JPH0352578B2 - - Google Patents
Info
- Publication number
- JPH0352578B2 JPH0352578B2 JP57053707A JP5370782A JPH0352578B2 JP H0352578 B2 JPH0352578 B2 JP H0352578B2 JP 57053707 A JP57053707 A JP 57053707A JP 5370782 A JP5370782 A JP 5370782A JP H0352578 B2 JPH0352578 B2 JP H0352578B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- contact
- laser beam
- sample surface
- transmitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013307 optical fiber Substances 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000001902 propagating effect Effects 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims 3
- 239000000284 extract Substances 0.000 claims 1
- 238000002592 echocardiography Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 206010047571 Visual impairment Diseases 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000012770 industrial material Substances 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 208000029257 vision disease Diseases 0.000 description 3
- 230000004393 visual impairment Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02854—Length, thickness
Description
【発明の詳細な説明】
本発明は、導電性表面を有する工業材料に電磁
変換によつて超音波を発生せしめ、その工業材料
からの超音波を光のドツプラ効果を利用すること
によつて検出する非接触超音波送受信装置に関す
るものである。Detailed Description of the Invention The present invention generates ultrasonic waves through electromagnetic conversion in an industrial material having a conductive surface, and detects the ultrasonic waves from the industrial material by utilizing the Doppler effect of light. The present invention relates to a non-contact ultrasonic transmitting and receiving device.
これまでに試料である工業材料に非接触状態で
超音波を発生せしめる方法として電磁力によるも
のと、光照射によるものが知られている。また、
試料からの超音波を非接触状態で検出する方法と
しては電磁変換や光によるものが知られている
が、これまでに知られている非接触超音波送受信
方法は超音波検出範囲に関し不感距離が大きかつ
たり、大出力レーザを使用しなければならない関
係上試料表面からの散乱光によつて人体に視覚障
害を及ぼすという不具合がある。 So far, methods for generating ultrasonic waves in a non-contact state on industrial materials as samples include methods using electromagnetic force and methods using light irradiation. Also,
Electromagnetic conversion and light-based methods are known as methods for detecting ultrasonic waves from a sample in a non-contact state. Since the laser is large and requires the use of a high-output laser, there is a problem in that the scattered light from the surface of the sample may cause visual impairment to the human body.
即ち、電磁変換によるものは金属表面近くに電
磁石および平面状送信コイルを配置し、この送信
コイルに高周波パルス電流を流すことによつて金
属表面に直接超音波を発生せしめるものである。
その高周波電流によつて金属表面には渦電流が発
生され、しかして電磁石による磁界との相互作用
によつて金属表面には超音波が発生されるわけで
ある。一方、金属からの超音波は超音波振動と磁
界の相互作用によつて金属表面に誘起される誘導
電流を受信コイルによつて検出されるようにする
が、超音波発生時に送信コイルに流れる大電流の
電磁誘導により受信コイルにも大電流が流れるこ
とから、検出波形に大きなデツドゾーンが存する
というものである。 That is, in the electromagnetic transducer, an electromagnet and a planar transmitting coil are placed near the metal surface, and by passing a high-frequency pulse current through the transmitting coil, ultrasonic waves are generated directly on the metal surface.
Eddy currents are generated on the metal surface by the high frequency current, and ultrasonic waves are generated on the metal surface due to interaction with the magnetic field from the electromagnet. On the other hand, ultrasonic waves from metal cause the induced current induced on the metal surface by the interaction between ultrasonic vibration and magnetic field to be detected by the receiving coil. Because a large current also flows through the receiving coil due to electromagnetic induction of the current, a large dead zone exists in the detected waveform.
一方、特開昭56−53457号公報や特開昭56−
53423号公報に開示されているように光照射によ
るものは試料表面に高出力パルスレーザ光を照射
し、これによつて試料にパルス状の超音波を発生
させるようにしたものである。この場合での超音
波の検出は光や電磁誘導を利用して行なわれる
が、高出力パルスレーザ光が用いられる関係上試
料表面が損傷されたり、視覚上問題があるという
ものである。 On the other hand, JP-A-56-53457 and JP-A-56-53457
As disclosed in Japanese Patent No. 53423, the method using light irradiation irradiates the sample surface with high-power pulsed laser light, thereby generating pulsed ultrasonic waves in the sample. In this case, ultrasonic waves are detected using light or electromagnetic induction, but since high-power pulsed laser light is used, the sample surface may be damaged and visual problems may occur.
