guide portion 26 is resiliently urged away from the main body 16 via a plurality of springs 24, and is supported by a support 25 so as to be movable in the direction toward and away from the main body 16. This guide part 26 has both sides protruding upward,
A magnet 27 is fixedly installed on the upper surface of each of these protruding parts. The magnet 27 and the partition wall 3 are always kept at an appropriate constant distance by the guide roller 28 rotatably supported by the guide portion 26 coming into contact with the partition wall 3 by the elastic force of the spring 24.

Each liquid retention part 5a, 5b of the conveyance duct 1 includes:
Guide rails 29a and 29b are provided, respectively. And these guide rails 29a, 29
A transport carriage 23, in which rotatable guide rollers 30, which are movable guide members guided by b, are each pivotally supported by support arms 31, is arranged in the transport duct 1 with its lower surface leaving a certain gap with the partition wall 3. has been done. A magnet 33 is fixed to the lower surface of the transport vehicle 32 in a position corresponding to the magnet 27 of the self-propelled vehicle 15 so as to be attracted thereto. Further, a magnetic field shielding plate 35 is installed inside the mounting part 34 formed on the upper part of the transport vehicle 32.
The structure is such that the magnetic influence of the magnet 33 does not extend above the mounting portion 34. The conveyed object 3, which should not generate dust, is placed on the loading section 34.
6 is placed.

Next, the operation of this embodiment will be explained.

Similar to conventionally known self-propelled vehicles, when the self-propelled vehicle 15 travels in a predetermined direction within the travel duct 2, the transport vehicle 3 moves the guide portion 26 toward the magnet 27.
The two magnets 33 are guided, and the carrier vehicle 32 travels within the carrier duct 1 in the same direction and at the same speed as the self-propelled vehicle 15. During this traveling, each collector 21, 2
Dust will be generated at each contact portion including the sliding contact portion between the rails 12, 23 and each rail 12, 13, 14. However, since the contact parts in the transport duct 1 are located only in the water of the liquid retention parts 5a and 5b, the generated dust only floats in the water and does not fly up in the direction of the transported object 36. do not have. On the other hand, the dust generated in the traveling duct 2 does not enter the conveying duct 1 because the traveling duct 2 and the conveying duct 1 are in a disconnected state. Furthermore, when both the air jetting and suction mechanisms (not shown) are operated, the dust generated within the traveling duct 2 is discharged out of the traveling duct 2 along with the air flow. In this way, dust does not adhere to the transported object 36 placed on the mounting portion 34 of the transport vehicle 32.

It goes without saying that the structure of the transport vehicle or the movement guide member of the self-propelled vehicle in the present invention is not limited to that of the above-mentioned embodiments, and each magnet may be either a permanent magnet or an electromagnet. In addition, there are no particular limitations on the structure of the liquid retention section or the liquid that is retained here.
The present invention allows many modifications to the embodiments described above.

As is clear from the above explanation, according to the present invention, in the transport duct, the dust generated due to the friction between the inner wall of the liquid reservoir and the movement guide member of the transport vehicle remains suspended in the liquid and does not remain in the space. Since it does not fly up, it is possible to carry out the conveyance work without dust adhering to the conveyed object, and it is suitable for conveying objects such as semiconductors that are sensitive to dust.

[Brief explanation of drawings]

The drawings show a preferred embodiment of the present invention; FIG. 1 is a front view of each duct in cross section, and FIG. 2 is a side view of the same. 1...Transportation duct, 2...Traveling duct, 3...
Partition wall, 5a, 5b...Liquid retention part, 6...Rail device, 15...Self-propelled vehicle, 27...Magnet, 3
0...Guide roller, 32...Transportation truck, 33
...Magnet, 36...Object to be transported.

Claims (1)

[Scope of utility model registration request] A conveying duct capable of maintaining a sealed state from the outside; a liquid storage section extending in the longitudinal direction of the conveying duct and storing liquid inside; and a wall interposed in the conveying duct. a running duct arranged adjacent to each other, and a magnet that can run within the running duct guided by a rail device and facing the wall with a gap between the magnet and the wall. a self-propelled vehicle that can travel within the conveyance duct with a movement guide member positioned inside the liquid reservoir of the conveyance duct, and is positioned opposite to the wall so as to correspond to a magnet of the self-propelled vehicle; A conveyance facility using a self-propelled vehicle, characterized in that it comprises a conveyance cart on which an object to be conveyed can be mounted, and a magnet is provided with a gap between the vehicle and the wall.