Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Nippon Steel Corp
Original Assignee
Shin-Etsu Chemical Co Ltd
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd, Nippon Steel CorpfiledCriticalShin-Etsu Chemical Co Ltd
Publication of JPS6399230ApublicationCriticalpatent/JPS6399230A/ja
Publication of JPH0353325B2publicationCriticalpatent/JPH0353325B2/ja