よつて本発明の目的は、超音波検出範囲に関し
不感距離が小さく、しかも超音波発生に高出力パ
ルスレーザ光が用いられない非接触超音波送受信
装置を供するにある。 SUMMARY OF THE INVENTION Therefore, it is an object of the present invention to provide a non-contact ultrasonic transmitter/receiver that has a small dead distance in terms of ultrasonic detection range and does not use high-power pulsed laser light to generate ultrasonic waves.
この目的のため本発明は、基本的には超音波の
発生は電磁変換によつて、また超音波の検出は光
によつて行なうようになしたものである。光は電
気的ノイズに対して強いことから、超音波発生時
であつても送受信系は結合されなく、よつて不感
距離を小さく抑えた状態で薄肉材や浅部をも非破
壊検査することが可能となるものである。また、
超音波検出用レーザ光は連続発振のものとされ、
しかも高出力のものとはされないから、試料表面
の損傷や視覚障害は生じる余地がなくなるもので
ある。 For this purpose, the present invention basically generates ultrasonic waves by electromagnetic conversion, and detects ultrasonic waves by using light. Since light is resistant to electrical noise, the transmitting and receiving systems are not coupled even when ultrasonic waves are generated, making it possible to conduct non-destructive inspections of thin materials and shallow areas while keeping the dead distance small. It is possible. Also,
The laser beam for ultrasonic detection is continuous wave.
Moreover, since the power is not high, there is no possibility of damage to the sample surface or visual impairment.
以下、本発明を第１図から第３図により説明す
る。 The present invention will be explained below with reference to FIGS. 1 to 3.
第１図は本発明による装置の一例での構成を試
料とともに示したものである。 FIG. 1 shows the configuration of an example of the apparatus according to the present invention together with a sample.
これによると試料３における一表面３ａに対し
ては電磁トランスデユーサとしての送信コイル２
が図示の如くに近接して配置されるようになつて
いる。送信コイル２は例えば平面コイルとして構
成され、これに高周波パルス電流を流すことによ
つて表面３ａに高周波振動を生起せしめるもので
ある。即ち、第２図ａに示す同期信号に同期して
パルサー１より送信コイル２に高周波パルス電流
を流すようにすれば、このパルス電流によつて発
生された交番磁界が表面３ａに作用することにな
り、しかして表面３ａにはその交番磁界の変化を
妨げるべく渦電流が発生するところとなるもので
ある。この渦電流と磁界との相互作用によつて表
面３ａには振動が第２図ｂに示す如くに生起さ
れ、この振動が超音波となつて試料３中を伝播す
るようになるわけである。試料３を伝播する超音
波は他方の表面３ｂを含む音響的不連続部で反射
され、再び表面３ａに振動を生起させるが、この
超音波エコーによる振動を本発明では光によつて
検出せんとするものである。 According to this, for one surface 3a of the sample 3, the transmitting coil 2 as an electromagnetic transducer
are arranged close to each other as shown. The transmitting coil 2 is configured as, for example, a planar coil, and is configured to generate high-frequency vibrations on the surface 3a by passing a high-frequency pulse current through it. That is, if a high-frequency pulse current is caused to flow from the pulser 1 to the transmitting coil 2 in synchronization with the synchronization signal shown in FIG. 2a, the alternating magnetic field generated by this pulse current will act on the surface 3a. Therefore, eddy currents are generated on the surface 3a to prevent changes in the alternating magnetic field. Due to the interaction between the eddy current and the magnetic field, vibrations are generated on the surface 3a as shown in FIG. 2b, and these vibrations become ultrasonic waves that propagate through the sample 3. The ultrasonic waves propagating through the sample 3 are reflected at the acoustic discontinuities including the other surface 3b, causing vibrations on the surface 3a again, but in the present invention, the vibrations caused by the ultrasonic echoes cannot be detected by light. It is something to do.
