JPH0352883B2 - - Google Patents
Info
- Publication number
- JPH0352883B2 JPH0352883B2 JP60091900A JP9190085A JPH0352883B2 JP H0352883 B2 JPH0352883 B2 JP H0352883B2 JP 60091900 A JP60091900 A JP 60091900A JP 9190085 A JP9190085 A JP 9190085A JP H0352883 B2 JPH0352883 B2 JP H0352883B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- detected
- hole
- detection
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 77
- 239000013307 optical fiber Substances 0.000 claims description 65
- 238000000034 method Methods 0.000 description 6
- 239000000835 fiber Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Manipulator (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60091900A JPS61250505A (ja) | 1985-04-29 | 1985-04-29 | 穴位置検知装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60091900A JPS61250505A (ja) | 1985-04-29 | 1985-04-29 | 穴位置検知装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61250505A JPS61250505A (ja) | 1986-11-07 |
JPH0352883B2 true JPH0352883B2 (zh) | 1991-08-13 |
Family
ID=14039441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60091900A Granted JPS61250505A (ja) | 1985-04-29 | 1985-04-29 | 穴位置検知装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61250505A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0644588B2 (ja) * | 1988-10-21 | 1994-06-08 | 信越半導体株式会社 | オリエンテーションフラット・マークの位置検出装置 |
JPH02306109A (ja) * | 1989-05-19 | 1990-12-19 | Hamamatsu Photonics Kk | 3次元位置認識装置 |
US5570186A (en) * | 1992-04-28 | 1996-10-29 | Mtu Motoren- Und Turbinen-Union Munich Gmbh | Method for inspecting the curvature of a profile, such an edge of a turbine blade |
US5444536A (en) * | 1992-04-28 | 1995-08-22 | Mtu Motoren- Und Turbinen-Union Muenchen Gmbh | Apparatus for measuring the curvature of a profile, such as an edge of a turbine blade |
CN111381291A (zh) * | 2018-12-28 | 2020-07-07 | 四川省绵阳西南自动化研究所 | 一种光纤式弹药盒缺弹检测机构 |
-
1985
- 1985-04-29 JP JP60091900A patent/JPS61250505A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61250505A (ja) | 1986-11-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5410410A (en) | Non-contact type measuring device for measuring three-dimensional shape using optical probe | |
JPS6186606A (ja) | 非接触形状測定方法 | |
JP3537522B2 (ja) | ルツボの計測方法 | |
US20030043362A1 (en) | Six dimensional laser tracking system and method | |
JP2004518123A (ja) | 外部座標系に対して非接触形状測定センサーを較正する方法並びに装置 | |
JPS6468604A (en) | Error detection/feedback apparatus and method for error of position | |
JP2004050356A (ja) | 可動体の位置および姿勢検出装置 | |
JPH0352883B2 (zh) | ||
JPH11503827A (ja) | 直線的寸法を検査するためのオプトエレクトロニック計測装置 | |
JPS63292005A (ja) | 走り誤差補正をなした移動量検出装置 | |
US5883803A (en) | Six degree of freedom sensor | |
JPH02104490A (ja) | 3次元レーザ加工機用ティーチング方法およびその装置 | |
JP2621108B2 (ja) | 板状体の非接触位置決め装置 | |
JP2003166804A (ja) | 空間座標値測定方法及びその測定装置並びに欠陥検査装置 | |
JPS62287107A (ja) | 中心位置測定装置 | |
TWI620917B (zh) | 線性運動平台之量測裝置 | |
JPS6288904A (ja) | 変位・回転検出方法及び姿勢制御装置 | |
JP2529947B2 (ja) | ワ−ク位置ずれ検知装置 | |
JPS63262506A (ja) | ワ−ク位置検出装置 | |
Vann | Six degree of freedom sensor | |
CN117308778A (zh) | 一种光电平台内部负载六自由度测量系统及测量方法 | |
CN117795290A (zh) | 位置测定装置以及位置测定方法 | |
JPS628007A (ja) | 非接触センサによる断面形状の自動測定方法 | |
JPH09243304A (ja) | 形状測定装置、及びそれを用いた被測定面の位置決め方法 | |
TWI388030B (zh) | A device for measuring the error of the mechanism by means of sub - beam and dynamic sensor |