JPH0355437B2 - - Google Patents
Info
- Publication number
- JPH0355437B2 JPH0355437B2 JP21782186A JP21782186A JPH0355437B2 JP H0355437 B2 JPH0355437 B2 JP H0355437B2 JP 21782186 A JP21782186 A JP 21782186A JP 21782186 A JP21782186 A JP 21782186A JP H0355437 B2 JPH0355437 B2 JP H0355437B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temperature
- group
- compound semiconductor
- gaas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 47
- 239000013078 crystal Substances 0.000 claims description 40
- 239000004065 semiconductor Substances 0.000 claims description 30
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 28
- 150000001875 compounds Chemical class 0.000 claims description 27
- 238000010438 heat treatment Methods 0.000 claims description 24
- 238000002109 crystal growth method Methods 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 230000004907 flux Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 229910021478 group 5 element Inorganic materials 0.000 claims description 2
- 229910021480 group 4 element Inorganic materials 0.000 claims 1
- 230000008569 process Effects 0.000 description 29
- 238000004140 cleaning Methods 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000002484 cyclic voltammetry Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009396 hybridization Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- -1 trichlene Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21782186A JPS6374992A (ja) | 1986-09-16 | 1986-09-16 | 化合物半導体の結晶成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21782186A JPS6374992A (ja) | 1986-09-16 | 1986-09-16 | 化合物半導体の結晶成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6374992A JPS6374992A (ja) | 1988-04-05 |
| JPH0355437B2 true JPH0355437B2 (enExample) | 1991-08-23 |
Family
ID=16710271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21782186A Granted JPS6374992A (ja) | 1986-09-16 | 1986-09-16 | 化合物半導体の結晶成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6374992A (enExample) |
-
1986
- 1986-09-16 JP JP21782186A patent/JPS6374992A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6374992A (ja) | 1988-04-05 |
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