超音波エコーによる振動を検出するにはレーザ
発振器４からの連続レーザ光は光導波手段である
光フアイバ５、ビームスプリツタ、第１の光導波
手段である光フアイバ５′を介し表面３ａに照射
される。超音波エコーが到達する表面３ａに第２
図ｃに示す如くにレーザ光が照射されると、この
レーザ光は超音波エコーによる振動によつてドツ
プラ効果による周波数変化を受け、周波数変調光
として反射されるようになるものである。この周
波数変調光は光フアイバ５′出射端面で僅かに反
射された反射レーザ光（参照光として利用）とと
もに光フアイバ５′を介しビームスプリツタ６で
入射レーザ光と分離され、更に第２の光導波手段
である光フアイバ５″を介し光検出器７および光
受信器８よりなる受信器によつて検出されるよう
になつている。光検出器７は具体的にはフオトダ
イオードなどによつて構成され、また、光受信器
８は光検出器７にバイアス電流を供給したり、光
検出器７からの検出信号を適当な帯域内で増幅す
るなどの機能を有しているが、この受信器によつ
てドツプラシフトされた周波数成分が第２図ｄに
示す如く得られるわけである。受信器からの信号
はFM復調器９によつて第２図ｅに示す如くに復
調された後検波・整流されオシロスコープ１０上
にＡモード表示され得ることになる。勿論表示さ
れたピーク状波形のうち最初のもの以外は超音波
エコーによるものである。なお、本例では送信コ
イル２および光フアイバ５′先端部は狭い空間内
に配置され得ることから、送受信場所は比較的自
由となる。 To detect vibrations caused by ultrasonic echoes, continuous laser light from the laser oscillator 4 is irradiated onto the surface 3a through an optical fiber 5 as an optical waveguide, a beam splitter, and an optical fiber 5' as a first optical waveguide. be done. A second layer is placed on the surface 3a where the ultrasonic echoes reach.
When a laser beam is irradiated as shown in FIG. c, the laser beam undergoes a frequency change due to the Doppler effect due to vibrations caused by ultrasonic echoes, and is reflected as frequency-modulated light. This frequency modulated light is separated from the incident laser light by the beam splitter 6 via the optical fiber 5' together with the reflected laser light (used as a reference light) that is slightly reflected at the output end face of the optical fiber 5', and then sent to the second light guide. The light is detected by a receiver consisting of a photodetector 7 and a photoreceiver 8 via an optical fiber 5'' which is a wave means.Specifically, the photodetector 7 is a photodiode or the like. The optical receiver 8 also has functions such as supplying a bias current to the photodetector 7 and amplifying the detection signal from the photodetector 7 within an appropriate band. The frequency component Doppler-shifted by the receiver is obtained as shown in FIG. 2d.The signal from the receiver is demodulated by the FM demodulator 9 as shown in FIG. It is rectified and can be displayed in A mode on the oscilloscope 10.Of course, all of the displayed peak waveforms except the first are due to ultrasonic echoes.In this example, the transmitting coil 2 and the optical fiber 5' Since the tip can be placed in a narrow space, the transmitting and receiving locations are relatively free.
このようにして超音波の送受信を行なう場合は
超音波発生時であつても送受信系は結合されな
く、単に発生された超音波のみが受信されるだけ
であるから、不感距離を小さく抑えた状態で超音
波エコーを検出することが可能となるものであ
る。 When transmitting and receiving ultrasonic waves in this way, the transmitting and receiving systems are not coupled even when ultrasonic waves are generated, and only the generated ultrasonic waves are received, so the dead distance is kept small. This makes it possible to detect ultrasonic echoes.
次に第３図により本発明による他の装置の一例
での構成について説明する。 Next, the configuration of another example of the device according to the present invention will be explained with reference to FIG.
本例では電磁トランスデユーサは送信コイル２
と磁場発生器１３とから構成される。直流電源１
４より直流電流を磁場発生器１３に流し渦電流に
作用する磁界を発生せしめる場合は、送信コイル
２への高周波パルス電流が小さくとも同一パワー
の超音波が発生されるところとなるものである。
また、本例ではレーザ発振器４より出射される連
続レーザ光は超音波の周波数よりも１桁以上高い
周波数のキヤリア信号によつて振幅変調されるよ
うになつている。信号発生器１２からのキヤリア
信号によつて振幅変調された連続レーザ光は光フ
アイバ５を介し試料３の他表面３ｂに照射される
一方、表面３ｂでの超音波振動により周波数変調
されたキヤリア信号は光フアイバ１１を介し先の
場合と同様にして受信器およびFM復調器によつ
て検出表示されるようにするものである。このよ
うにする場合は先の態様に比しSN比が向上され
るところとなるものである。なお、本例において
は試料３の他表面３ｂ側で超音波を受信するよう
にしているが、これは本質的な問題ではない。目
的によつては送信コイル２と反対の側の表面３ｂ
より超音波を受信する必要があるからである。ま
た、本例では光フアイバは送受兼用とされていな
いが、これはこの場合には連続レーザ光の周波数
成分の混入は低く抑えられる必要があるからであ
る。 In this example, the electromagnetic transducer is the transmitter coil 2.
