JPH0355235Y2 - - Google Patents

Info

Publication number
JPH0355235Y2
JPH0355235Y2 JP1985021459U JP2145985U JPH0355235Y2 JP H0355235 Y2 JPH0355235 Y2 JP H0355235Y2 JP 1985021459 U JP1985021459 U JP 1985021459U JP 2145985 U JP2145985 U JP 2145985U JP H0355235 Y2 JPH0355235 Y2 JP H0355235Y2
Authority
JP
Japan
Prior art keywords
duty ratio
ion beam
sample
power supply
thermionic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985021459U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61138156U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985021459U priority Critical patent/JPH0355235Y2/ja
Publication of JPS61138156U publication Critical patent/JPS61138156U/ja
Application granted granted Critical
Publication of JPH0355235Y2 publication Critical patent/JPH0355235Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1985021459U 1985-02-18 1985-02-18 Expired JPH0355235Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985021459U JPH0355235Y2 (enExample) 1985-02-18 1985-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985021459U JPH0355235Y2 (enExample) 1985-02-18 1985-02-18

Publications (2)

Publication Number Publication Date
JPS61138156U JPS61138156U (enExample) 1986-08-27
JPH0355235Y2 true JPH0355235Y2 (enExample) 1991-12-09

Family

ID=30512874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985021459U Expired JPH0355235Y2 (enExample) 1985-02-18 1985-02-18

Country Status (1)

Country Link
JP (1) JPH0355235Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574189A (en) * 1980-06-10 1982-01-09 Matsushita Electric Ind Co Ltd Semiconductor laser device
JPS5879851U (ja) * 1981-11-20 1983-05-30 株式会社日立製作所 電界放射型電子銃装置
DE3226916A1 (de) * 1982-07-19 1984-01-19 Siemens AG, 1000 Berlin und 8000 München Ultraschall-geraet fuer sektorabtastung

Also Published As

Publication number Publication date
JPS61138156U (enExample) 1986-08-27

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