JPH0353964B2 - - Google Patents

Info

Publication number
JPH0353964B2
JPH0353964B2 JP61087451A JP8745186A JPH0353964B2 JP H0353964 B2 JPH0353964 B2 JP H0353964B2 JP 61087451 A JP61087451 A JP 61087451A JP 8745186 A JP8745186 A JP 8745186A JP H0353964 B2 JPH0353964 B2 JP H0353964B2
Authority
JP
Japan
Prior art keywords
filter device
filter
cylindrical
clean
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61087451A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62244417A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8745186A priority Critical patent/JPS62244417A/ja
Publication of JPS62244417A publication Critical patent/JPS62244417A/ja
Publication of JPH0353964B2 publication Critical patent/JPH0353964B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP8745186A 1986-04-15 1986-04-15 フィルタ装置 Granted JPS62244417A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8745186A JPS62244417A (ja) 1986-04-15 1986-04-15 フィルタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8745186A JPS62244417A (ja) 1986-04-15 1986-04-15 フィルタ装置

Publications (2)

Publication Number Publication Date
JPS62244417A JPS62244417A (ja) 1987-10-24
JPH0353964B2 true JPH0353964B2 (enEXAMPLES) 1991-08-16

Family

ID=13915217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8745186A Granted JPS62244417A (ja) 1986-04-15 1986-04-15 フィルタ装置

Country Status (1)

Country Link
JP (1) JPS62244417A (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5049827B2 (ja) * 2008-03-10 2012-10-17 近藤工業株式会社 ミニエンバイラメント方式の半導体製造装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5392769U (enEXAMPLES) * 1976-12-28 1978-07-28
JPS6011520Y2 (ja) * 1980-06-17 1985-04-16 日本無機株式会社 エアフイルタ−の気密取着け装置
JPS57156114U (enEXAMPLES) * 1981-03-26 1982-10-01

Also Published As

Publication number Publication date
JPS62244417A (ja) 1987-10-24

Similar Documents

Publication Publication Date Title
US4178159A (en) Clean room filter assembly
US6561895B2 (en) Adjustable damper for airflow systems
JPH0353964B2 (enEXAMPLES)
JPS61202028A (ja) 除塵装置内蔵の壁部材
JPH0366576B2 (enEXAMPLES)
JPH0253695B2 (enEXAMPLES)
CN211823342U (zh) 冰箱及其净化装置
JP2605944B2 (ja) 二重反転式換気装置
JPH0525219U (ja) クリーンエアコンユニツト
JPH042346Y2 (enEXAMPLES)
JPS6337622Y2 (enEXAMPLES)
KR200151098Y1 (ko) 장비 부착용 공기 청정장치
CN101356410B (zh) 空气调节装置、开闭阀装置及排气管的开闭阀安装方法
JPH0222583Y2 (enEXAMPLES)
JPH0737070Y2 (ja) カセット形四方吹出し天吊空調機
JPS588330Y2 (ja) クリ−ンル−ム用のフイルタ−支持構造
JPH0218410Y2 (enEXAMPLES)
JPH031738Y2 (enEXAMPLES)
JPH0242992Y2 (enEXAMPLES)
JP2606563Y2 (ja) フィルタユニット
JPH033859Y2 (enEXAMPLES)
JPS6129449Y2 (enEXAMPLES)
NL2020370B1 (en) Chimney pipe joint for sustainable chimney systems
JPH033870Y2 (enEXAMPLES)
JPH01189445A (ja) ダクト用換気扇