and a magnetic field generator 13. DC power supply 1
4 to the magnetic field generator 13 to generate a magnetic field that acts on the eddy current, ultrasonic waves of the same power will be generated even if the high frequency pulse current to the transmitting coil 2 is small.
Further, in this example, the continuous laser beam emitted from the laser oscillator 4 is amplitude-modulated by a carrier signal having a frequency one order or more higher than the frequency of the ultrasonic wave. The continuous laser beam amplitude-modulated by the carrier signal from the signal generator 12 is irradiated onto the other surface 3b of the sample 3 via the optical fiber 5, while the carrier signal is frequency-modulated by the ultrasonic vibrations on the surface 3b. is transmitted through the optical fiber 11 so that it is detected and displayed by the receiver and the FM demodulator in the same manner as in the previous case. In this case, the SN ratio is improved compared to the previous embodiment. In this example, the ultrasonic waves are received on the other surface 3b side of the sample 3, but this is not an essential problem. Depending on the purpose, the surface 3b on the side opposite to the transmitting coil 2
This is because it is necessary to receive more ultrasonic waves. Further, in this example, the optical fiber is not used for both transmission and reception, because in this case, it is necessary to suppress the frequency component of the continuous laser beam from being mixed in.
以上説明したように本発明は、基本的には超音
波の発生は電磁変換によつて、また超音波は光の
ドツプラ効果を利用して検出するようにしたもの
である。したがつて本発明による場合は、超音波
発生時であつても送受信系は電磁結合されること
はなく不感距離が小さく抑えられた状態で試料浅
部や薄肉試料の欠陥を検査し得、また薄肉試料の
厚さを測定し得るという効果がある。また、高出
力パルスレーザ光は使用されないので、試料の損
傷や視覚障害は生じないものとなり、これまでに
実用化されている非接触超音波送受信装置とは異
なつた効果をもつところとなる。 As explained above, the present invention basically generates ultrasonic waves by electromagnetic conversion and detects the ultrasonic waves by using the Doppler effect of light. Therefore, in the case of the present invention, even when ultrasonic waves are generated, the transmitting and receiving system is not electromagnetically coupled, and defects in shallow parts of the sample and thin samples can be inspected with the dead distance kept small. This has the effect of being able to measure the thickness of a thin sample. In addition, since high-power pulsed laser light is not used, there will be no damage to the sample or visual impairment, and the system will have an effect different from that of non-contact ultrasonic transceivers that have been put into practical use to date.
第１図は、本発明による装置の一例での構成を
試料とともに示す図、第２図ａ〜ｅはその要部で
の入出力信号波形図、第３図は、本発明による他
の装置の一例での構成を試料とともに示す図であ
る。
１…パルサー、２…送信コイル、４…レーザ発
振器、５，５′，５″，１１…光フアイバ、６…ビ
ームスプリツタ、７…光検出器、８…光受信器、
９…FM復調器、１２…信号発生器、１３…磁場
発生器。
FIG. 1 is a diagram showing the configuration of an example of the device according to the present invention together with a sample, FIGS. 2 a to e are input/output signal waveform diagrams of the main parts, and FIG. It is a figure which shows the structure in an example with a sample. DESCRIPTION OF SYMBOLS 1... Pulser, 2... Transmission coil, 4... Laser oscillator, 5, 5', 5'', 11... Optical fiber, 6... Beam splitter, 7... Photodetector, 8... Optical receiver,
9...FM demodulator, 12...signal generator, 13...magnetic field generator.
Claims (1)
起せしめる電磁力利用の超音波発生手段と、試料
中を伝播する超音波によつて試料表面に生起され
る超音波振動を光のドツプラ効果を利用して検出
する振動検出手段とを具備してなる非接触超音波
送受信装置であつて、超音波発生手段を、高周波
パルス電流を発生するパルサーと、該パルサーか
らの高周波パルス電流が印加される送信コイルと
から少なくとも構成する一方、振動検出手段を、
連続レーザ光を発生するレーザ発振器と、該発振
器からのレーザ光を途中のビームスプリツタ、上
記送信コイルの中空内部を介し試料表面に非接触
で照射するとともに、該表面からの反射レーザ光
を逆経路を介し、上記ビームスプリツタによつて
上記レーザ発振器からのレーザ光より分離抽出す
る光フアイバと、上記ビームスプリツタからの反
射レーザ光のドツプラシフトされた周波数成分を
ヘテロダイン検波する光検出器および光受信器
と、ドツプラシフトされた周波数成分よりドツプ
ラシフト量を検出するFM復調器とから構成して
なる非接触超音波送受信装置。 ２ 送信コイルに関連して、試料表面に直流バイ
アス磁場を印加するための直流磁場発生器が具備
されてなる特許請求の範囲第１項記載の非接触超
音波送受信装置。 ３ 導電性の試料表面に非接触で超音波振動を生
起せしめる電磁力利用の超音波発生手段と、試料
中を伝播する超音波によつて試料表面に生起され
る超音波振動を光のドツプラ効果を利用して検出
する振動検出手段とを具備してなる非接触超音波
送受信装置であつて、超音波発生手段を、高周波
パルス電流を発生するパルサーと、該パルサーか
らの高周波パルス電流が印加される送信コイルと
から少なくとも構成する一方、振動検出手段を、
連続レーザ光を発生するレーザ発振器と、該発振
器を制御して連続レーザ光を所定に振幅変調する
信号発生器と、上記レーザ発振器からのレーザ光
を試料表面に非接触で照射する第１の光フアイバ
と、該表面からの反射レーザ光を非接触で取り出
す第２の光フアイバと、該フアイバからの反射レ
ーザ光の変調波成分を検出する光検出器および光
受信器と、該変調波成分よりドツプラシフトされ
た周波数成分を検出するFM復調器とから構成し
てなる非接触超音波送受信装置。 ４ 送信コイルに関連して、試料表面に直流バイ
アス磁場を印加するための直流磁場発生器が具備
されてなる特許請求の範囲第３項記載の非接触超
音波送受信装置。[Claims] 1. Ultrasonic generation means that uses electromagnetic force to generate ultrasonic vibrations on a conductive sample surface without contact, and ultrasonic waves generated on the sample surface by ultrasonic waves propagating in the sample. A non-contact ultrasonic transmitting/receiving device comprising vibration detecting means for detecting vibrations using the Doppler effect of light, the ultrasonic generating means comprising a pulser that generates a high-frequency pulse current and a pulser that generates a high-frequency pulse current. a transmitting coil to which a high-frequency pulse current is applied, and a vibration detecting means;
A laser oscillator that generates a continuous laser beam, a beam splitter on the way, and a non-contact irradiation of the laser beam from the oscillator to the sample surface through the hollow interior of the transmitting coil, and a reverse laser beam reflected from the surface. An optical fiber that separates and extracts the laser light from the laser oscillator by the beam splitter through a path, a photodetector that heterodyne-detects the Doppler-shifted frequency component of the reflected laser light from the beam splitter, and an optical fiber. A non-contact ultrasonic transmitting and receiving device consisting of a receiver and an FM demodulator that detects the amount of Doppler shift from Doppler shifted frequency components. 2. The non-contact ultrasonic transmitting/receiving device according to claim 1, further comprising a DC magnetic field generator for applying a DC bias magnetic field to the sample surface in association with the transmitting coil. 3 Ultrasonic generation means that uses electromagnetic force to generate ultrasonic vibrations on the conductive sample surface without contact, and the Doppler effect of light to generate ultrasonic vibrations on the sample surface by the ultrasonic waves propagating in the sample. A non-contact ultrasonic transmitting/receiving device comprising: a vibration detecting means for detecting vibrations using the ultrasonic generator; the vibration detecting means;
a laser oscillator that generates a continuous laser beam; a signal generator that controls the oscillator to modulate the amplitude of the continuous laser beam in a predetermined manner; and a first beam that irradiates the sample surface with the laser beam from the laser oscillator in a non-contact manner. a fiber, a second optical fiber for extracting the reflected laser beam from the surface without contact, a photodetector and an optical receiver for detecting a modulated wave component of the reflected laser beam from the fiber, and a second optical fiber for extracting the reflected laser beam from the surface of the fiber; A non-contact ultrasonic transceiver device consisting of an FM demodulator that detects Doppler-shifted frequency components. 4. The non-contact ultrasonic transmitting/receiving device according to claim 3, further comprising a DC magnetic field generator for applying a DC bias magnetic field to the sample surface in association with the transmitting coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57053707A JPS58171662A (en) | 1982-04-02 | 1982-04-02 | Noncontacting type ultrasonic wave receiver and transmitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57053707A JPS58171662A (en) | 1982-04-02 | 1982-04-02 | Noncontacting type ultrasonic wave receiver and transmitter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58171662A JPS58171662A (en) | 1983-10-08 |
| JPH0352578B2 true JPH0352578B2 (en) | 1991-08-12 |
Family
ID=12950297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57053707A Granted JPS58171662A (en) | 1982-04-02 | 1982-04-02 | Noncontacting type ultrasonic wave receiver and transmitter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58171662A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012081347A1 (en) * | 2010-12-17 | 2012-06-21 | 株式会社日立製作所 | Internal defect inpsection method and apparatus |
| JP2012122860A (en) * | 2010-12-08 | 2012-06-28 | Akita Univ | Imaging method and imaging apparatus |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62126346A (en) * | 1985-11-28 | 1987-06-08 | Nippon Kokan Kk <Nkk> | Method for ultrasonic detection in non-contact state |
| JPH0610667B2 (en) * | 1986-07-28 | 1994-02-09 | 日本鋼管株式会社 | Non-contact ultrasonic flaw detector |
| KR100471352B1 (en) * | 2001-07-10 | 2005-03-07 | 기아자동차주식회사 | Volt engagement by non-contact vibration measurement |
| JP2006133186A (en) * | 2004-11-09 | 2006-05-25 | Toshiba Corp | Laser ultrasonic inspection method |
| JP4898247B2 (en) * | 2006-02-28 | 2012-03-14 | 三菱重工業株式会社 | Ultrasonic inspection device and measurement object |
| JP5624271B2 (en) * | 2008-09-17 | 2014-11-12 | 株式会社東芝 | Piping thickness measurement method and apparatus |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5235228A (en) * | 1975-09-12 | 1977-03-17 | Nitto Electric Ind Co Ltd | Method for adhering boards |
| JPS5286388A (en) * | 1976-01-13 | 1977-07-18 | Nippon Steel Corp | Method of detecting flaw by supersonic waves |
| JPS53113592A (en) * | 1977-03-11 | 1978-10-04 | Krautkraemer Gmbh | Receiving method and apparatus for supersonic waves from surfaces of processed articles by optical means |
| JPS56164952A (en) * | 1980-05-23 | 1981-12-18 | Nippon Steel Corp | Transmitting and receiving method for ultrasonic wave by laser beam |
-
1982
- 1982-04-02 JP JP57053707A patent/JPS58171662A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5235228A (en) * | 1975-09-12 | 1977-03-17 | Nitto Electric Ind Co Ltd | Method for adhering boards |
| JPS5286388A (en) * | 1976-01-13 | 1977-07-18 | Nippon Steel Corp | Method of detecting flaw by supersonic waves |
| JPS53113592A (en) * | 1977-03-11 | 1978-10-04 | Krautkraemer Gmbh | Receiving method and apparatus for supersonic waves from surfaces of processed articles by optical means |
| JPS56164952A (en) * | 1980-05-23 | 1981-12-18 | Nippon Steel Corp | Transmitting and receiving method for ultrasonic wave by laser beam |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012122860A (en) * | 2010-12-08 | 2012-06-28 | Akita Univ | Imaging method and imaging apparatus |
| WO2012081347A1 (en) * | 2010-12-17 | 2012-06-21 | 株式会社日立製作所 | Internal defect inpsection method and apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58171662A (en) | 1983-10-08 |
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